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1. 发明授权

US07544273B2 Deposition methods and stacked film formed thereby 失效
标题翻译：沉积方法和层叠膜由此形成
公开(公告)号：US07544273B2
公开(公告)日：2009-06-09
申请号：US10467337
申请日：2001-12-10
申请人： Takahiro Taneda , Koso Fujino , Kazuya Ohmatsu
发明人： Takahiro Taneda , Koso Fujino , Kazuya Ohmatsu
IPC分类号： C23C14/00
CPC分类号： C23C14/225 , C23C14/28 , C30B23/02 , C30B29/16 , C30B29/22 , C30B29/225 , H01L39/2461 , Y10T428/12493
摘要： A method of making a film having a uniform thickness and having a crystal axis parallel to a main surface of a substrate is described. In a deposition method, a film is formed by scattering a deposition material from a target (12) surface and growing the scattered deposition material on a main surface (100a) of a substrate (100). The method includes the steps of positioning the substrate (100) into a first state where the distance between one end (100f) and the target (12) is small and the distance between the other end (100e) and the target material (12) is relatively large, forming a first film (110) on the substrate (100) in the first state, positioning the substrate (100) into a second state where the distance between one end (100f) and the target (12) is large and the distance between the other end (100e) and the target (12) is small, and. forming a second film (120) on the first film (110) in the second state.
摘要翻译：描述了制造具有均匀厚度并且具有平行于基板的主表面的晶轴的膜的方法。在沉积方法中，通过从靶（12）表面散射沉积材料并将散射的沉积材料生长在基底（100）的主表面（100a）上而形成膜。该方法包括以下步骤：将基板（100）定位成第一状态，其中一端（100f）和目标（12）之间的距离小，另一端（100e）和目标材料（12）之间的距离相对较大，在第一状态下在基板（100）上形成第一膜（110），将基板（100）定位成一端（100f）和目标（12）之间的距离较大的第二状态，以及另一端（100e）与靶（12）之间的距离小，在第二状态下在第一膜（110）上形成第二膜（120）。

2. 发明授权

US09255320B2 Thin film superconducting wire and superconducting cable conductor 有权
标题翻译：薄膜超导线和超导电缆导体
公开(公告)号：US09255320B2
公开(公告)日：2016-02-09
申请号：US13133274
申请日：2009-12-03
申请人： Takahiro Taneda , Tatsuoki Nagaishi
发明人： Takahiro Taneda , Tatsuoki Nagaishi
IPC分类号： H01B12/00 , C23C14/08 , C23C14/02 , C23C14/58 , C23C28/02 , C25D5/34 , C23C28/00 , H01L39/14 , C25D7/06 , H01B12/06
CPC分类号： C23C14/087 , C23C14/024 , C23C14/584 , C23C28/023 , C23C28/322 , C23C28/3455 , C25D5/34 , C25D7/0607 , H01B12/06 , H01L39/143 , Y02E40/642 , Y10T428/2933
摘要： A thin film superconducting wire with a copper plating thin film produced on a surface of a laminated structure is inferior in bending properties to a thin film superconducting wire having no copper plating thin film. Therefore, a thin film superconducting wire according to the present invention is a thin film superconducting wire including a laminated structure having a substrate, a buffer layer located on one of main surfaces of the substrate, and a superconducting layer located on a main surface of the buffer layer opposite to a main surface facing the substrate. The thin film superconducting wire further includes a copper plating thin film covering an outer periphery of the laminated structure, a residual stress within the copper plating thin film serving as a compression stress. The laminated structure may have a sputtered silver layer. A silver covering layer covering the outer periphery of the laminated structure may be further provided between the copper plating thin film and the laminated structure.
摘要翻译：在层叠结构体的表面上形成有镀铜薄膜的薄膜超导线，对于不具有镀铜薄膜的薄膜超导线，弯曲性差。因此，根据本发明的薄膜超导线是包括层叠结构的薄膜超导线，该层叠结构具有衬底，位于衬底的主表面之一的缓冲层和位于衬底的主表面上的超导层缓冲层与面向衬底的主表面相对。薄膜超导线还包括覆盖层叠结构的外周的镀铜薄膜，作为压电应力的镀铜薄膜内的残留应力。层压结构可以具有溅射的银层。覆盖层叠结构的外周的银覆盖层可以进一步设置在镀铜薄膜和层叠结构之间。

