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    • 5. 发明授权
    • Semiconductor device including a conductive film having a tapered shape
    • 包括具有锥形形状的导电膜的半导体装置
    • US08017951B2
    • 2011-09-13
    • US12424807
    • 2009-04-16
    • Takashi HamadaYasuyuki Arai
    • Takashi HamadaYasuyuki Arai
    • H01L27/12
    • H01L27/124G02F1/13454H01L27/1214H01L27/127H01L29/42384
    • TFT structures optimal for driving conditions of a pixel portion and driving circuits are obtained using a small number of photo masks. First through third semiconductor films are formed on a first insulating film. First shape first, second, and third electrodes are formed on the first through third semiconductor films. The first shape first, second, third electrodes are used as masks in first doping treatment to form first concentration impurity regions of one conductivity type in the first through third semiconductor films. Second shape first, second, and third electrodes are formed from the first shape first, second, and third electrodes. A second concentration impurity region of the one conductivity type which overlaps the second shape second electrode is formed in the second semiconductor film in second doping treatment. Also formed in the second doping treatment are third concentration impurity regions of the one conductivity type which are placed in the first and second semiconductor films. Fourth and Fifth concentration impurity regions having the other conductivity type that is opposite to the one conductivity type are formed in the third semiconductor film in third doping treatment.
    • 使用少量的光掩模获得对像素部分和驱动电路的驱动条件最佳的TFT结构。 第一至第三半导体膜形成在第一绝缘膜上。 第一形状的第一,第二和第三电极形成在第一至第三半导体膜上。 在第一掺杂处理中,第一形状的第一,第二,第三电极用作掩模,以在第一至第三半导体膜中形成一种导电类型的第一浓度杂质区。 第二形状的第一,第二和第三电极由第一形状的第一,第二和第三电极形成。 在第二掺杂处理中,在第二半导体膜中形成与第二形状的第二电极重叠的一种导电类型的第二浓度杂质区。 在第二掺杂处理中也形成为放置在第一和第二半导体膜中的一种导电类型的第三浓度杂质区。 在第三掺杂处理中,在第三半导体膜中形成具有与一种导电类型相反的另一导电类型的第四和第五浓度杂质区。