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1. 发明授权

US5820946A Method for fabricating ferroelectric thin film 失效
标题翻译：铁电薄膜的制造方法
公开(公告)号：US5820946A
公开(公告)日：1998-10-13
申请号：US646654
申请日：1996-05-08
申请人： Tae Song Kim , Joon Han Kim , Dong Heon Lee , Jeon-Kook Lee , Hyung Jin Jung
发明人： Tae Song Kim , Joon Han Kim , Dong Heon Lee , Jeon-Kook Lee , Hyung Jin Jung
IPC分类号： H01L21/20 , C23C14/02 , C23C14/08 , C23C14/34
CPC分类号： C23C14/088 , C23C14/024
摘要： A PZT ferroelectric thin film is sputter deposited on an electrode without microcracks while avoiding oxygen and Pb ion deficiencies at the electrode interface by initially forming a buffer layer containing a sufficient amount of a volatile Pb component and a sufficient amount of oxygen to easily absorb the energy of sputter particles. The PZT ferroelectric thin film can also be deposited by laser ablation.
摘要翻译： PZT铁电薄膜溅射沉积在电极上，没有微裂纹，同时通过初始形成含有足够量的挥发性Pb成分和足够量的氧以便容易吸收能量的缓冲层，同时避免在电极界面处的氧和Pb离子缺陷的溅射颗粒。 PZT铁电薄膜也可以通过激光烧蚀沉积。

2. 发明授权

US5914507A PZT microdevice 失效
标题翻译： PZT微型设备
公开(公告)号：US5914507A
公开(公告)日：1999-06-22
申请号：US739808
申请日：1996-10-30
申请人： Dennis L. Polla , Joon Han Kim
发明人： Dennis L. Polla , Joon Han Kim
IPC分类号： H01L41/09 , H01L29/82
CPC分类号： H01L41/094 , H01L41/0973 , Y10S73/01 , Y10S73/04
摘要： A micromechanical device or microactuator based upon the piezoelectric, pyroelectric, and electrostrictive properties of ferroelectric thin film ceramic materials such as PZT. The microdevice has a device substrate and a deflectable component. The deflectable component is mounted for deflection on the device substrate and has a sensor/actuator. The sensor/actuator has first and second electrodes and a piezoelectric thin film disposed between the first and second electrodes. The thin film is preferably PZT. The sensor/actuator is disposed on a sensor/actuator substrate. The sensor/actuator substrate is formed of a material selected for being resistive to attack by hydrofluoric acid vapor. The invention also relates to a method for fabricating such micromechanical devices or microactuators.
摘要翻译：基于铁电薄膜陶瓷材料如PZT的压电，热释电和电致伸缩特性的微机械装置或微型致动器。微型装置具有装置基板和可偏转部件。可偏转部件被安装用于偏转在装置基板上并且具有传感器/致动器。传感器/致动器具有设置在第一和第二电极之间的第一和第二电极和压电薄膜。该薄膜优选为PZT。传感器/致动器设置在传感器/致动器基板上。传感器/致动器基板由选择用于耐受氢氟酸蒸气侵蚀的材料形成。本发明还涉及一种用于制造这种微机械装置或微型致动器的方法。

3. 发明申请

US20100257920A1 CONE PENETROMETERS FOR MEASURING IMPEDANCE OF GROUND 审中-公开
标题翻译：用于测量地面阻力的锥形蝶阀
公开(公告)号：US20100257920A1
公开(公告)日：2010-10-14
申请号：US12564127
申请日：2009-09-22
申请人： Jong-Sub Lee , Hyung-Koo Yoon , Rae Hyun Kim , Joon Han Kim
发明人： Jong-Sub Lee , Hyung-Koo Yoon , Rae Hyun Kim , Joon Han Kim
IPC分类号： G01N3/42
CPC分类号： E02D1/022
摘要： Provided are cone penetrometers for measuring the impedance of the ground. In an embodiment, the cone penetrometer comprises an inner electrode, an outer electrode, an insulator layer and a penetrating rod. The inner electrode includes a cone, a first contact portion to which terminal cables of an impedance meter are connected, and a metal rod. The metal rod has a diameter smaller than that of the cone. The metal rod has a front end connected to the bottom of the cone and a rear end connected to the first contact portion. The outer electrode has an inner diameter smaller than the diameter of the cone and is in the form of a hollow tube accommodating the metal rod. The insulator layer is formed between the inner electrode and the outer electrode to prevent short circuits between the two electrodes. The penetrating rod is in the form of a hollow tube accommodating the outer electrode. The use of the cone penetrometers improves the accuracy and reliability of the measured results. Further, the cone penetrometers can be miniaturized while maintaining high stiffness against buckling.
摘要翻译：提供用于测量地面阻抗的锥形透度计。在一个实施例中，锥形穿透计包括内部电极，外部电极，绝缘体层和穿透杆。内电极包括锥体，连接有阻抗计的端子电缆的第一接触部分和金属棒。金属棒的直径小于圆锥体的直径。金属棒具有连接到锥体的底部的前端和连接到第一接触部分的后端。外部电极的内径小于锥体的直径，并且是形成容纳金属棒的中空管的形式。在内部电极和外部电极之间形成绝缘体层，以防止两个电极之间的短路。穿透杆是容纳外部电极的中空管的形式。锥形穿透仪的使用提高了测量结果的准确性和可靠性。此外，锥形贯通计可以小型化，同时保持高刚度抵抗弯曲。

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