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1. 发明授权

US07252010B2 Pressure sensor system with semiconductor chip and antenna member 有权
标题翻译：带有半导体芯片和天线元件的压力传感器系统
公开(公告)号：US07252010B2
公开(公告)日：2007-08-07
申请号：US11239018
申请日：2005-09-30
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01L9/00
CPC分类号： G01L9/0055
摘要： In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.
摘要翻译：为了实现传递精确的压力值的紧凑型无线压力传感器系统，本发明提供一种至少由硅芯片构成的压力传感器系统，其上安装有由电磁波能量操作的电路，以及支撑天线，其中薄膜在隔膜部分附近设置有通孔。

2. 发明申请

US20060219022A1 Pressure sensor system 有权
标题翻译：压力传感器系统
公开(公告)号：US20060219022A1
公开(公告)日：2006-10-05
申请号：US11239018
申请日：2005-09-30
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01L9/00
CPC分类号： G01L9/0055
摘要： In order to realize a compact wireless pressure sensor system which transmits an accurate pressure value, the present invention provides a pressure sensor system constructed at least by a silicon chip on which a circuit operated by electromagnetic wave energy is mounted, and a film which supports an antenna, in which film a through-hole is provided in the vicinity of a diaphragm part.
摘要翻译：为了实现传递精确的压力值的紧凑型无线压力传感器系统，本发明提供一种至少由硅芯片构成的压力传感器系统，其上安装有由电磁波能量操作的电路，以及支撑天线，其中薄膜在隔膜部分附近设置有通孔。

3. 发明授权

US08056421B2 Apparatus for measuring a mechanical quantity 有权
标题翻译：用于测量机械量的装置
公开(公告)号：US08056421B2
公开(公告)日：2011-11-15
申请号：US12719977
申请日：2010-03-09
申请人： Takashi Sumigawa , Hiroyuki Ohta
发明人： Takashi Sumigawa , Hiroyuki Ohta
IPC分类号： G01B7/16
CPC分类号： G01B7/18 , G01B7/16 , G01B7/20 , G01L1/2206 , G01L1/2262 , G01L5/0047
摘要： An apparatus structure and measurement method are provided to retain high precision and high reliability of a semiconductor mechanical quantity measuring apparatus which senses a mechanical quantity and transmits measured information wirelessly. As to a silicon substrate of the semiconductor mechanical quantity measuring apparatus, for example, a ratio of a substrate thickness to a substrate length along a measurement direction is set small, and a ratio of a substrate thickness to a substrate length along a direction perpendicular to the measurement direction is set small. The apparatus upper surface is covered with a protective member. It is possible to measure a strain along a particular direction and realize mechanical quantity measurement with less error and high precision. An impact resistance and environment resistance of the apparatus itself can be improved.
摘要翻译：提供了一种装置结构和测量方法，以保持半导体机械量测量装置的高精度和高可靠性，该装置检测机械量并无线传送测量信息。对于半导体机械量测量装置的硅衬底，例如，沿着测量方向将衬底厚度与衬底长度的比率设置得较小，并且沿着垂直于半导体机械量测量装置的方向的衬底厚度与衬底长度的比率测量方向设定得很小。设备上表面被保护构件覆盖。可以测量特定方向的应变，实现误差小，精度更高的机械量测量。可以提高装置本身的耐冲击性和耐环境性。

4. 发明申请

US20100192697A1 ROTATING BODY DYNAMIC QUANTITY MEASURING DEVICE AND SYSTEM 有权
标题翻译：旋转体动态数量测量装置和系统
公开(公告)号：US20100192697A1
公开(公告)日：2010-08-05
申请号：US12761970
申请日：2010-04-16
申请人： Hiroyuki OHTA , Takashi Sumigawa
发明人： Hiroyuki OHTA , Takashi Sumigawa
IPC分类号： G01L1/22
CPC分类号： G01L3/108 , G01L1/18 , G01L1/2293 , G01L3/10
摘要： A single crystal semiconductor including a Wheatstone bridge circuit formed of an impurity diffusion layer whose longitudinal direction is aligned with a particular crystal orientation is connected to a rotating body. A rotating body dynamic quantity measuring device and a system using the measuring device are fatigue- and corrosion-resistant because of the single crystal semiconductor used and are not easily affected by temperature variations because of the bridge circuit considering a single crystal anisotropy.
摘要翻译：包括由纵向与特定晶体取向对准的杂质扩散层形成的惠斯通电桥电路的单晶半导体连接到旋转体。旋转体动量测量装置和使用该测量装置的系统由于使用单晶半导体而具有耐疲劳和耐腐蚀性，并且由于考虑到单晶各向异性的桥式电路，不容易受到温度变化的影响。

