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    • 6. 发明申请
    • Substrate processing apparatus
    • 基板加工装置
    • US20050279281A1
    • 2005-12-22
    • US11152210
    • 2005-06-15
    • Masami YamashitaSeiji Nakashima
    • Masami YamashitaSeiji Nakashima
    • C23C16/00C23F1/00H01L21/00
    • H01L21/67178H01L21/67126H01L21/67184
    • An object of the present invention is to improve the operation efficiency of a substrate processing apparatus while ensuring the safety of an operator who performs maintenance of the apparatus. The present invention is a substrate processing apparatus including a substrate unit capable of housing a substrate and a substrate carrier unit for carrying the substrate to the substrate unit, in a casing, including: an outer wall panel detachably attached to the casing at a position opposed to the substrate unit; a shut-off mechanism capable of shutting a first space within which the substrate unit is located off from a second space other than the first space within which the substrate carrier unit is located, in the casing, the first space being opened to the outside of the casing by detaching the outer wall panel; a shut-off mechanism operating member for operating the shut-off mechanism to shut the first space off from the second space; and an interlock mechanism for stopping motion of the whole in the casing when the outer wall panel is detached. The apparatus has an interlock disabling mechanism for disabling the interlock mechanism when the shut-off mechanism shuts the first space off from the second space.
    • 本发明的目的是提高基板处理装置的操作效率,同时确保执行装置的维护的操作者的安全性。 本发明是一种基板处理装置,其包括能够容纳基板的基板单元和用于将基板承载到基板单元的基板载体单元,其包括:外壁板,其在相对的位置处可拆卸地附接到壳体 到基板单元; 切断机构,其能够关闭基板单元与第一空间不同的第一空间,所述第一空间与所述基板载体单元所位于的第一空间以外的第二空间隔开,所述第一空间向所述第一空间开放, 通过拆卸外墙板的外壳; 切断机构操作构件,用于操作所述切断机构以将所述第一空间从所述第二空间关闭; 以及联锁机构,用于当外壁板拆卸时停止整体在壳体中的运动。 该装置具有用于当切断机构将第一空间从第二空间切断时禁止互锁机构的互锁禁止机构。