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1. 发明专利

JP2014165416A Ceramic heater 有权
标题翻译：陶瓷加热器
公开(公告)号：JP2014165416A
公开(公告)日：2014-09-08
申请号：JP2013036813
申请日：2013-02-27
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： KITABAYASHI TETSUO , UMEKI TOSHIYA , TSUCHIDA ATSUSHI , FUKAZAWA KENICHI , ISHIDA HIRONORI
IPC分类号： H01L21/02 , H05B3/06 , H05B3/68
摘要： PROBLEM TO BE SOLVED: To provide a ceramic heater which facilitates formation of desired temperature distribution in a wafer placed on a heater plate.SOLUTION: A ceramic heater 1 includes: a heater plate end surface 202 located at the opposite side of a surface of a heater plate 200 on which a wafer 400 is placed; a first end surface 110 of a support member 100 which is connected with the heater plate end surface 202; and at least one of a heater plate recessed part 204, which is formed at the heater plate end surface 202 side and has an annular opening outer edge and a closed bottom, and a first recessed part 130 which is formed at the first end surface 110 side and has an annular opening outer edge and a closed bottom.
摘要翻译：要解决的问题：提供一种陶瓷加热器，其有助于在放置在加热板上的晶片中形成期望的温度分布。解决方案：陶瓷加热器1包括：加热器板端面202，其位于加热板200，其上放置有晶片400; 与加热器板端面202连接的支撑部件100的第一端面110; 以及形成在加热板端面202侧并具有环形开口外缘和封闭底部的加热板凹部204中的至少一个以及形成在第一端面110的第一凹部130 并且具有环形开口外边缘和封闭的底部。

2. 发明专利

JP2014011251A Manufacturing method of electrostatic chuck 有权
标题翻译：静电切割的制造方法
公开(公告)号：JP2014011251A
公开(公告)日：2014-01-20
申请号：JP2012145527
申请日：2012-06-28
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , SATO KEISUKE , KITABAYASHI TETSUO , TSUCHIDA ATSUSHI
IPC分类号： H01L21/683 , B23Q3/15 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method of an electrostatic chuck by which particles can be reduced, which are generated when making an adsorbed body adsorbed in a semiconductor manufacturing process.SOLUTION: A manufacturing method of an electrostatic chuck formed with alumina and holding an adsorbed body in a semiconductor manufacturing process includes the steps of: holding an electrode 5 and a joining material 7 between two alumina plates 6 and 8, and performing heating treatment at 1400°C or more; and reducing the temperature at a rate of 100°C/h or less after the heating treatment. Since the temperature is reduced at the rate of 100°C/h or less, stress remaining in a grain boundary can be reduced, and particles can be reduced, which are generated when making an adsorbed body adsorbed in a semiconductor manufacturing process.
摘要翻译：要解决的问题：提供一种静电卡盘的制造方法，通过该方法可以减少在半导体制造工艺中吸附吸附体时产生的颗粒。溶液：由氧化铝形成的静电卡盘的制造方法，在半导体制造方法中的吸附体包括以下步骤：将电极5和接合材料7保持在两个氧化铝板6和8之间，并在1400℃以上进行加热处理; 并在加热处理后以100℃/ h以下的速度降温。由于温度以100℃/ h以下的速度降低，因此能够降低残留于晶界的应力，并且能够降低在半导体制造工序中使吸附体吸附时产生的粒子。

3. 发明专利

JP2013182745A Ceramics heater 有权
标题翻译：陶瓷加热器
公开(公告)号：JP2013182745A
公开(公告)日：2013-09-12
申请号：JP2012044846
申请日：2012-02-29
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： KITABAYASHI TETSUO , UMEKI TOSHIYA , TSUCHIDA ATSUSHI , TANJI SEIICHI , ISHIDA HIRONORI
IPC分类号： H05B3/10 , H05B3/00 , H05B3/74
摘要： PROBLEM TO BE SOLVED: To provide a ceramics heater in which control accuracy of a temperature distribution on a placement surface can be improved.SOLUTION: A first heating resistor Rand a second heating resistor Rwhich are buried in a substrate 10 so as not to be short-circuited with each other are disposed in such a manner that a designated zone where presence ranges of both the heating resistors are overlapped with respect to a normal direction of the substrate 10 is present. In the designated zone, distribution patterns of watt densities of the first heating resistor Rand the second heating resistor Rare different, respectively.
摘要翻译：要解决的问题：提供一种陶瓷加热器，其中可以提高放置表面上的温度分布的控制精度。解决方案：第一加热电阻器Rand将第二加热电阻器R埋入基板10中以不短彼此相通的方式设置为使得两个加热电阻器的存在范围相对于基板10的法线重叠的指定区域。在指定区域，第一个加热电阻器Rand的瓦特密度分布模式分别与第二个加热电阻器不同。

