会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 2. 发明授权
    • Stage assembly with lightweight fine stage and low transmissibility
    • 舞台装配轻巧细腻,传送率低
    • US07869000B2
    • 2011-01-11
    • US11048405
    • 2005-01-31
    • Yoichi AraiAndrew J. HazeltonMichael BinnardW. Thomas NovakDouglas C. WatsonKirk Lok
    • Yoichi AraiAndrew J. HazeltonMichael BinnardW. Thomas NovakDouglas C. WatsonKirk Lok
    • G03B27/58G03B27/42
    • G03F7/70716
    • A stage assembly (220) that moves a work piece (200) along a first axis, along a second axis and along a third axis includes a first stage (238), a first mover assembly (242) that moves the first stage (238) along the first axis, a second stage (240) that retains the work piece (200), a second mover assembly (244), and a non-contact bearing (257). The second mover assembly (244) moves the second stage (240) relative to the first stage (238) along the first axis, along the second axis, and along the third axis. The non-contact bearing (257) supports the mass of the second stage (240). Further, the non-contact bearing (257) allows the second stage (240) to move relative to the first stage (238) along the first axis and along the second axis. The second mover assembly (244) can move the second stage (240) with at least four degrees of movement.
    • 沿着第二轴线沿着第三轴线沿着第一轴线移动工件(200)的台架组件(220)包括第一阶段(238),第一移动器组件(242),其使第一阶段(238)移动 ),保持所述工件(200)的第二级(240),第二移动器组件(244)和非接触式轴承(257)。 第二移动器组件(244)沿着第一轴线沿着第二轴线和第三轴线相对于第一阶段(238)移动第二阶段(240)。 非接触轴承(257)支撑第二级(240)的质量。 此外,非接触式轴承(257)允许第二级(240)相对于第一级(238)沿着第一轴线并沿着第二轴线移动。 第二移动器组件(244)可以以至少四个移动程度移动第二平台(240)。
    • 5. 发明申请
    • Stacked six degree-of-freedom table
    • 堆叠六自由度表
    • US20060033043A1
    • 2006-02-16
    • US10918584
    • 2004-08-13
    • Yoichi Arai
    • Yoichi Arai
    • G03B9/20
    • G03F7/70716
    • A table with six degrees of freedom, such as a wafer table for a lithography system, has an upper table stacked on top of a lower table. Each of these two stacked tables has three degrees of freedom and is provided with actuators for controlling its motions in these three degrees of freedom. The vertical motion, the pitching and the rolling of the lower table may be controlled by actuators that may be voice coil motors. The upper table is supported on the flat top surface of the lower table so as to be slidable laterally, or two dimensionally. This two dimensional motion of the upper table and its yaw may be controlled by another set of actuators which may be smaller voice coil motors. A wafer holder supporting a workpiece such as a wafer for the lithography system may be secured onto the upper table by a vacuum suction mechanism.
    • 具有六个自由度的表格,例如用于光刻系统的晶片台,具有堆叠在下表顶部上的上表。 这两个堆叠的桌子中的每一个具有三个自由度,并且设置有用于在这三个自由度中控制其运动的致动器。 下台的垂直运动,俯仰和滚动可以由可能是音圈马达的致动器来控制。 上表支撑在下台的平坦顶面上,以便横向或二维滑动。 上表的这种二维运动及其偏航可以由可以是较小音圈马达的另一组致动器来控制。 支撑诸如用于光刻系统的晶片的工件的晶片保持器可以通过真空抽吸机构固定在上台上。
    • 6. 发明授权
    • Indicating instrument system
    • 指示仪器系统
    • US5353735A
    • 1994-10-11
    • US872198
    • 1992-04-22
    • Yoichi AraiYasuhiro MiyazawaMakoto TakashimaKunimitsu Aoki
    • Yoichi AraiYasuhiro MiyazawaMakoto TakashimaKunimitsu Aoki
    • G01P1/08G01D11/28
    • G01P1/08Y10S116/05
    • This invention relates to an indicating instrument for a vehicle or the like in which a pointer-indicated driving condition such as vehicle speed and rotation speed of an engine is formed by light, and to an indicating instrument system having the above indicating instruments. The structure of the indicating instrument is that a front surface having graduations is spherical such that the front surface sticks out forwardly as it is far from the rotation shaft and a light source is disposed in front of the dial and out of the graduations. Further, the indicating instrument system of the present invention indicates a cylindrical lens for converting beam from a point light source to a substantially linear beam; first and second reflecting plates for dividing the substantially linear beam into divided beam; and third and fourth reflecting plates for reflecting the divided beams each to a dial as a pointer indicating the graduations on the dial to a plurality of pointer forming portions.
