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1. 发明专利

JP2004111818A Pattern formation method 审中-公开
公开(公告)号：JP2004111818A
公开(公告)日：2004-04-08
申请号：JP2002275339
申请日：2002-09-20
申请人： Tadaoki Mitani , Seiko Epson Corp , セイコーエプソン株式会社 , 三谷忠興
发明人： NISHIKAWA HISAO , TAKAKUWA ATSUSHI , SHIMODA TATSUYA , MITANI TADAOKI , TERANISHI TOSHIJI , OKUBO TAKASHI
IPC分类号： G03F7/40 , H01L21/027 , H01L21/288 , H01L21/3205
摘要： PROBLEM TO BE SOLVED: To provide a pattern formation method wherein degradation in dimensional accuracy of a pattern and the degrading in shape are suppressed.
SOLUTION: The pattern formation method includes a step to form a first region 18 that has such a surface characteristic that a material for forming a pattern is deposited in priority and a second region 20 that has such a surface characteristic that a material for forming a pattern is harder to be deposited than the first region 18, and a step wherein the material for forming the pattern is supplied to a substrate 10 and the pattern is selectively formed in the first region 18. The material for forming the pattern is a solution containing metallic particles and it is supplied to the substrate 10 in liquid state.
COPYRIGHT: (C)2004,JPO

2. 发明专利

JP2006024535A Manufacturing method for organic thin-film element, manufacturing method for electro-optic device, and manufacturing method for electronic apparatus 审中-公开
标题翻译：有机薄膜元件的制造方法，电光装置的制造方法及电子装置的制造方法
公开(公告)号：JP2006024535A
公开(公告)日：2006-01-26
申请号：JP2004203917
申请日：2004-07-09
申请人： Tadaoki Mitani , Seiko Epson Corp , セイコーエプソン株式会社 , 忠興三谷
发明人： TAKAKUWA ATSUSHI , SHIMODA TATSUYA , FURUSAWA MASAHIRO , MITANI TADAOKI , YAMAGUCHI NAOTO
IPC分类号： H05B33/10 , H01L21/02 , H01L21/336 , H01L27/12 , H01L29/786 , H01L51/50
CPC分类号： B82Y30/00 , B82Y10/00 , H01L27/3251 , H01L51/5206 , H01L51/5215 , H01L2251/5315
摘要： PROBLEM TO BE SOLVED: To provide a manufacturing method for an organic thin-film element which can provide an organic thin-film element having a long element life through a simple process, and to provide a manufacturing method for an electro-optic device and a manufacturing method for an electronic apparatus each utilizing the same. SOLUTION: The manufacturing method for an organic thin-film element is provided to solve the above-described problem, the organic thin-film element including an organic thin film provided between a pair of thin-film electrodes comprising at least one transparent electrode. The method includes the steps of: forming the transparent electrode by spraying a material liquid containing a material for forming the transparent electrode onto a base; and forming the organic thin film on the transparent electrode. COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种能够通过简单的工艺提供具有长元件寿命的有机薄膜元件的有机薄膜元件的制造方法，并且提供一种用于电光学的制造方法装置和电子装置的制造方法。解决方案：提供有机薄膜元件的制造方法以解决上述问题，所述有机薄膜元件包括设置在一对薄膜电极之间的有机薄膜，所述薄膜电极包括至少一个透明电极。该方法包括以下步骤：通过将含有用于形成透明电极的材料的材料液喷射到基底上来形成透明电极; 并在透明电极上形成有机薄膜。版权所有（C）2006，JPO＆NCIPI

3. 发明专利

JP2006023683A Method for manufacturing microlens, and method for manufacturing organic electroluminescent element 有权
标题翻译：制造微生物的方法和制造有机电致发光元件的方法
公开(公告)号：JP2006023683A
公开(公告)日：2006-01-26
申请号：JP2004203923
申请日：2004-07-09
申请人： Tadaoki Mitani , Seiko Epson Corp , セイコーエプソン株式会社 , 忠興三谷
发明人： TAKAKUWA ATSUSHI , SHIMODA TATSUYA , FURUSAWA MASAHIRO , MITANI TADAOKI , YAMAGUCHI NAOTO
IPC分类号： G02B3/00 , B29D11/00 , C03C17/36 , C03C17/38 , C03C17/42 , H01L51/50 , H05B33/02 , H05B33/10
CPC分类号： G02B3/0043 , B82Y30/00 , G02B3/0012 , H01L27/3244 , H01L51/5275 , Y10S264/72
摘要： PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic thin-film element, by which the organic thin film element having high light extraction efficiency can be provided in an easy way, and to provide a method for manufacturing an optoelectronic device and a method for manufacturing an electronic equipment that uses the same.
SOLUTION: The method for manufacturing the organic thin-film element configured, by interposing an organic thin film between a pair of thin-film electrodes, at least one of which is a transparent electrode, includes a step of forming the transparent electrode by spraying a stock solution containing a transparent electrode forming material on a substrate and a step of forming the organic thin film on the transparent electrode.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：要解决的问题：提供一种制造有机薄膜元件的方法，通过该方法可以以简单的方式提供具有高光提取效率的有机薄膜元件，并提供一种制造光电子器件的方法装置和使用该装置的电子设备的制造方法。解决方案：通过在一对薄膜电极之间插入有机薄膜而构成有机薄膜元件的方法，其中至少一个薄膜电极是透明电极，包括形成透明电极的步骤通过在基板上喷涂含有透明电极形成材料的原料溶液和在透明电极上形成有机薄膜的步骤。版权所有（C）2006，JPO＆NCIPI

