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    • 4. 发明授权
    • Optical deflector and optical instrument using the same
    • 光学偏转器和光学仪器使用相同
    • US07423795B2
    • 2008-09-09
    • US11753062
    • 2007-05-24
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105G02B26/085
    • An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
    • 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。
    • 5. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    • 光学偏光仪和使用该光学仪器的光学仪器
    • US20070279720A1
    • 2007-12-06
    • US11753057
    • 2007-05-24
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105
    • An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.
    • 光学偏转器包括支撑件,具有光偏转元件的第一可移动元件,至少一个第二可移动元件,至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧,用于围绕振荡轴线的扭转振动, 至少一个第二扭转弹簧,其构造成支撑所述第二可移动元件和所述支撑构件,以围绕所述振荡轴线进行扭转振动;以及驱动系统,构造成将驱动力施加到所述第一和第二可移动元件中的至少一个, 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩,并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。
    • 6. 发明授权
    • Optical deflector and optical instrument using the same
    • 光学偏转器和光学仪器使用相同
    • US07518774B2
    • 2009-04-14
    • US12146561
    • 2008-06-26
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105G02B26/085
    • An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
    • 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。
    • 7. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL APPARATUS USING THE SAME
    • 光学偏光器和光学设备使用它
    • US20070273946A1
    • 2007-11-29
    • US11739968
    • 2007-04-25
    • Takahisa KatoYukio FurukawaYasuhiro Shimada
    • Takahisa KatoYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/0833
    • An optical deflector comprises a vibration system and a driver. The vibration system includes a first oscillatory moving element having a reflecting surface, a second oscillatory moving element, and a support. The first and second oscillatory moving elements are resiliently supported respectively by first and second torsion springs to be able to torsionally vibrate about an oscillation axis with respect to the second oscillatory moving element and to the support. The vibration system has natural oscillation modes with different frequencies about the oscillation axis. The first and/or second torsion spring has torsion leaf portions torsionally deformed about torsion axes parallel to the oscillation axis. One end of each torsion leaf portion is coupled to an end of another through a connecting portion, and the other end is coupled to one of the first and the second oscillatory moving elements and the support directly or through a connecting portion.
    • 光学偏转器包括振动系统和驱动器。 振动系统包括具有反射表面的第一振荡运动元件,第二振荡运动元件和支撑件。 第一和第二振荡运动元件分别由第一和第二扭转弹簧弹性地支撑,以能够相对于第二振荡运动元件和支撑件围绕振荡轴线扭转振动。 振动系统具有与振荡轴不同频率的自然振荡模式。 第一扭转弹簧和/或第二扭转弹簧具有扭转叶片部分,该扭转叶片部分围绕平行于振动轴线的扭转轴线扭转变形。 每个扭转叶片部分的一端通过连接部分连接到另一端部的另一端,另一端直接或通过连接部分与第一和第二振荡运动元件和支撑件中的一个连接。
    • 8. 发明授权
    • Optical deflector and optical instrument using the same
    • 光学偏转器和光学仪器使用相同
    • US07656570B2
    • 2010-02-02
    • US11753057
    • 2007-05-24
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • Kazutoshi TorashimaTakahisa KatoYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105
    • An optical deflector includes a supporting member, a first movable element having a light deflecting element, at least one second movable element, at least one first torsion spring configured to support the first and second movable elements, for torsional oscillation about an oscillation axis, at least one second torsion spring configured to support the second movable element and the supporting member, for torsional oscillation about the oscillation axis, and a driving system configured to apply a driving force to at least one of the first and second movable elements, wherein a moment of inertia of the second movable element with respect to the oscillation axis is larger than a moment of inertia of the first movable element with respect to the oscillation axis, and wherein a length of the second movable element in a direction perpendicular to the oscillation axis is equal to or less than a length of the first movable element in a direction perpendicular to the oscillation axis.
    • 光学偏转器包括支撑件,具有光偏转元件的第一可移动元件,至少一个第二可移动元件,至少一个构造成支撑第一和第二可移动元件的第一扭转弹簧,用于围绕振荡轴线的扭转振动, 至少一个第二扭转弹簧,其构造成支撑所述第二可移动元件和所述支撑构件,用于围绕所述振荡轴线的扭转振动;以及驱动系统,构造成将驱动力施加到所述第一和第二可移动元件中的至少一个, 所述第二可动元件相对于所述振动轴的惯性大于所述第一可动元件相对于所述振动轴的惯性矩,并且所述第二可动元件在垂直于所述振荡轴的方向上的长度为 等于或小于第一可移动元件在垂直于振荡轴线的方向上的长度。
    • 9. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    • 光学偏光仪和使用该光学仪器的光学仪器
    • US20070279726A1
    • 2007-12-06
    • US11753066
    • 2007-05-24
    • Takahisa KATOYukio FurukawaYasuhiro Shimada
    • Takahisa KATOYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/085G02B26/127
    • An optical deflector arranged to be relatively stably driven regardless of any environmental disturbance such as temperature, includes an oscillating system 160 having plural natural oscillation modes of different frequencies, a driving unit for driving the oscillating unit, and a drive control unit for supplying a driving signal to the driving unit, the oscillating system 160 including a first oscillator movable element 11 with a light deflecting element 22, a first torsion spring 12, a second oscillator movable element 13, a second torsion spring 12 and a supporting member 15, the optical deflector further including a distortion detecting element 25a and 25b for detecting mechanical deformation of the first and/or second torsion spring and a heat generating element 19, for stabilizing the frequencies of the natural oscillation modes and the state of scan to ensure stable sinusoidal-wave combined drive.
    • 包括具有多种不同频率的自然振荡模式的振荡系统160,用于驱动振荡单元的驱动单元和用于提供驱动的驱动控制单元的驱动控制单元 信号到驱动单元,振荡系统160包括具有光偏转元件22的第一振荡器可移动元件11,第一扭转弹簧12,第二振荡器可移动元件13,第二扭簧12和支撑构件15,光学 偏转器还包括用于检测第一和/或第二扭簧的机械变形的失真检测元件25a和25b以及用于稳定自然振荡模式的频率和扫描状态的发热元件19,以确保稳定的正弦曲线 波混合驱动。
    • 10. 发明申请
    • OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME
    • 光学偏光仪和使用该光学仪器的光学仪器
    • US20070279725A1
    • 2007-12-06
    • US11753062
    • 2007-05-24
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • Takahisa KatoKazutoshi TorashimaYukio FurukawaYasuhiro Shimada
    • G02B26/08
    • G02B26/105G02B26/085
    • An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
    • 光偏转器包括振荡系统和用于驱动振荡系统的驱动系统,所述振荡系统包括第一振荡器,第一扭转弹簧,第二振荡器,第二扭转弹簧和支撑部件,所述第一振荡器包括第一可动 具有配置成使光偏转的光偏转元件的第二振荡器包括具有构造成调节质量的质量调节构件的第二可移动元件,其中第一可移动元件由第二可移动元件通过第一扭转弹簧弹性地支撑, 围绕振荡轴的扭转振荡,其中第二可移动元件由支撑构件通过第二扭转弹簧弹性地支撑,用于围绕振荡轴线的扭转振荡,并且其中振荡系统具有至少两个具有不同频率的固有振荡模式,约为 振荡轴。