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    • 1. 发明授权
    • Transfer apparatus
    • 转运设备
    • US5658115A
    • 1997-08-19
    • US521957
    • 1995-08-31
    • Takashi YamazakiHiroyuki SakaiHiroshi SuganoShigeo Moriyama
    • Takashi YamazakiHiroyuki SakaiHiroshi SuganoShigeo Moriyama
    • B65G49/07H01L21/00H01L21/677B65H5/08
    • H01L21/67748H01L21/67069Y10S414/135
    • A transfer apparatus is to be used for a wafer loader of an electron beam drawing apparatus, and is constructed particularly in consideration of downsizing of the apparatus as a whole, high-speed transfer for coping with high throughput, and prevention of adhesion of foreign matters for the application to DRAM of 64 and 256 megabits. A transferring mechanism for positioning and fixing an object to be transferred due to combination of positioning projections which are formed on fixing tables on which an object to be transferred is set and transferring arm assemblies and groove portions which are formed in a lower surface of the transferred object. Positioning projections are formed on fixing tables on which an object to be transferred is set and on a transferring arm, and a transferring mechanism for positioning and fixing the object by means of the combination of the positioning projections and groove portions formed in a lower surface of the object is disposed in parallel with a main apparatus. The transferring arm has a vertically moving mechanism and a waiting position of the arm is set in the middle of the transferring path. This transfer apparatus has the structure suitable for high-speed transfer and has less possibility of generation and adhesion of foreign matters. In addition, the apparatus can be reduced in size as a whole.
    • 转印装置用于电子束拉伸装置的晶片装载机,特别考虑到整体装置的小型化,高速转印,高产量的处理,防止异物附着 适用于64位和256兆位的DRAM。 一种转印机构,用于定位和固定由于形成在待转印物体的固定台上的定位突起的组合而被转印的物体和传送臂组件和形成在被转印物体的下表面中的槽部分 目的。 定位突起形成在其上设置有待转印物体的固定台上,并且在转印臂上形成有用于定位和固定物体的转印机构,该转印机构通过定位突起和形成在下表面的槽部的组合 该物体与主装置平行设置。 传送臂具有垂直移动机构,并且臂的等待位置设置在传送路径的中间。 该转印装置具有适于高速转印的结构,并且异物的产生和附着的可能性较小。 另外,该装置的整体尺寸可以减小。
    • 4. 发明授权
    • Semiconductor device with a balun
    • 半导体器件与平衡 - 不平衡转换器
    • US08575731B2
    • 2013-11-05
    • US12999472
    • 2009-06-15
    • Shinji UjitaTakeshi FukudaHiroyuki Sakai
    • Shinji UjitaTakeshi FukudaHiroyuki Sakai
    • H01L23/58
    • H01P5/10H01L23/64H01L23/66H01L2924/0002H01L2924/19104H01L2924/3011H01L2924/00
    • A semiconductor integrated circuit device with a balun which is formed above a conductive semiconductor substrate and which includes a dielectric film, an unbalanced line for transmitting an unbalanced signal, and balanced lines for transmitting a balanced signal. The unbalanced line is placed opposite to the balanced lines via a nano-composite film that is a region of the dielectric film. The nano-composite film, interposed between the unbalanced line and the balanced lines, has a relative permittivity higher than that of other regions of the dielectric film. This allows suppression of electromagnetic coupling of transmission lines or passive elements other than the balun, thereby providing a semiconductor device with a wide-band and small-size balun.