5. 发明授权

US07484422B2 Mechanical-quantity measuring device 有权
标题翻译：机械量测量装置
公开(公告)号：US07484422B2
公开(公告)日：2009-02-03
申请号：US11350109
申请日：2006-02-09
申请人： Takashi Sumigawa , Hiroyuki Ohta
发明人： Takashi Sumigawa , Hiroyuki Ohta
IPC分类号： G01B7/16
CPC分类号： G01B7/18 , G01L1/18
摘要： A mechanical-quantity measuring device capable of measuring a strain component of structure deformation for an object to be measured in a particular desired direction with long life, high reliability and high precision. A strain sensor is formed on a semiconductor substrate. Impurity-diffused layers considering the crystal orientation of the semiconductor single crystalline substrate are used to form a Wheatstone bridge circuit on the substrate. The Wheatstone bridge circuit can operate on one substrate since the semiconductor single crystal has the anisotropy of piezoresistance effect.
摘要翻译：一种机械量测量装置，其能够以长寿命，高可靠性和高精度在特定的期望方向上测量待测量物体的结构变形的应变分量。应变传感器形成在半导体衬底上。考虑到半导体单晶衬底的晶体取向的杂质扩散层用于在衬底上形成惠斯通电桥电路。惠斯登电桥电路可以在一个衬底上工作，因为半导体单晶具有压阻效应的各向异性。

6. 发明授权

US07430921B2 Apparatus for measuring a mechanical quantity 有权
标题翻译：用于测量机械量的装置
公开(公告)号：US07430921B2
公开(公告)日：2008-10-07
申请号：US11797417
申请日：2007-05-03
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01B7/16
CPC分类号： G01L1/18
摘要： A mechanical quantity measuring apparatus is provided which can make highly precise measurements and is not easily affected by noise even when it is supplied an electricity through electromagnetic induction or microwaves. At least a strain sensor and an amplifier, an analog/digital converter, a rectification/detection/modulation-demodulation circuit, and a communication control circuit are formed in one and the same silicon substrate. Or, the silicon substrate is also formed at its surface with a dummy resistor which has its longitudinal direction set in a particular crystal orientation and which, together with the strain sensor, forms a Wheatstone bridge. With this arrangement, even when a current flowing through the sensor is reduced, measured data is prevented from being buried in noise, allowing the sensor to operate on a small power and to measure a mechanical quantity with high precision even when it is supplied electricity through electromagnetic induction or microwaves.
摘要翻译：提供了能够进行高精度测量并且即使当通过电磁感应或微波供应电而不易受噪声影响的机械量测量装置。至少一个应变传感器和放大器，模拟/数字转换器，整流/检测/调制解调电路和通信控制电路形成在同一个硅衬底中。或者，硅衬底也在其表面上形成一个虚拟电阻器，该虚拟电阻器的纵向方向设置在特定的晶体取向中，并与应变传感器一起形成惠斯通电桥。通过这种布置，即使当流过传感器的电流减小时，也可以防止测量数据被埋入噪声中，使得传感器能够以小功率工作，并且即使在通过电力供应通过时也以高精度测量机械量电磁感应或微波。

7. 发明授权

US07721610B2 Rotating body dynamic quantity measuring device and system 有权
标题翻译：旋转体动力测量装置及系统
公开(公告)号：US07721610B2
公开(公告)日：2010-05-25
申请号：US12245291
申请日：2008-10-03
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01L1/22
CPC分类号： G01L3/108 , G01L1/18 , G01L1/2293 , G01L3/10
摘要： A single crystal semiconductor including a Wheatstone bridge circuit formed of an impurity diffusion layer whose longitudinal direction is aligned with a particular crystal orientation is connected to a rotating body. A rotating body dynamic quantity measuring device and a system using the measuring device are fatigue- and corrosion-resistant because of the single crystal semiconductor used and are not easily affected by temperature variations because of the bridge circuit considering a single crystal anisotropy.
摘要翻译：包括由纵向与特定晶体取向对准的杂质扩散层形成的惠斯通电桥电路的单晶半导体连接到旋转体。旋转体动量测量装置和使用该测量装置的系统由于使用单晶半导体而具有耐疲劳和耐腐蚀性，并且由于考虑到单晶各向异性的桥式电路，不容易受到温度变化的影响。

