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1. 发明授权

US07856155B2 Light modulator and its fabrication method 有权
标题翻译：光调制器及其制造方法
公开(公告)号：US07856155B2
公开(公告)日：2010-12-21
申请号：US11992866
申请日：2006-09-27
申请人： Takashi Shinriki , Katsutoshi Kondou , Tsutomu Saitou
发明人： Takashi Shinriki , Katsutoshi Kondou , Tsutomu Saitou
IPC分类号： G02F1/035 , G02B26/00
CPC分类号： G02F1/035 , G02F1/2255 , G02F2201/066 , G02F2201/127 , G02F2202/28 , G02F2203/21
摘要： It is an object of the invention to provide a light modulator using a thin plate having a thickness of 20 μm or less and capable of stably holding a conductive film suppressing troubles such as resonance phenomenon of microwaves in a substrate and pyro-electric phenomenon and to provide a method of fabricating the light modulator. The light modulator includes: a thin plate (10) formed of a material having an electro-optic effect and having a thickness of 20 μm or less; a light waveguide (11) formed on the front or rear surface of the thin plate; and modulation electrodes (13, 14) formed on the front surface of the thin plate to modulate light passing through the light waveguide. The light modulator further includes a reinforcing plate (16) bonded to the rear surface of the thin plate and a conductive film (17) continuously formed in the range from the side surface of the thin plate to the side surface of the reinforcing plate.
摘要翻译：本发明的目的是提供一种使用厚度为20μm以下的薄板的光调制器，并且能够稳定地保持抑制基板中的微波的共振现象和热电现象等的问题的导电膜，并且提供一种制造光调制器的方法。光调制器包括：由具有电光效应并且具有20μm或更小的厚度的材料形成的薄板（10）; 形成在所述薄板的前表面或后表面上的光波导（11）以及形成在薄板的前表面上的调制电极（13,14），以调制通过光波导的光。光调制器还包括粘合到薄板的后表面的加强板（16）和在从薄板的侧表面到加强板的侧表面的范围内连续形成的导电膜（17）。

2. 发明申请

US20090129718A1 Light Modulator and Its Fabrication Method 有权
标题翻译：光调制器及其制作方法
公开(公告)号：US20090129718A1
公开(公告)日：2009-05-21
申请号：US11992866
申请日：2006-09-27
申请人： Takashi Shinriki , Katsutoshi Kondou , Tsutomu Saitou
发明人： Takashi Shinriki , Katsutoshi Kondou , Tsutomu Saitou
IPC分类号： G02F1/035 , B29D11/00
CPC分类号： G02F1/035 , G02F1/2255 , G02F2201/066 , G02F2201/127 , G02F2202/28 , G02F2203/21
摘要： It is an object of the invention to provide a light modulator using a thin plate having a thickness of 20 μm or less and capable of stably holding a conductive film suppressing troubles such as resonance phenomenon of microwaves in a substrate and pyro-electric phenomenon and to provide a method of fabricating the light modulator. The light modulator includes: a thin plate (10) formed of a material having an electro-optic effect and having a thickness of 20 μm or less; a light waveguide (11) formed on the front or rear surface of the thin plate; and modulation electrodes (13, 14) formed on the front surface of the thin plate to modulate light passing through the light waveguide. The light modulator further includes a reinforcing plate (16) bonded to the rear surface of the thin plate and a conductive film (17) continuously formed in the range from the side surface of the thin plate to the side surface of the reinforcing plate.
摘要翻译：本发明的目的是提供一种使用厚度为20μm或更小的薄板的光调制器，并且能够稳定地保持抑制诸如基板中的微波共振现象和热电现象等的麻烦的导电膜，并且提供一种制造光调制器的方法。光调制器包括：由具有电光效应并具有20μm或更小的厚度的材料形成的薄板（10）; 形成在所述薄板的前表面或后表面上的光波导（11）以及形成在薄板的前表面上的调制电极（13,14），以调制通过光波导的光。光调制器还包括粘合到薄板的后表面的加强板（16）和在从薄板的侧表面到加强板的侧表面的范围内连续形成的导电膜（17）。

