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2. 发明申请

US20060060134A1 Turnable device for spin-coating 审中-公开
标题翻译：可旋转装置用于旋涂
公开(公告)号：US20060060134A1
公开(公告)日：2006-03-23
申请号：US11226338
申请日：2005-09-15
申请人： Tae Sik Kang , Seongkeun Lee , Youngjun Hong
发明人： Tae Sik Kang , Seongkeun Lee , Youngjun Hong
IPC分类号： B05C13/02 , B05C13/00 , B05C11/02
CPC分类号： G11B7/266
摘要： Provided is a turntable device for spin-coating a substrate having a central hole formed in the central portion thereof with an external coating material. The turntable device includes: a support unit having a flat surface with at least one vacuum hole which supply vacuum force to fixedly support the substrate thereon; an elastic body at the center of the support unit to be inserted into the central hole of the substrate, and closing the central hole by being elastically deformed due to an external force; and a pressing member disposed on the elastic body and pressing the elastic body to deform the elastic body elastically. Not having an additional element for closing the central hole of the substrate during spin-coating simplifies the apparatus and the coating process, and prevents the central portion of the substrate from being contaminated after the spin-coating.
摘要翻译：提供了一种转盘装置，用于在其中心部分形成有具有外部涂层材料的中心孔旋涂基板。所述转盘装置包括：具有平坦表面的支撑单元，所述平坦表面具有至少一个真空孔，所述真空孔提供真空力以在其上固定地支撑所述基板; 所述支撑单元的中心处的弹性体被插入到所述基板的中心孔中，并且由于外力而弹性变形而闭合所述中心孔; 以及按压构件，设置在弹性体上并按压弹性体弹性体使弹性体变形。在旋涂期间没有用于封闭基板的中心孔的附加元件简化了设备和涂覆过程，并且防止了基材的中心部分在旋涂之后被污染。

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