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    • 2. 发明授权
    • Method for processing substrate
    • 基板处理方法
    • US06221743B1
    • 2001-04-24
    • US09111377
    • 1998-07-07
    • Takao FujikawaYutaka NarukawaItaru MasuokaKohei Suzuki
    • Takao FujikawaYutaka NarukawaItaru MasuokaKohei Suzuki
    • H01L21425
    • H01L21/26533H01L21/76243
    • The present invention provides a method for processing a substrate in which crystal defects occurring according to ion implantation can be prevented from being integrated to form defects such as dislocation or large vacancies in the manufacture of a SIMOX substrate by implanting oxygen atom to a Si base by ion implantation and reacting it with Si to form a buried oxide film. The annealing after ion implantation is performed under a gas atmosphere pressurized to, for example, about 100 MPa. In the pressurized state, a structure having a smaller volume is thermodynamically more stable, and a behavior as increases crystal distortion is arrested in the annealing. Thus, crystal defects can be laid in uniformly dispersed state, vacancies can be also extinguished, and a Si base of good quality suitable for manufacture of ULSI in which defects such as dislocation are reduced can be provided.
    • 本发明提供了一种处理衬底的方法,其中可以防止根据离子注入发生的晶体缺陷被集成在SIMOX衬底的制造中,通过将氧原子注入到Si衬底中而形成诸如位错或大空位的缺陷 离子注入并与Si反应形成掩埋氧化膜。 离子注入后的退火在加压至例如约100MPa的气体气氛下进行。 在加压状态下,具有较小体积的结构在热力学上更稳定,并且在退火中阻止增加晶体变形的行为。 因此,可以以均匀分散的状态铺设晶体缺陷,空位也可以熄灭,并且可以提供适合制造其中诸如位错的缺陷减少的ULSI的良好质量的Si基底。
    • 7. 发明申请
    • Aircraft Seat
    • 飞机座椅
    • US20100155536A1
    • 2010-06-24
    • US11884490
    • 2006-02-27
    • Bungo AsamiKohei Suzuki
    • Bungo AsamiKohei Suzuki
    • B64D11/06A47C7/02A47C7/40
    • B64D11/0649A47C7/40B60N2/686B60N3/004B64D11/0638B64D11/064Y02T50/46
    • An aircraft seat which can receive the load of a sitting person with only a back plate member, using no seat back frame, thus eliminating the need for sacrificing the sitting space, which results from the existence of the seat back frame, and at the same time, allowing the weight of the seat to be reduced, is provided. The aircraft seat (1) on which an aircraft passenger is to sit comprises a seat back (10) made up of a back plate member (11) that a cushion (12) is installed onto a front face (11a) thereof for receiving the back of a sitting person, and a reinforcing member (13) which is disposed on the rear face (11b) of the back plate member (11) for reinforcing the back plate member (11), and said back plate member (11) is formed in the shape of a curved surface which enhances the surface rigidity.
    • 能够仅使用背板构件的座位人员的负载的座椅靠背框架,从而不需要牺牲由于座椅靠背框架的存在而产生的休息空间,并且在相同的位置 时间,允许减轻座椅的重量。 要乘坐飞机乘客的飞机座椅(1)包括由背板构件(11)构成的座椅靠背(10),其中垫子(12)安装在其前表面(11a)上,用于接收 以及设置在背板构件(11)的背面(11b)上用于加强背板构件(11)的加强构件(13),并且所述后板构件(11)是 形成为增强表面刚度的弯曲表面的形状。