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    • 9. 发明授权
    • Method of manufacture of ink jet recording head with an elastic member in the liquid chamber portion of the substrate
    • 在基板的液体室部分中制造具有弹性部件的喷墨记录头的方法
    • US06305080B1
    • 2001-10-23
    • US09215738
    • 1998-12-17
    • Hirokazu KomuroTakashi FujikawaKen TsuchiiNorio OhkumaHideto YokoiShuichi Murakami
    • Hirokazu KomuroTakashi FujikawaKen TsuchiiNorio OhkumaHideto YokoiShuichi Murakami
    • H05B306
    • B41J2/14129B41J2/1604B41J2/1626B41J2/1631B41J2/1642B41J2/1646Y10S29/016Y10T29/49083Y10T29/49401
    • A method for manufacturing an ink jet recording head, which is provided with orifices for liquid discharge use, nozzles communicated with the orifices, electrothermal converting members arranged in the nozzles to form bubbles in the liquid by providing thermal energy for it, the liquid chamber communicated with the nozzles to supply liquid to the nozzles and a substrate having the electrothermal converting members provided therefor, comprises the steps of preparing the substrate to be a silicon substrate having (100) plane or (110) plane crystal axes therefor, forming organic resin layer at least in the liquid chamber on the silicon substrate, then, removing by means of anisotropic etching a part of the liquid chamber formation portion of the substrate from the reverse side of the formation surface of the organic resin layer and forming an elastic member portion formed by the membrane of the organic resin layer in the liquid chamber. With the method of manufacture thus arranged, it is possible to provide an ink jet recording head capable of performing stable discharges for a long-term use with the incorporation of such elastic member portion in the liquid chamber to absorb the pressure vibration caused by the performance of ink discharges and to suppress the resultant vibrations of menisci at the discharge ports.
    • 一种制造喷墨记录头的方法,其具有用于排液用孔,与孔连通的喷嘴,设置在喷嘴中的电热转换构件,通过为其提供热能而在液体中形成气泡,液室连通 喷嘴向喷嘴供给液体,并且具有为此设置的电热转换部件的基板包括以下步骤:将基板准备为具有(100)平面或(110)平面晶轴的硅基板,形成有机树脂层 至少在硅衬底上的液体室中,然后从有机树脂层的形成表面的相反侧通过各向异性蚀刻去除衬底的液体室形成部分的一部分,并形成形成的弹性构件部分 通过液体室中的有机树脂层的膜。 通过如此布置的制造方法,可以提供一种喷墨记录头,其能够在液体室中结合这种弹性构件部分的同时执行稳定的放电以长期使用以吸收由该性能引起的压力振动 的墨水排出并抑制在排出口处产生的半月板的合成振动。