8. 发明申请

US20080289432A1 APPARATUS FOR MEASURING A MECHANICAL QUANTITY 有权
标题翻译：用于测量机械数量的装置
公开(公告)号：US20080289432A1
公开(公告)日：2008-11-27
申请号：US12184104
申请日：2008-07-31
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01B7/16
CPC分类号： G01L1/18
摘要： A mechanical quantity measuring apparatus is provided which can make highly precise measurements and is not easily affected by noise even when it is supplied an electricity through electromagnetic induction or microwaves. At least a strain sensor and an amplifier, an analog/digital converter, a rectification/detection/modulation-demodulation circuit, and a communication control circuit are formed in one and the same silicon substrate. Or, the silicon substrate is also formed at its surface with a dummy resistor which has its longitudinal direction set in a particular crystal orientation and which, together with the strain sensor, forms a Wheatstone bridge. With this arrangement, even when a current flowing through the sensor is reduced, measured data is prevented from being buried in noise, allowing the sensor to operate on a small power and to measure a mechanical quantity with high precision even when it is supplied electricity through electromagnetic induction or microwaves.
摘要翻译：提供了能够进行高精度测量并且即使当通过电磁感应或微波供应电而不易受噪声影响的机械量测量装置。至少一个应变传感器和放大器，模拟/数字转换器，整流/检测/调制解调电路和通信控制电路形成在同一个硅衬底中。或者，硅衬底也在其表面上形成一个虚拟电阻器，该虚拟电阻器的纵向方向设置在特定的晶体取向中，并与应变传感器一起形成惠斯通电桥。通过这种布置，即使当流过传感器的电流减小时，也可以防止测量数据被埋入噪声中，使得传感器能够以小功率工作，并且即使在通过电力供应通过时也以高精度测量机械量电磁感应或微波。

9. 发明申请

US20060216848A1 Mechanical quantity measuring apparatus 有权
公开(公告)号：US20060216848A1
公开(公告)日：2006-09-28
申请号：US11349913
申请日：2006-02-09
申请人： Hisashi Tanie , Takashi Sumigawa , Hiroyuki Ohta
发明人： Hisashi Tanie , Takashi Sumigawa , Hiroyuki Ohta
IPC分类号： H01L21/00
CPC分类号： G01B7/18 , G01L1/2293
摘要： A semiconductor mechanical quantity measuring apparatus in which the reverse surface of a strain-detecting semiconductor element is bonded to an object of measurement, and a member having a small elastic modulus is interposed between the wiring board for supporting the strain-detecting semiconductor element and the strain-detecting semiconductor element. It then becomes possible to reduce an undesirable effect that the rigidity and thermal deformation of the wiring board have on the strain-detecting semiconductor element, while supporting the strain-detecting semiconductor element.

10. 发明申请

US20060179958A1 Rotating body dynamic quantity measuring device and system 审中-公开
标题翻译：旋转体动力测量装置及系统
公开(公告)号：US20060179958A1
公开(公告)日：2006-08-17
申请号：US11352210
申请日：2006-02-13
申请人： Hiroyuki Ohta , Takashi Sumigawa
发明人： Hiroyuki Ohta , Takashi Sumigawa
IPC分类号： G01L1/22
CPC分类号： G01L3/108 , G01L1/18 , G01L1/2293 , G01L3/10
摘要： A single crystal semiconductor including a Wheatstone bridge circuit formed of an impurity diffusion layer whose longitudinal direction is aligned with a particular crystal orientation is connected to a rotating body. A rotating body dynamic quantity measuring device and a system using the measuring device are fatigue- and corrosion-resistant because of the single crystal semiconductor used and are not easily affected by temperature variations because of the bridge circuit considering a single crystal anisotropy.
摘要翻译：包括由纵向与特定晶体取向对准的杂质扩散层形成的惠斯通电桥电路的单晶半导体连接到旋转体。旋转体动量测量装置和使用该测量装置的系统由于使用单晶半导体而具有耐疲劳和耐腐蚀性，并且由于考虑到单晶各向异性的桥式电路，不容易受到温度变化的影响。

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