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    • 7. 发明授权
    • MOS field effect transistor device with buried channel
    • MOS场效应晶体管器件具有埋入通道
    • US4916500A
    • 1990-04-10
    • US78987
    • 1987-07-29
    • Yoshiaki YazawaAtsuo WatanabeAtsushi HiraishiMasataka MinamiTakahiro Nagano
    • Yoshiaki YazawaAtsuo WatanabeAtsushi HiraishiMasataka MinamiTakahiro Nagano
    • H01L29/10H01L29/78H01L29/786H01L29/808
    • H01L29/78696H01L29/105H01L29/78H01L29/7838H01L29/808
    • The present invention relates to a semiconductor device comprising a semiconductor substrate of a first conductivity type or an insulator, a source comprising an impurity layer of a second conductivity type disposed on said semiconductor substrate or said insulator, a drain comprising an impurity layer of the second conductivity type disposed on said semiconductor substrate or said insulator, an impurity layer of the first conductivity type formed between said source and said drain, a gate formed on said impurity layer of the first conductivity type via an insulation film, and an impurity layer of the second conductivity type having an impurity concentration lower than that of said source and said drain, said impurity layer of the second conductivity type being disposed between said source, said drain and said impurity layer of the first conductivity type, and said semiconductor substrate of the first conductivity type or said insulator.
    • 本发明涉及一种包括第一导电类型或绝缘体的半导体衬底的半导体器件,包括设置在所述半导体衬底或所述绝缘体上的第二导电类型的杂质层的源极,包括第二导电类型或绝缘体的杂质层的漏极 设置在所述半导体衬底或所述绝缘体上的导电类型,形成在所述源极和所述漏极之间的第一导电类型的杂质层,经由绝缘膜形成在所述第一导电类型的所述杂质层上的栅极和 第二导电类型的杂质浓度低于所述源极和漏极的第二导电类型,所述第二导电类型的所述杂质层设置在所述源极,所述漏极和所述第一导电类型的所述杂质层之间,所述第一导电类型的所述半导体衬底 导电类型或所述绝缘体。