3. 发明授权

US07660493B2 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US07660493B2
公开(公告)日：2010-02-09
申请号：US11389809
申请日：2006-03-27
申请人： Katsutoshi Kondou , Satoshi Oikawa , Takashi Shinriki
发明人： Katsutoshi Kondou , Satoshi Oikawa , Takashi Shinriki
IPC分类号： G02F1/035 , G02F1/295 , G02B6/26 , G02B6/42
CPC分类号： G02F1/035
摘要： An optical modulator is provided. The optical modulator includes a thin plate made of an electrooptic material and having a thickness of 20 μm or less, an optical waveguide formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein, in a shape of the thin plate, a width of the thin plate at an optical input portion or optical output portion of the optical waveguide is two time or less the thickness of the thin plate.
摘要翻译：提供了一种光调制器。光调制器包括由电光材料制成的厚度为20μm或更小的薄板，形成在薄板的顶表面或底表面上的光波导和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中，在薄板的形状中，光波导的光输入部或光输出部处的薄板的宽度为薄板的厚度的2倍以下。

4. 发明申请

US20080002926A1 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US20080002926A1
公开(公告)日：2008-01-03
申请号：US11389380
申请日：2006-03-24
申请人： Katsutoshi Kondou , Masayuki Ichioka , Takashi Shinriki , Tohru Sugamata , Junichiro Ichikawa
发明人： Katsutoshi Kondou , Masayuki Ichioka , Takashi Shinriki , Tohru Sugamata , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02B2006/12145 , G02B2006/12147 , G02F2001/212
摘要： Provided is an optical modulator capable of efficiently separating radiation light and propagation light from each other or removing the radiation light in the optical modulator to suppress loss of the optical modulator and deterioration of an extinction ratio. In the optical modulator including a thin plate made of a material having an electrooptic effect and having a thickness of 20 μm or less; an optical waveguide formed in a top surface or a bottom surface of the thin plate; and a modulation electrode which is formed in the top surface of the thin plate to modulate light which propagates in the optical waveguide, the optical waveguide has an optical junction portion in which a plurality of optical waveguide portions are joined together and a shielding means for shielding a portion of radiation light radiated from the optical junction portion. The shielding means is a concave portion or a thorough-hole formed in the thin plate, a shortest distance from the waveguide to the shielding means is 5 to 10 μm, and the length of the shielding means in a direction perpendicular to the waveguide is at least 0.5 times the diameter of a fiber.
摘要翻译：本发明提供一种能够有效地将辐射光和传播光彼此分离或去除光调制器中的辐射光的光调制器，以抑制光调制器的损耗和消光比的劣化。在包括由具有电光效应并且具有20μm或更小的厚度的材料制成的薄板的光学调制器中; 形成在薄板的顶表面或底表面中的光波导; 以及调制电极，其形成在所述薄板的顶表面中以调制在所述光波导中传播的光，所述光波导具有其中多个光波导部分接合在一起的光学接合部分和用于屏蔽的屏蔽装置从光学接合部分辐射的辐射光的一部分。屏蔽装置是形成在薄板中的凹部或通孔，从波导到屏蔽装置的最短距离为5〜10um，屏蔽装置在垂直于波导的方向上的长度为至少是纤维直径的0.5倍。

5. 发明申请

US20070053625A1 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US20070053625A1
公开(公告)日：2007-03-08
申请号：US11389726
申请日：2006-03-27
申请人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
发明人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0311 , G02F1/035 , G02F1/225 , G02F2201/08
摘要： An optical modulator using a thin plate capable of improving an S/N ratio of an output light is provided. The optical modulator including a thin plate 1 having an electrooptic effect and having a thickness of 20 μm or less, an optical waveguide 4 formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein a stray light removing member 10 is disposed within the thin plate or in a vicinity of the thin plate.
摘要翻译：提供一种使用能够提高输出光的S / N比的薄板的光调制器。光调制器包括具有电光效应并且厚度为20μm或更小的薄板1，形成在薄板的顶表面或底表面上的光波导4和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中杂散光去除构件10设置在薄板内或薄板附近。

