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1. 发明授权

US06848625B2 Process liquid supply mechanism and process liquid supply method 有权
标题翻译：工艺液体供给机构和工艺液体供应方式
公开(公告)号：US06848625B2
公开(公告)日：2005-02-01
申请号：US10388357
申请日：2003-03-14
申请人： Takashi Takekuma , Toshinobu Furusho , Takeshi Ohto , Hiroyuki Miyamoto , Kousuke Yoshihara , Shinya Hori , Hiroyuki Hara
发明人： Takashi Takekuma , Toshinobu Furusho , Takeshi Ohto , Hiroyuki Miyamoto , Kousuke Yoshihara , Shinya Hori , Hiroyuki Hara
IPC分类号： H01L21/00 , B05B17/00
CPC分类号： H01L21/67253 , H01L21/6715
摘要： A process liquid supply mechanism for supplying a process liquid comprises a process liquid supply source for supplying a process liquid, a process liquid discharging nozzle for discharging the process liquid, a pipe connecting the process liquid supply source to the process liquid discharging nozzle, a pump mounted to the pipe for allowing the process liquid to be discharged from the process liquid discharging nozzle, a pressure sensor for detecting the pressure of the process liquid at a prescribed position intermediate between the pump and the process liquid discharging nozzle, and a controller for controlling the inner pressure of the pump based on the pressure value detected by the pressure sensor and the relationship obtained in advance between the pressure and the discharging rate of the process liquid such that the process liquid is discharged at a prescribed discharging rate.
摘要翻译：一种用于提供处理液的处理液供给机构包括：用于供给处理液的处理液供给源，用于排出处理液的处理液排出喷嘴，将处理液供给源与处理液排出喷嘴连接的管，泵安装到管道上以允许处理液体从处理液体排放喷嘴排出;压力传感器，用于检测在泵和处理液体排放喷嘴之间的预定位置处的处理液体的压力;以及控制器，用于控制基于由压力传感器检测到的压力值的泵的内部压力以及预处理液体的压力和排出速率之间获得的关系，使得处理液体以规定的排出速率排出。

2. 发明授权

US4858004A Coder/decoder for time compressed integration system 失效
标题翻译：时间压缩集成系统的编码器/解码器
公开(公告)号：US4858004A
公开(公告)日：1989-08-15
申请号：US146188
申请日：1988-01-20
申请人： Kazukuni Kitagaki , Takeshi Ohto
发明人： Kazukuni Kitagaki , Takeshi Ohto
IPC分类号： H04N11/04 , H04N11/08 , H04N11/10 , H04N11/24
CPC分类号： H04N11/10
摘要： A coder/decoder for a time compressed integration system includes a coder for performing time compressed ingtegration of compressed wide- and narrow-width chrominance signals and a luminance signal having passed through a first phase compensation delay circuit and outputting a time compressed integration (TCI) signal, and a decoder for decoding the luminance signal and the chrominance signals from the TCI signal. The coder and the decoder are substantially arranged on a single LSI chip. The coder/decoder includes a first and a second memory section. In a coder mode, the first memory section serves as the first phase compensation delay circuit and part of the second memory section serves as the tapped delay devices in the vertical filters. In a decoder mode, the first memory section and one part of the second memory section serve as a second phase compensation delay circuit, and the other part of the second memory section serves as a tapped delay device in an interpolation filter.
摘要翻译：用于时间压缩积分系统的编码器/解码器包括：编码器，用于对压缩的宽和窄宽度色度信号执行时间压缩的整合，以及通过第一相位补偿延迟电路并输出时间压缩积分（TCI）的亮度信号，信号和解码器，用于对来自TCI信号的亮度信号和色度信号进行解码。编码器和解码器基本上布置在单个LSI芯片上。编码器/解码器包括第一和第二存储器部分。在编码器模式中，第一存储器部分用作第一相位补偿延迟电路，并且第二存储器部分的一部分用作垂直滤波器中的抽头延迟器件。在解码器模式中，第一存储器部分和第二存储器部分的一部分用作第二相位补偿延迟电路，并且第二存储器部分的另一部分用作内插滤波器中的抽头延迟器件。

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