3. 发明申请

US20140038829A1 SUPERCONDUCTING THIN FILM MATERIAL AND METHOD OF MANUFACTURING SAME 有权
标题翻译：超薄膜材料及其制造方法
公开(公告)号：US20140038829A1
公开(公告)日：2014-02-06
申请号：US14112086
申请日：2012-05-09
申请人： Kei Hanafusa , Genki Honda , Kotaro Ohki , Tsuyoshi Nakanishi , Takahiro Taneda , Tatsuoki Nagaishi
发明人： Kei Hanafusa , Genki Honda , Kotaro Ohki , Tsuyoshi Nakanishi , Takahiro Taneda , Tatsuoki Nagaishi
IPC分类号： H01B12/02
CPC分类号： H01B12/02 , H01L39/143 , H01L39/2422 , H01L39/2425 , H01L39/2448 , Y10T428/265
摘要： A superconducting thin film material exhibiting excellent superconducting properties and a method of manufacturing the same are provided. A superconducting thin film material includes a substrate, and a superconducting film formed on the substrate. The superconducting film includes an MOD layer formed by an MOD process, and a gas-phase-formed layer formed on the MOD layer by a gas-phase process. Since the MOD layer is formed first and then the gas-phase-formed layer is formed in this manner, degradation of the properties of the gas-phase-formed layer due to heat treatment in the step of forming the MOD layer (heat treatment in the MOD process) can be prevented.
摘要翻译：提供了具有优异的超导特性的超导薄膜材料及其制造方法。超导薄膜材料包括衬底和形成在衬底上的超导膜。超导膜包括通过MOD工艺形成的MOD层和通过气相法在MOD层上形成的气相形成层。由于首先形成MOD层，于是以这种方式形成气相形成层，所以在形成MOD层的步骤中由于热处理而导致气相形成层的性能降低（热处理可以防止MOD过程）。

4. 发明授权

US09082530B2 Superconducting thin film material and method of manufacturing same 有权
标题翻译：超导薄膜材料及其制造方法
公开(公告)号：US09082530B2
公开(公告)日：2015-07-14
申请号：US14112086
申请日：2012-05-09
申请人： Kei Hanafusa , Genki Honda , Kotaro Ohki , Tsuyoshi Nakanishi , Takahiro Taneda , Tatsuoki Nagaishi
发明人： Kei Hanafusa , Genki Honda , Kotaro Ohki , Tsuyoshi Nakanishi , Takahiro Taneda , Tatsuoki Nagaishi
IPC分类号： H01L39/24 , H01B12/02 , H01L39/14
CPC分类号： H01B12/02 , H01L39/143 , H01L39/2422 , H01L39/2425 , H01L39/2448 , Y10T428/265
摘要： A superconducting thin film material exhibiting excellent superconducting properties and a method of manufacturing the same are provided. A superconducting thin film material includes a substrate, and a superconducting film formed on the substrate. The superconducting film includes an MOD layer formed by an MOD process, and a gas-phase-formed layer formed on the MOD layer by a gas-phase process. Since the MOD layer is formed first and then the gas-phase-formed layer is formed in this manner, degradation of the properties of the gas-phase-formed layer due to heat treatment in the step of forming the MOD layer (heat treatment in the MOD process) can be prevented.
摘要翻译：提供了具有优异的超导特性的超导薄膜材料及其制造方法。超导薄膜材料包括衬底和形成在衬底上的超导膜。超导膜包括通过MOD工艺形成的MOD层和通过气相法在MOD层上形成的气相形成层。由于首先形成MOD层，于是以这种方式形成气相形成层，所以在形成MOD层的步骤中由于热处理而导致气相形成层的性能降低（热处理可以防止MOD过程）。

