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    • 2. 发明授权
    • Polishing composition
    • 抛光组成
    • US09028574B2
    • 2015-05-12
    • US13878362
    • 2011-10-06
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • C09K3/14C09G1/02H01L21/3105
    • C09K3/1409C09G1/02C09K3/1463H01L21/31053
    • A polishing composition contains colloidal silica particles having protrusions on the surfaces thereof. The average of values respectively obtained by dividing the height of a protrusion on the surface of each particle belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles by the width of a base portion of the same protrusion is no less than 0.245. Preferably, the part of the colloidal silica particles that has larger particle diameter than the volume average particle diameter of the colloidal silica particles has an average aspect ratio of no less than 1.15. Preferably, the protrusions on the surfaces of particles belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles have an average height of no less than 3.5 nm.
    • 抛光组合物包含其表面上具有突起的胶体二氧化硅颗粒。 分别通过将属于粒径比胶体二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的一部分的粒子的表面上的突起的高度除以碱的宽度而得到的值的平均值 相同突起的部分不小于0.245。 优选地,粒径比胶体二氧化硅粒子的体积平均粒径大的胶态二氧化硅粒子的平均长径比优选为1.15以上。 优选地,粒径比胶态二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的粒子的表面上的突起的平均高度优选为3.5nm以上。
    • 5. 发明申请
    • POLISHING COMPOSITION
    • 抛光组合物
    • US20130199106A1
    • 2013-08-08
    • US13878362
    • 2011-10-06
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • Keiji AshitakaHitoshi MorinagaAkihito Yasui
    • C09K3/14
    • C09K3/1409C09G1/02C09K3/1463H01L21/31053
    • A polishing composition contains colloidal silica particles having protrusions on the surfaces thereof. The average of values respectively obtained by dividing the height of a protrusion on the surface of each particle belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles by the width of a base portion of the same protrusion is no less than 0.245. Preferably, the part of the colloidal silica particles that has larger particle diameter than the volume average particle diameter of the colloidal silica particles has an average aspect ratio of no less than 1.15. Preferably, the protrusions on the surfaces of particles belonging to the part of the colloidal silica particles that has larger particle diameters than the volume average particle diameter of the colloidal silica particles have an average height of no less than 3.5 nm.
    • 抛光组合物包含其表面上具有突起的胶体二氧化硅颗粒。 分别通过将属于粒径比胶体二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的一部分的粒子的表面上的突起的高度除以碱的宽度而得到的值的平均值 相同突起的部分不小于0.245。 优选地,粒径比胶体二氧化硅粒子的体积平均粒径大的胶态二氧化硅粒子的平均长径比优选为1.15以上。 优选地,粒径比胶态二氧化硅粒子的体积平均粒径大的胶体二氧化硅粒子的粒子的表面上的突起的平均高度优选为3.5nm以上。