    • 本发明涉及一种用于车辆等的指示仪器,其中指示器指示的驾驶条件如发动机的车速和发动机的转速由光形成,并且涉及具有上述指示仪器的指示仪表系统。 指示仪器的结构是具有刻度的前表面是球形的,使得前表面远离旋转轴向前伸出,并且光源设置在表盘的前面并且离开刻度。 此外,本发明的指示仪器系统指示用于将来自点光源的光束转换为基本上线性的光束的柱面透镜; 第一和第二反射板,用于将基本上线性的光束分成分光束; 以及第三和第四反射板,用于将分配的光束各自作为表盘,作为指示表盘上的刻度的多个指针形成部分的指针。
    • 7. 发明申请
    • Linear motor driven automatic reticle blind
    • 线性电机驱动自动掩模版盲
    • US20080285003A1
    • 2008-11-20
    • US11803595
    • 2007-05-15
    • Michael B. BinnardDouglas C. WatsonYoichi Arai
    • Michael B. BinnardDouglas C. WatsonYoichi Arai
    • G03B27/42
    • G03F7/70066
    • A reticle blind which is capable of being opened and closed at a relatively high speed and which does not cause mechanical disturbances or reaction forces. The reticle blind includes two reticle blind assemblies designed to cooperate with one another to control the passing of a laser beam of an exposure system onto a work piece, such as a semiconductor wafer or flat panel display. Each reticle blind assembly includes a linear motor having a mover and a blind configured to be positioned between a first position and a second position by the mover. Each reticle blind assembly also includes a counter mass assembly including a portion of a guide mechanism having at least one guide bar and a stator of the linear motor. The stator of the linear motor and the guide bar are integrated to form the counter mass which is configured to absorb reaction forces that are created when the blind is moved. In various embodiments, the blinds can be configured to operate in the vertical or horizontal orientation.
    • 能够以相对较高的速度打开和关闭且不引起机械干扰或反作用力的掩模版盲板。 掩模版盲包括两个掩模版盲组件,其设计成彼此配合以控制曝光系统的激光束通过诸如半导体晶片或平板显示器的工件。 每个掩模版盲组件包括具有移动器的线性电动机和被构造成由移动器定位在第一位置和第二位置之间的盲板。 每个掩模版盲组件还包括反质量组件,其包括具有至少一个引导杆和线性电动机的定子的引导机构的一部分。 线性电动机和引导杆的定子被整合以形成相对质量块,其被构造成吸收当盲人移动时产生的反作用力。 在各种实施例中,百叶窗可被配置成在垂直或水平取向上操作。
    • 10. 发明授权
    • Survivor capacity measuring apparatus for a battery
    • 蓄电池的蓄能器容量测量装置
    • US6094052A
    • 2000-07-25
    • US61905
    • 1998-04-17
    • Yoichi AraiTsutomu Saigo
    • Yoichi AraiTsutomu Saigo
    • B60L3/00G01R31/36H01M10/48H02J7/00G01N27/416
    • G01R31/36
    • A survivor capacity measuring apparatus for a battery is presented. The apparatus is constructed so as to determine whether or not the battery is deteriorated and indicates the result of this determination to a user. In the apparatus, a data read unit reads the current flowing from the battery to a load and the voltage of the battery. A survivor capacity calculation unit periodically collects the thus read current and voltage, detects the survivor capacity of the battery on the basis of the thus collected current and voltage, integrates the collected current, and determines the deterioration of the battery from a first survivor capacity of the battery before a predetermined amount has been reached and a second survivor capacity of the battery after the predetermined amount has been reached, when the integrated current has reached the predetermined amount.
    • 介绍了一种电池的幸存容量测量装置。 该装置被构造成确定电池是否劣化并且向用户指示该确定的结果。 在该装置中,数据读取单元读取从电池流向负载的电流和电池的电压。 幸存者容量计算单元周期性地收集如此读取的电流和电压,基于如此收集的电流和电压来检测电池的幸存容量,对收集的电流进行积分,并且从第一幸存容量确定电池的劣化 在达到预定量之前的电池和达到预定量之后的电池的第二剩余容量,当积分电流已经达到预定量时。