5. 发明申请

US20110244234A1 THIN FILM SUPERCONDUCTING WIRE AND SUPERCONDUCTING CABLE CONDUCTOR 有权
标题翻译：薄膜超导电线和超导电缆导体
公开(公告)号：US20110244234A1
公开(公告)日：2011-10-06
申请号：US13133274
申请日：2009-12-03
申请人： Takahiro Taneda , Tatsuoki Nagaishi
发明人： Takahiro Taneda , Tatsuoki Nagaishi
IPC分类号： B32B15/02
CPC分类号： C23C14/087 , C23C14/024 , C23C14/584 , C23C28/023 , C23C28/322 , C23C28/3455 , C25D5/34 , C25D7/0607 , H01B12/06 , H01L39/143 , Y02E40/642 , Y10T428/2933
摘要： A thin film superconducting wire with a copper plating thin film produced on a surface of a laminated structure is inferior in bending properties to a thin film superconducting wire having no copper plating thin film. Therefore, a thin film superconducting wire according to the present invention is a thin film superconducting wire including a laminated structure having a substrate, a buffer layer located on one of main surfaces of the substrate, and a superconducting layer located on a main surface of the buffer layer opposite to a main surface facing the substrate. The thin film superconducting wire further includes a copper plating thin film covering an outer periphery of the laminated structure, a residual stress within the copper plating thin film serving as a compression stress. The laminated structure may have a sputtered silver layer. A silver covering layer covering the outer periphery of the laminated structure may be further provided between the copper plating thin film and the laminated structure.
摘要翻译：在层叠结构体的表面上形成有镀铜薄膜的薄膜超导线，对于不具有镀铜薄膜的薄膜超导线，弯曲性差。因此，根据本发明的薄膜超导线是一种薄膜超导线，其包括层叠结构，其具有基板，位于基板的主表面中的一个上的缓冲层和位于基板的主表面上的超导层缓冲层与面向衬底的主表面相对。薄膜超导线还包括覆盖层叠结构的外周的镀铜薄膜，作为压电应力的镀铜薄膜内的残留应力。层压结构可以具有溅射的银层。覆盖层叠结构的外周的银覆盖层可以进一步设置在镀铜薄膜和层叠结构之间。

6. 发明申请

US20110166026A1 METHOD OF FABRICATIING OXIDE SUPERCONDUCTING THIN FILM 审中-公开
标题翻译：氧化物超导薄膜的制备方法
公开(公告)号：US20110166026A1
公开(公告)日：2011-07-07
申请号：US13059598
申请日：2009-02-18
申请人： Genki Honda , Takahiro Taneda , Takeshi Kato
发明人： Genki Honda , Takahiro Taneda , Takeshi Kato
IPC分类号： H01L39/24 , B05D3/02 , B05D5/12
CPC分类号： H01L39/2425 , H01L39/2451
摘要： The present invention is a method of fabricating an oxide superconducting thin film for use in fabrication of a superconducting wire by a coating-pyrolysis process using a fluorine-free metal organic compound as a raw material. An intermediate heat treatment of decomposing a carbonate contained in a thin film to be subjected to a sintering heat treatment for a crystallizing heat treatment is conducted before the sintering heat treatment. The intermediate heat treatment is conducted in an atmosphere having a carbon dioxide concentration lower than or equal to 10 ppm. The metal organic compound is a metal organic compound containing a β-diketone complex.
摘要翻译：本发明是通过使用无氟金属有机化合物作为原料的涂布热解法制造用于制造超导线材的氧化物超导薄膜的方法。在烧结热处理之前进行分解包含在要进行结晶热处理的烧结热处理的薄膜中的碳酸酯的中间热处理。中间热处理在二氧化碳浓度低于或等于10ppm的气氛中进行。金属有机化合物是含有＆ - 二酮配合物的金属有机化合物。

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