4. 发明专利

JP2010114396A Electrostatic chuck 有权
标题翻译：静电卡
公开(公告)号：JP2010114396A
公开(公告)日：2010-05-20
申请号：JP2008288257
申请日：2008-11-10
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , KITABAYASHI TETSUO , TSUCHIDA ATSUSHI
IPC分类号： H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck which can reduce leakage current flowing in an object to be attracted and reduce the flatness of the object, and generates less particle. SOLUTION: The electrostatic chuck includes: a disc-like ceramic base material whose diameter is at least 200 mm; a plurality of projections formed on one major surface of the ceramics base material; an electrode formed on the major surface between the projections; and a resin covering the electrode and formed between the projections. The flatness of a surface formed at a top part of the plurality of projections is at most 5 μm. COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种静电卡盘，其可以减少在待吸引物体中流动的泄漏电流并降低物体的平坦度，并且产生较少的颗粒。解决方案：静电卡盘包括：直径至少为200mm的盘状陶瓷基材; 形成在陶瓷基材的一个主表面上的多个突起; 形成在突起之间的主表面上的电极; 以及覆盖电极并形成在突起之间的树脂。在多个突起的顶部形成的表面的平坦度为5μm以下。版权所有（C）2010，JPO＆INPIT

5. 发明专利

JP2013012413A Ceramics heater 有权
标题翻译：陶瓷加热器
公开(公告)号：JP2013012413A
公开(公告)日：2013-01-17
申请号：JP2011144910
申请日：2011-06-29
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： KITABAYASHI TETSUO , UMEKI TOSHIYA , TSUCHIDA ATSUSHI , ISHIDA HIRONORI
IPC分类号： H05B3/06 , C23C14/50 , C23C16/46 , H01L21/02 , H01L21/3065 , H05B3/00 , H05B3/74
摘要： PROBLEM TO BE SOLVED: To provide a ceramics heater which allows for enhancement in the control precision of temperature distribution.SOLUTION: According to the inventive ceramics heater 1, the heat generated from each heat element Qk(k=1-5) can be made to pass through the bonding interface Sj(j=1-3) from a ceramics substrate 2, and then flow into the low temperature part of a ceramics support member 4. The bonding interface Sj of the ceramics substrate 2 and the ceramics support member is located discretely in a direction perpendicular to an axis line normal to the mounting surface S of the ceramics substrate 2 so as to surround the axis line.
摘要翻译：要解决的问题：提供一种允许提高温度分布的控制精度的陶瓷加热器。解决方案：根据本发明的陶瓷加热器1，可以使从每个加热元件Qk（k = 1-5）产生的热量从陶瓷基板2通过接合界面Sj（j = 1-3），然后流入陶瓷支撑构件4的低温部分。陶瓷基板2和陶瓷支撑构件的接合界面Sj离散地位于垂直于垂直于陶瓷的安装表面S的轴线的方向上基板2，以便围绕轴线。版权所有（C）2013，JPO＆INPIT

