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    • 3. 发明授权
    • Field emission element
    • 场发射元件
    • US6133678A
    • 2000-10-17
    • US72665
    • 1998-05-05
    • Takao KishinoKazuhiko TsuburayaHisataka OchiaiTakahiro NiiyamaMasaharu Tomita
    • Takao KishinoKazuhiko TsuburayaHisataka OchiaiTakahiro NiiyamaMasaharu Tomita
    • H01J1/304H01J3/02H01J29/90H01J1/30
    • H01J29/90H01J3/022H01J2329/92
    • A field emission element in which a cathode substrate and an anode substrate are spaced from each other and are hermetically sealed. The field emission element comprises cathode electrodes and gate terminals formed on the cathode substrate; an insulating layer overlaying the cathode electrodes and the gate electrodes, the cathode electrodes and the gate terminals being partially extracted outward from the insulating layer, gate electrodes formed on the insulating layer, wherein the gate electrodes are arranged so as to cross said cathode electrodes at intersections, openings each being formed through a cathode electrode and an insulating layer at each of the intersections, a resistance layer at least formed on a part of each of the cathode electrodes, and emitter electrodes each electrically connected to a cathode electrode via the resistance layer formed within an opening. Each of the gate electrode is electrically connected to a corresponding one of the gate terminals via a through hole formed in the insulating layer.
    • 阴极基板和阳极基板彼此隔开并被气密密封的场发射元件。 场发射元件包括形成在阴极衬底上的阴极电极和栅极端子; 覆盖阴极电极和栅电极的绝缘层,阴极电极和栅极端子从绝缘层向外部分地提取,形成在绝缘层上的栅极电极,其中栅极电极布置成与阴极电极交叉 交叉点,各自通过阴极电极和每个交叉点处的绝缘层形成的开口,至少形成在每个阴极电极的一部分上的电阻层和各自经由电阻层电连接到阴极电极的发射极 形成在一个开口内。 每个栅电极经由形成在绝缘层中的通孔电连接到对应的一个栅极端子。