    • 一种具有平衡 - 不平衡转换器的半导体集成电路器件,其形成在导电半导体衬底之上,并且包括电介质膜,用于传输不平衡信号的不平衡线以及用于传输平衡信号的平衡线。 不平衡线通过作为电介质膜的区域的纳米复合膜与平衡线相对放置。 夹在不平衡线和平衡线之间的纳米复合膜的介电常数比电介质膜的其它区域的介电常数高。 这允许抑制除了平衡 - 不平衡变换器之外的传输线或无源元件的电磁耦合,从而提供具有宽带和小尺寸平衡 - 不平衡转换器的半导体器件。
    • 6. 发明授权
    • Spread spectrum radar apparatus, method for determining virtual image, and method for suppressing virtual image
    • 扩频雷达装置,虚像的确定方法,虚拟图像抑制方法
    • US08018372B2
    • 2011-09-13
    • US12678586
    • 2008-07-28
    • Noboru NegoroTakeshi FukudaHiroyuki Sakai
    • Noboru NegoroTakeshi FukudaHiroyuki Sakai
    • G01S13/58
    • G01S13/325G01S13/931G01S2013/9375G01S2013/9378
    • The spread spectrum radar apparatus in the present invention (i) includes: a transmission code generator (110); a reception code generator (121) generating a reception code obtained by delaying a transmission code; a spread modulator (112) spread-modulating a signal generated by a local oscillator (111) using the transmission code; a transmission antenna (113) transmitting the spread-modulated signal; a reception antenna (120) receiving a signal; a spread demodulator (122) demodulating the signal using the reception code to provide a correlation signal; a mixer (123) mixing the correlation signal and the signal generated by the local oscillator (111) to generate a radar signal; a virtual image determining unit (130) determining a virtual image; and a radar signal calculation device (160) calculating the radar signal using a virtual image determination signal, and (ii) adds a calculation and an offset signal for suppressing a peak intensity of the virtual image when the virtual image occurs.
    • 本发明(i)中的扩频雷达装置包括:发送码发生器(110); 产生通过延迟传输码而获得的接收码的接收码发生器(121); 扩展调制器(112)使用所述传输码扩展调制由本地振荡器(111)产生的信号; 发送所述扩展调制信号的发送天线(113) 接收天线(120),接收信号; 扩展解调器(122),使用接收码解调信号以提供相关信号; 混合器(123),混合相关信号和由本地振荡器(111)产生的信号,以产生雷达信号; 虚拟图像确定单元(130),确定虚拟图像; 以及雷达信号计算装置(160),使用虚拟图像确定信号计算雷达信号,并且(ii)在虚拟图像发生时添加用于抑制虚拟图像的峰值强度的计算和偏移信号。
    • 7. 发明申请
    • SEMICONDUCTOR DEVICE WITH A BALUN
    • 带BALUN的半导体器件
    • US20110089543A1
    • 2011-04-21
    • US12999472
    • 2009-06-15
    • Shinji UjitaTakeshi FukudaHiroyuki Sakai
    • Shinji UjitaTakeshi FukudaHiroyuki Sakai
    • H01L23/58
    • H01P5/10H01L23/64H01L23/66H01L2924/0002H01L2924/19104H01L2924/3011H01L2924/00
    • A semiconductor integrated circuit device with a balun which is formed above a conductive semiconductor substrate and which includes a dielectric film, an unbalanced line for transmitting an unbalanced signal, and balanced lines for transmitting a balanced signal. The unbalanced line is placed opposite to the balanced lines via a nano-composite film that is a region of the dielectric film. The nano-composite film, interposed between the unbalanced line and the balanced lines, has a relative permittivity higher than that of other regions of the dielectric film. This allows suppression of electromagnetic coupling of transmission lines or passive elements other than the balun, thereby providing a semiconductor device with a wide-band and small-size balun.