6. 发明专利

JP2012049185A Ceramic member and method for producing the same 有权
标题翻译：陶瓷构件及其制造方法
公开(公告)号：JP2012049185A
公开(公告)日：2012-03-08
申请号：JP2010187289
申请日：2010-08-24
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , TSUCHIDA ATSUSHI
IPC分类号： H01L21/683 , B23K15/00 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide a ceramic member of which the wafer installation surface does not deform even under a heat cycle, and to provide a method for producing the same.SOLUTION: A ceramic member 10 includes: a base 11 made of a ceramic sintered compact; an electrode 12 which is embedded in the base 11 and is made of tungsten, molybdenum, or an alloy consisting essentially thereof; a metal block 13 which is electrically connected to the electrode 12, is embedded in the base 11, and is made of tungsten, molybdenum, or an alloy consisting essentially thereof; and a power feeding terminal 14 which is joined to the metal block 13 by beam welding and is made of nickel, titanium, copper, or an alloy consisting essentially thereof.
摘要翻译：要解决的问题：为了提供即使在热循环下晶片安装表面也不会变形的陶瓷构件，并且提供其制造方法。解决方案：陶瓷构件10包括：由陶瓷烧结体制成的基座11; 电极12，其嵌入基座11中并由钨，钼或其基本组成的合金制成; 电连接到电极12的金属块13嵌入基座11中，并由钨，钼或其基本组成的合金制成。以及通过射束焊接而与金属块13接合并由镍，钛，铜或其主要组成的合金制成的供电端子14。版权所有（C）2012，JPO＆INPIT

7. 发明专利

JP2010056040A Ceramics member 有权
标题翻译：陶瓷会员
公开(公告)号：JP2010056040A
公开(公告)日：2010-03-11
申请号：JP2008222577
申请日：2008-08-29
申请人： Nihon Ceratec Co Ltd , Taiheiyo Cement Corp , 太平洋セメント株式会社 , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , TSUCHIDA ATSUSHI , KITABAYASHI TETSUO
IPC分类号： H05B3/02
摘要： PROBLEM TO BE SOLVED: To provide a ceramics member capable of securely connecting an electrode embedded into its inside to a power terminal, and excellent in structural accuracy of the electrode.
SOLUTION: The ceramics member includes a body comprising a ceramics sintered body, the electrode embedded into the inside of the ceramics sintered body, the power terminal to supply power to the electrode, and a clumpy metal embedded into the inside of the ceramics sintered body for connecting the electrode to the power terminal. The clumpy metal is formed of an ellipsoidal shape with an exposed portion exposed in a part of it on the surface of the body, and the exposed portion is covered in overall surface by the power terminal for connection.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供一种能够将嵌入其内部的电极牢固地连接到电源端子并且电极的结构精度优异的陶瓷构件。解决方案：陶瓷构件包括：陶瓷烧结体，嵌入陶瓷烧结体内部的电极，向电极供电的电源端子和嵌入陶瓷内部的块状金属用于将电极连接到电源端子的烧结体。该块状金属由椭圆形形状，其暴露部分暴露在其一部分表面上，并且暴露部分被电源端子覆盖在整个表面上用于连接。版权所有（C）2010，JPO＆INPIT

8. 发明专利

JP2013157570A Electrostatic chuck with heater 有权
标题翻译：带加热器的静电卡盘
公开(公告)号：JP2013157570A
公开(公告)日：2013-08-15
申请号：JP2012019256
申请日：2012-01-31
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , KITABAYASHI TETSUO , UMEKI TOSHIYA , TSUCHIDA ATSUSHI
IPC分类号： H01L21/683 , B23Q3/15 , C04B35/581 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide an electrostatic chuck with a heater capable of suppressing corrosion of a base such as to connect the exposure of a buried component while securing the easiness of temperature distribution control of a mounting surface.SOLUTION: A base 10 is configured by uniting a first base part 11 and a second base part 12 made of a ceramic sintered body made chiefly of aluminum nitride into one body without a gap. The first base part 11 is configured by being integrally sintered with an electrostatic chuck electrode 21 buried. A mounting surface S on which semiconductor wafer is mounted is formed on the top surface of the base 10, that is, on the top surface of the first base part 11. The second base part 12 is configured by being integrally sintered with a heat element 22 buried. Content in the first base part 11 of an accessory component whose anticorrosion is different from that of a main component is adjusted to be less than content of an accessory component in the second base part 12.
摘要翻译：要解决的问题：提供一种静电卡盘，其具有能够抑制基体的腐蚀的加热器，从而在确保安装表面的温度分布控制的容易性的同时连接掩埋部件的暴露。解决方案：基座10被配置通过将由主要由氮化铝制成的陶瓷烧结体制成的第一基底部件11和第二基底部件12结合成一体而没有间隙。第一基部11通过与埋入的静电卡盘电极21一体烧结而构成。安装有半导体晶片的安装面S形成在基座10的上表面，即第一基部11的上表面上。第二基部12由与热元件 22埋了其防腐性与主要成分不同的附属部件的第一基部11中的含量被调节为小于第二基部12中的附件部件的含量。

