会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 7. 发明授权
    • Semi-insulating aluminum nitride sintered body
    • 半绝缘氮化铝烧结体
    • US5958813A
    • 1999-09-28
    • US978067
    • 1997-11-25
    • Hiroshi AidaYumiko ItoTakero FukudomeKazuhiko Mikami
    • Hiroshi AidaYumiko ItoTakero FukudomeKazuhiko Mikami
    • B23Q3/154C04B35/581B23Q3/15
    • C04B35/581B23Q3/154Y10T279/23
    • The semi-insulating aluminum nitride sintered body of this invention is composed of aluminum nitride particles, electroconductive fine particles having a volume inherent resistivity value of not larger than 10.sup.2 .OMEGA..multidot.cm which are dispersed among the aluminum nitride particles and an intergranular phase formed from an oxide containing at least one element selected from the group consisting of Ti, Ce, Ni, Ta, Y, Er and Yb, or from Si. This sintered body has a volume inherent resistivity value of 10.sup.4 to 10.sup.11 .OMEGA..multidot.cm, and is very useful, for example, as a member for removing static electricity, or a dielectric layer of an electrostatic chuck. Since dispersions of volume inherent resistivity values are very small, a material having a volume inherent resistivity value within a certain range can be produced with good reproducibility. Accordingly, the yield is high, and the productivity is very good.
    • 本发明的半绝缘氮化铝烧结体由氮化铝颗粒构成,分散在氮化铝颗粒之间的体积固有电阻率值不大于102欧姆·xcm的导电细颗粒和由氧化物形成的晶间相 含有选自Ti,Ce,Ni,Ta,Y,Er和Yb中的至少一种元素,或者来自Si。 该烧结体的体积固有电阻率值为104〜1011欧米伽xcm,例如作为除静电的部件或静电卡盘的电介质层是非常有用的。 由于体积固有电阻率值的分散度非常小,所以可以以良好的再现性产生体积固有电阻率值在一定范围内的材料。 因此,产率高,生产率非常好。