    • 一种具有平衡 - 不平衡转换器的半导体集成电路器件,其形成在导电半导体衬底之上,并且包括电介质膜,用于传输不平衡信号的不平衡线以及用于传输平衡信号的平衡线。 不平衡线通过作为电介质膜的区域的纳米复合膜与平衡线相对放置。 夹在不平衡线和平衡线之间的纳米复合膜的介电常数比电介质膜的其它区域的介电常数高。 这允许抑制除了平衡 - 不平衡变换器之外的传输线或无源元件的电磁耦合,从而提供具有宽带和小尺寸平衡 - 不平衡转换器的半导体器件。
    • 8. 发明申请
    • RANGE FINDER, SHAPE MEASURING DEVICE, AND METHODS FOR THEM
    • 范围查找器,形状测量装置及其方法
    • US20110012774A1
    • 2011-01-20
    • US12922327
    • 2009-03-06
    • Hiroyuki SakaiTakeshi FukudaKenichi InoueToru SatoTakuya SakamotoYusuke Kani
    • Hiroyuki SakaiTakeshi FukudaKenichi InoueToru SatoTakuya SakamotoYusuke Kani
    • G01S13/08G01S13/89
    • G01S13/325G01S7/4021
    • The range finder includes a transmitting unit (71) which emits a transmitted wave (75) spread using a spread code at a constant chip rate, a receiving unit (72) which receives a reflected wave (76), a correlation unit (73) which calculates a correlation waveform indicating delay time and a correlation between the transmitted wave (75) and the reflected wave (76), and a distance calculation unit (74) which calculates, from a peak position in the waveform, a distance to the object. The correlation unit (73) calculates the correlation waveform obtained when changing the delay time for each range gate. The distance calculation unit (74) calculates the distance to the object by calculating, at a resolution finer than the range gate, a delay time corresponding to the peak in the correlation wave using a highest-correlation point and an adjacent higher-correlation point in the wave form.
    • 测距仪包括发射单元(71),发射单元(71),其以恒定码片速率发射使用扩展码扩展的发射波(75);接收反射波的接收单元(76),相关单元(73) 其计算出表示延迟时间的相关波形和发射波(75)与反射波(76)之间的相关性,距离计算单元(74)从波形的峰值位置计算到物体的距离 。 相关单元(73)计算当改变每个范围门的延迟时间时获得的相关波形。 距离计算单元(74)通过使用最高相关点和相邻较高相关点在相关波中与峰值相对应的分辨率,以比分辨率栅格更精细的分辨率计算到对象的距离 波形。
    • 10. 发明申请
    • DETECTOR
    • 探测器
    • US20080165828A1
    • 2008-07-10
    • US11926721
    • 2007-10-29
    • Hidebumi SekiHiroyuki SakaiTomohiro Rokugawa
    • Hidebumi SekiHiroyuki SakaiTomohiro Rokugawa
    • G01K1/00G01K13/02
    • G01K1/14G01D11/24G01D11/30G01F15/06G01F15/18G01F15/185G01K1/06G01L19/16
    • A detector (10) includes: a joint (20) mounted on a fluid pipe; a case (30) mounted on the joint (20) to house a sensor (60); a holder (40) attached to the case (30) and housing a circuit board (70); and a cover (50) attached to the holder (40) and integrated with a light-shielding plate (53).An annular first lug (421), a leaf spring (422) having a projection (423) and a rotation restrainer which projects further from the first lug (421) along an inner circumferential side thereof are integrally formed on the holder (40).An annular first recess (32) to be engaged with the first lug (421) is formed on the case (30). A groove (33) is formed on an inner surface of the first recess. An annular second recess (34) is provided on an inner circumferential side of the first recess (32). A riser portion (35) is provided to a bottom surface thereof.
    • 检测器(10)包括:安装在流体管上的接头(20); 安装在接头(20)上以容纳传感器(60)的壳体(30); 安装在壳体(30)上并容纳电路板(70)的支架(40); 以及附接到所述保持器(40)并与遮光板(53)一体化的盖(50)。 在保持器(40)上一体形成环状的第一凸缘(421),具有突起(423)的旋转限制器的环形第一凸耳(421)和从第一凸缘(421)进一步突出的旋转限制器。 在壳体(30)上形成有与第一凸耳(421)接合的环形第一凹部(32)。 在第一凹部的内表面上形成有凹槽(33)。 在第一凹部(32)的内周侧设有环状的第二凹部(34)。 提升部分(35)设置在其底面。