9. 发明专利

JP2013069641A Ceramics heater 有权
标题翻译：陶瓷加热器
公开(公告)号：JP2013069641A
公开(公告)日：2013-04-18
申请号：JP2011209288
申请日：2011-09-26
申请人： Nihon Ceratec Co Ltd , 株式会社日本セラテック , Taiheiyo Cement Corp , 太平洋セメント株式会社
发明人： KITABAYASHI TETSUO , UMEKI TOSHIYA , TSUCHIDA ATSUSHI , ISHIDA HIRONORI
IPC分类号： H05B3/10 , H05B3/18 , H05B3/20
摘要： PROBLEM TO BE SOLVED: To provide a ceramics heater capable of ensuring such temperature distribution that the temperature changes monotonously from the central part to the periphery of a mounting surface.SOLUTION: A ceramics heater 1 comprises a ceramics substrate 2 having a mounting surface S on which a heated article W is mounted, an inside heating resistor Q1 embedded in the ceramics substrate 2, an outside heating resistor Q2 embedded in the ceramics substrate 2 on the outside of the inside heating resistor Q1, and a control section capable of controlling the power supplied to the heating resistor Q1, Q2 independently. When the distance from the center point O to the outer end of the upper surface of the ceramics substrate 2 is R, the inside heating resistor Q1 is disposed in a region of 0-0.5R around the center point O in the plan view, and the outside heating resistor Q2 is disposed in a region of 0.8R-R around the center point O in the plan view.
摘要翻译：要解决的问题：提供一种能够确保温度分布使得温度从安装表面的中心部分到周边单调变化的陶瓷加热器。解决方案：陶瓷加热器1包括陶瓷基板2，陶瓷基板2具有安装有加热物品W的安装表面S，嵌入在陶瓷基板2中的内部加热电阻器Q1，嵌入在陶瓷基板中的外部加热电阻器Q2 2，以及能够独立地控制供给到加热电阻器Q1，Q2的电力的控制部。当从中心点O到陶瓷基板2的上表面的外端的距离为R时，内侧加热电阻器Q1在平面图中围绕中心点O设置在0〜0.5R的区域内，外部加热电阻器Q2在平面图中围绕中心点O设置在0.8RR的区域中。版权所有（C）2013，JPO＆INPIT

10. 发明专利

JP2014093467A Method for manufacturing electrode built-in type ceramic sintered body 有权
标题翻译：制造电极内置陶瓷烧结体的方法
公开(公告)号：JP2014093467A
公开(公告)日：2014-05-19
申请号：JP2012244186
申请日：2012-11-06
申请人： Taiheiyo Cement Corp , 太平洋セメント株式会社 , Nihon Ceratec Co Ltd , 株式会社日本セラテック
发明人： ISHIDA HIRONORI , TSUCHIDA ATSUSHI , OKUBO TAKUMI , KANNO AKIRA
IPC分类号： H01L21/683 , H02N13/00
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an electrode built-in type ceramic sintered body, while increasing the control accuracy of the position and attitude of a built-in electrode while achieving upsizing of the ceramic sintered body.SOLUTION: A plurality of ceramic moldings 11 and 12 are prepared (first step). One ceramic molding 11 has a groove 20 that assumes a shape matched with a shape of an electrode 200, on a surface joined to the other ceramic molding 12. The plurality of ceramic moldings 11 and 12 are pressurized and burnt, and joined, after overlapping each other so that the electrode 200 can be housed in a space formed from the groove 20 (second step).
摘要翻译：要解决的问题：提供一种制造电极内置型陶瓷烧结体的方法，同时提高内置电极的位置和姿态的控制精度，同时实现陶瓷烧结体的大型化。解决方案：多个的陶瓷模制品11和12（第一步骤）。一个陶瓷成型体11在与其他陶瓷成形体12连接的面上具有与电极200的形状相配合的形状的槽20.多个陶瓷成形体11,12在重叠后加压燃烧，接合使得电极200能够容纳在由凹槽20形成的空间中（第二步骤）。

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