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1. 发明申请

US20100186427A1 Exhaust system 审中-公开
标题翻译：排气系统
公开(公告)号：US20100186427A1
公开(公告)日：2010-07-29
申请号：US12709813
申请日：2010-02-22
申请人： Takahiro Okada , Tokumitsu Arai , Kazutoshi Aoki
发明人： Takahiro Okada , Tokumitsu Arai , Kazutoshi Aoki
IPC分类号： B01D8/00 , F25B49/02
CPC分类号： F04B49/065 , F04B37/08 , F04D19/046 , F04D27/0261 , F25B9/14 , F25B2400/075
摘要： An exhaust system includes an entrapment vacuum pump equipped with a refrigerator, a master compressor which is driven in a driving frequency band to make constant a pressure difference between gas recovered from the refrigerator via a low-pressure gas recovery pipe and compressed gas supplied to the refrigerator via a high-pressure gas supply pipe, and a first sub-compressor which is driven at a predetermined driving frequency to supply compressed gas at a first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe. In addition, a second sub-compressor is driven at a predetermined driving frequency to supply compressed gas at a second gas volume larger than the first gas volume to the refrigerator via a high-pressure gas supply pipe from gas recovered from the refrigerator via a low-pressure gas recovery pipe, and a controller monitors a driving frequency of the master compressor and controls driving or a stop of the first sub-compressor and driving or a stop of the second sub-compressor, based on the driving frequency.
摘要翻译：排气系统包括具有冰箱的收纳真空泵，主动压缩机，该主压缩机在驱动频带中被驱动，以使经由低压气体回收管从冰箱回收的气体和供给到冰箱经由高压气体供给管和第一副压缩机，该第一副压缩机以预定的驱动频率被驱动，以通过高压气体供给管从冰箱回收的气体向第一气体容积供给压缩气体通过低压气体回收管。此外，以预定的驱动频率驱动第二副压缩机，以通过高压气体供给管从第二气体容量向第一气体容积供给压缩气体，该高压气体供给管是从冰箱从低温回收的气体压力气体回收管，控制器监视主压缩机的驱动频率，并基于驱动频率控制第一副压缩机的驱动或停止，以及驱动或停止第二副压缩机。

2. 发明申请

US20100011783A1 CRYOTRAP AND VACUUM PROCESSING DEVICE WITH CRYOTRAP 审中-公开
标题翻译： CRYOTRAP和真空加工设备与CRYOTRAP
公开(公告)号：US20100011783A1
公开(公告)日：2010-01-21
申请号：US12446675
申请日：2008-05-13
申请人： Kazutoshi Aoki , Takahiro Okada , Hisayoshi Komai , Isao Mochizuki , Tokumitsu Arai
发明人： Kazutoshi Aoki , Takahiro Okada , Hisayoshi Komai , Isao Mochizuki , Tokumitsu Arai
IPC分类号： F04B37/08 , B01D8/00 , F28F27/00 , F04B37/14
CPC分类号： F04B37/08
摘要： A cryotrap which is set in a vacuum vessel, and has an exhaust panel which condenses and exhausts a gas by cooling, and a cooling stage which is connected to a refrigerator and thereby cooled, includes a cooling storage body fixed on a cooling stage while maintaining thermal contact with it, and a mechanism which thermally connects/disconnects the cooling storage body 6 and the exhaust panel. The mechanism which performs thermal connection/disconnection has a movable unit which has a good heat conductivity and can come into contact with and separate from the exhaust panel and the cooling storage body.
摘要翻译：设置在真空容器中的冷冻机，具有通过冷却而冷凝和排出气体的排气板，与冷藏库连接并冷却的冷却段，包括固定在冷却台上的冷却库，同时保持与其热接触，以及将冷却储存体6和排气板热连接/断开的机构。进行热连接/断开的机构具有导热性良好并且可以与排气板和冷却储存体接触并分离的可动单元。

3. 发明申请

US20090126374A1 CRYOPUMP APPARATUS AND OPERATION METHOD THEREFOR 审中-公开
标题翻译： CRYOPUMP装置及其操作方法
公开(公告)号：US20090126374A1
公开(公告)日：2009-05-21
申请号：US12260439
申请日：2008-10-29
申请人： Tokumitsu Arai , Kazutoshi Aoki , Isao Mochizuki
发明人： Tokumitsu Arai , Kazutoshi Aoki , Isao Mochizuki
IPC分类号： F04B37/08 , F25B49/04
CPC分类号： F04B37/08 , F04B37/14
摘要： A cryopump apparatus includes a sensor which detects at least one of the temperature and pressure in a cryopump, a controller which detects a change in at least one of the temperature and pressure in the cryopump on the basis of the detection result obtained by the sensor, thereby determining the connection state between the controller and the cryopump, and a display device which displays an abnormal point for the cryopump estimated from the determination result obtained by the controller.
摘要翻译：低温泵装置包括检测低温泵中的温度和压力中的至少一个的传感器，控制器，其基于由传感器获得的检测结果来检测低温泵中的至少一个温度和压力的变化，从而确定控制器和低温泵之间的连接状态，以及根据由控制器获得的确定结果估计出的针对低温泵的异常点的显示装置。

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