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    • 9. 发明授权
    • Semiconductor device used as electro-optical device having channel formation region containing first element, and source or drain region containing second element
    • 用作电光器件的半导体器件,其具有包含第一元件的沟道形成区域,以及包含第二元件的源极或漏极区域
    • US08058652B2
    • 2011-11-15
    • US11258116
    • 2005-10-26
    • Tatsuya Honda
    • Tatsuya Honda
    • H01L29/76
    • H01L21/02672H01L21/2026H01L27/3244H01L29/66765H01L29/78678
    • A semiconductor device having an island semiconductor film which is a channel formation region and a semiconductor film which is a source or drain region being in contact with a side face of the island semiconductor film, and a method for manufacturing the semiconductor device are disclosed. The manufacturing costs can be suppressed by forming the island semiconductor film which is to be a channel formation region and the semiconductor film which is to be a source or drain region without using a doping apparatus. The source or drain region is in contact with the side surface of the island semiconductor film which is the channel formation region, a depletion layer is broaden not only in a film thickness direction but also in the crosswise direction and an electric field due to drain voltage is relieved. Therefore, a semiconductor device with high reliability can be manufactured.
    • 公开了具有作为沟道形成区域的岛状半导体膜和作为与岛状半导体膜的侧面接触的源极或漏极区域的半导体膜的半导体器件及其制造方法。 可以通过在不使用掺杂装置的情况下形成作为沟道形成区域的岛状半导体膜和作为源极或漏极区域的半导体膜来抑制制造成本。 源极或漏极区域与作为沟道形成区域的岛状半导体膜的侧面接触,耗尽层不仅在膜厚度方向上而且在横向方向上扩大,而且由于漏极电压导致的电场 放心了 因此,可以制造具有高可靠性的半导体器件。