6. 发明授权

US07444039B2 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US07444039B2
公开(公告)日：2008-10-28
申请号：US11389380
申请日：2006-03-24
申请人： Katsutoshi Kondou , Masayuki Ichioka , Takashi Shinriki , Tohru Sugamata , Junichiro Ichikawa
发明人： Katsutoshi Kondou , Masayuki Ichioka , Takashi Shinriki , Tohru Sugamata , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/035 , G02B2006/12145 , G02B2006/12147 , G02F2001/212
摘要： An optical modulator capable of efficiently separating radiation light and propagation light from each other or removing the radiation light in the optical modulator to suppress loss of the optical modulator and deterioration of an extinction ratio, including a thin plate of a material having an electrooptic effect and a thickness of 20 μm or less; an optical waveguide formed in a top surface or a bottom surface of the thin plate; and a modulation electrode formed in the top surface of the thin plate to modulate light which propagates in the optical waveguide, the optical waveguide has an optical junction portion in which a plurality of optical waveguide portions are joined together and, for shielding a portion of radiation light radiated from the optical junction portion, a concave portion or through-hole in the thin plate.
摘要翻译：一种光调制器，其能够有效地将辐射光和传播光彼此分离或去除光调制器中的辐射光，以抑制光调制器的损耗和消光比的劣化，包括具有电光效应的材料的薄板和厚度20μm以下; 形成在薄板的顶表面或底表面中的光波导; 以及调制电极，形成在所述薄板的上表面，以调制在所述光波导中传播的光，所述光波导具有光接合部，所述光接合部中多个光波导部接合在一起，并且用于屏蔽所述辐射的一部分从光学接合部辐射的光，薄板中的凹部或通孔。

7. 发明申请

US20070122072A1 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US20070122072A1
公开(公告)日：2007-05-31
申请号：US11389809
申请日：2006-03-27
申请人： Katsutoshi Kondou , Satoshi Oikawa , Takashi Shinriki
发明人： Katsutoshi Kondou , Satoshi Oikawa , Takashi Shinriki
IPC分类号： G02F1/035
CPC分类号： G02F1/035
摘要： An optical modulator is provided. The optical modulator includes a thin plate made of an electrooptic material and having a thickness of 20 μm or less, an optical waveguide formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein, in a shape of the thin plate, a width of the thin plate at an optical input portion or optical output portion of the optical waveguide is two time or less the thickness of the thin plate.
摘要翻译：提供了一种光调制器。光调制器包括由电光材料制成的厚度为20μm或更小的薄板，形成在薄板的顶表面或底表面上的光波导和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中，在薄板的形状中，光波导的光输入部或光输出部处的薄板的宽度为薄板的厚度的2倍以下。

8. 发明授权

US07362924B2 Optical modulator 有权
标题翻译：光调制器
公开(公告)号：US07362924B2
公开(公告)日：2008-04-22
申请号：US11389726
申请日：2006-03-27
申请人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
发明人： Masayuki Ichioka , Katsutoshi Kondou , Yasuhiro Ishikawa , Takashi Shinriki , Satoshi Oikawa , Junichiro Ichikawa
IPC分类号： G02F1/035
CPC分类号： G02F1/0311 , G02F1/035 , G02F1/225 , G02F2201/08
摘要： An optical modulator using a thin plate capable of improving an S/N ratio of an output light is provided. The optical modulator including a thin plate 1 having an electrooptic effect and having a thickness of 20 μm or less, an optical waveguide 4 formed on a top or bottom surface of the thin plate, and a modulation electrode formed on the top surface of the thin plate to modulate light passing through the optical waveguide, wherein a stray light removing member 10 is disposed within the thin plate or in a vicinity of the thin plate.
摘要翻译：提供一种使用能够提高输出光的S / N比的薄板的光调制器。光调制器包括具有电光效应并且厚度为20μm或更小的薄板1，形成在薄板的顶表面或底表面上的光波导4和形成在薄板的顶表面上的调制电极以调制通过光波导的光，其中杂散光去除构件10设置在薄板内或薄板附近。

9. 发明授权

US09223158B2 Optical waveguide element and method of manufacturing the same 有权
标题翻译：光波导元件及其制造方法
公开(公告)号：US09223158B2
公开(公告)日：2015-12-29
申请号：US14233709
申请日：2012-07-19
申请人： Tetsuya Fujino , Masanao Kurihara , Takashi Shinriki , Toru Sugamata
发明人： Tetsuya Fujino , Masanao Kurihara , Takashi Shinriki , Toru Sugamata
IPC分类号： G02F1/035 , G02B6/12 , G02F1/01
CPC分类号： G02F1/035 , G02B2006/1204 , G02B2006/1218 , G02F1/0123 , G02F2201/07 , G02F2202/06 , G02F2202/20 , G02F2203/21
摘要： An object of the present invention is to provide a manufacturing method of an optical waveguide element whose DC drift is suppressed, and to provide a manufacturing method of an optical waveguide element, capable of adjusting DC drift in the middle of manufacturing processes so as to improve a fabrication yield. The method of manufacturing an optical waveguide element comprises a step of forming an optical waveguide in a substrate having an electro-optic effect, a step of forming a buffer layer, and a step of forming an electrode, in which one stage or a plurality of stages of an interface diffusion layer heat adjustment step (S1, S2) for adjusting a concentration distribution of a specific substance in the buffer layer by heating is included after the buffer layer is formed.
摘要翻译：本发明的目的是提供一种抑制了直流漂移的光波导元件的制造方法，提供能够在制造工序中间调整直流漂移的光波导元件的制造方法，从而提高制造产量。制造光波导元件的方法包括在具有电光效应的基板中形成光波导的步骤，形成缓冲层的步骤和形成电极的步骤，其中一个或多个在缓冲层形成之后，包括用于通过加热来调节缓冲层中的特定物质的浓度分布的界面扩散层热调节步骤（S1，S2）的阶段。

10. 发明申请

US20120087615A1 Optical waveguide element 审中-公开
标题翻译：光波导元件
公开(公告)号：US20120087615A1
公开(公告)日：2012-04-12
申请号：US13200766
申请日：2011-09-30
申请人： Takashi Shinriki , Masayuki Ichioka , Tetsuya Fujino
发明人： Takashi Shinriki , Masayuki Ichioka , Tetsuya Fujino
IPC分类号： G02F1/025
CPC分类号： G02F1/035 , G02F1/0311 , G02F2202/10
摘要： An object of present invention is to provide an optical waveguide element that suppresses damage to an optical waveguide element by a pyroelectric effect due to a reinforcement substrate.Provided is an optical waveguide element in which an optical waveguide substrate is bonded to a reinforcement substrate having an electro-optical effect via an adhesive layer, the optical waveguide substrate having an optical waveguide formed on a substrate having the electro-optical effect and having a thickness of 30 μm or less, wherein a semiconductor layer is provided on a surface of the adhesive layer side of the reinforcement substrate.
摘要翻译：本发明的目的是提供一种光波导元件，其通过加强基板的热电效应来抑制对光波导元件的损伤。本发明提供一种光波导元件，其中光波导基片经由粘合剂层与具有电光效应的加强基板接合，所述光波导基板具有形成在具有电光效应的基板上的光波导，并具有厚度为30μm以下，其中，在加强基板的粘合剂层侧的表面上设置有半导体层。

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