4. 发明专利

JP2011096706A Method of manufacturing piezoelectric device 审中-公开
标题翻译：制造压电器件的方法
公开(公告)号：JP2011096706A
公开(公告)日：2011-05-12
申请号：JP2009246206
申请日：2009-10-27
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI
IPC分类号： H01L41/08 , G01P15/09 , H01L41/09 , H01L41/113 , H01L41/18 , H01L41/22 , H01L41/253 , H01L41/29 , H01L41/39 , H03H3/02
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a piezoelectric device by which the piezoelectric device few in defects and high in reliability can be manufactured. SOLUTION: The method of manufacturing the piezoelectric device 1 having a piezoelectric element 100 including a first conductive layer 20, a second conductive layer 40, and a piezoelectric layer 30 sandwiched between the first conductive layer 20 and second conductive layer 40 includes a conductive layer forming process of forming at least one of the first conductive layer 20 and second conductive layer 40, a conductive layer detecting process of detecting abnormality of a shape of the conductive layer formed in the conductive layer forming process, and a conductive layer repairing process of repairing defects when the defect is detected in the conductive layer detecting process. COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：要解决的问题：提供一种制造压电装置的方法，通过该方法可以制造出缺陷少，可靠性高的压电装置。解决方案：制造具有包括第一导电层20，第二导电层40和夹在第一导电层20和第二导电层40之间的压电层30的压电元件100的压电器件1的制造方法包括：形成第一导电层20和第二导电层40中的至少一个的导电层形成工序，检测在导电层形成工序中形成的导电层的形状异常的导电层检测工序，导电层修复工序在导电层检测过程中检测到缺陷时修复缺陷。版权所有（C）2011，JPO＆INPIT

5. 发明专利

JP2010118641A Piezoelectric element, liquid ejecting head, and liquid ejecting apparatus 审中-公开
标题翻译：压电元件，液体喷射头和液体喷射装置
公开(公告)号：JP2010118641A
公开(公告)日：2010-05-27
申请号：JP2009153195
申请日：2009-06-29
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI
IPC分类号： H01L41/09 , B41J2/045 , B41J2/055 , B41J2/135 , B41J2/14 , B41J2/145 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/23
CPC分类号： B41J2/14233 , H01L41/0533 , H01L41/0973
摘要： PROBLEM TO BE SOLVED: To provide a piezoelectric element displacement amount of which is large and in which deterioration of a piezoelectric layer is inhibited.
SOLUTION: The piezoelectric element 100 includes a substrate 10, a lower electrode 20 formed above the substrate 10, the piezoelectric layer 30 formed above the lower electrode 20, an upper electrode 40 formed above the piezoelectric layer 30, a protection layer 60 formed on the lateral sides of the piezoelectric layer 30, and a self-organized monomolecular film 70 formed on the side of each of the protection layer 60 not facing the piezoelectric layer 30.
COPYRIGHT: (C)2010,JPO&INPIT
摘要翻译：要解决的问题：提供压电元件位移量大并且压电层的劣化被抑制的问题。解决方案：压电元件100包括基板10，形成在基板10上的下电极20，形成在下电极20上的压电层30，形成在压电层30上的上电极40，保护层60 形成在压电层30的侧面上的自组织单分子膜70和形成在不面向压电层30的保护层60的一侧的自组织单分子膜70.版权所有（C）2010，JPO＆INPIT

6. 发明专利

JP2007165587A Master, manufacturing method and apparatus of fine structure, optical device, and semiconductor device 审中-公开
标题翻译：主要制造方法和精细结构的设备，光学器件和半导体器件
公开(公告)号：JP2007165587A
公开(公告)日：2007-06-28
申请号：JP2005360009
申请日：2005-12-14
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI
IPC分类号： H01L21/027 , B81C99/00 , G02B1/04
摘要： PROBLEM TO BE SOLVED: To provide a master capable of realizing a diversified, minute pattern easily and inexpensively. SOLUTION: The master has an irregular structure on a lower surface. The master comprises at least a supply path of a liquid material communicating with the inside of a recess in the master from the outside; and a discharge path of the liquid material communicating with the outside from the inside of the recess. The width of the supply path and/or discharge path decreases in a direction where the liquid material is circulated when viewed in a direction at right angle to a direction where the liquid material is circulated in the side edge direction of the master. COPYRIGHT: (C)2007,JPO&INPIT
摘要翻译：要解决的问题：提供能够容易且廉价地实现多样化，微小图案的主人。
解决方案：主机在下表面具有不规则结构。主机至少包括从外部与主机中的凹部内部连通的液体材料的供给路径; 以及从凹部的内部与外部连通的液体材料的排出路径。供给路径和/或排出路径的宽度在与液体材料在主体的侧边缘方向上循环的方向成直角的方向上观察时液体材料循环的方向减小。版权所有（C）2007，JPO＆INPIT

7. 发明专利

JP2005331564A Method for forming thin film pattern, and device 审中-公开
标题翻译：形成薄膜图案的方法和装置
公开(公告)号：JP2005331564A
公开(公告)日：2005-12-02
申请号：JP2004147535
申请日：2004-05-18
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI , AMAKO ATSUSHI
IPC分类号： G03F7/40 , C23C16/04 , G03F7/20 , H01L21/027 , H01L41/187 , H01L41/22 , H01L41/314 , H01L41/316 , H01L41/317 , H01L41/331
摘要： PROBLEM TO BE SOLVED: To provide a method for forming a thin film pattern for easily forming a fine thin film pattern in a short period of time with high definition, and to provide a device having a thin film pattern obtained by the forming method.
SOLUTION: The method for forming a thin film pattern includes steps of: forming a self-assembled monolayer on a substrate 50; exposing the self-assembled monolayer to laser light producing a predetermined interference pattern by passing the light emitted from a laser light source through a master so as to form a self-assembled monolayer pattern 52; and selectively distributing a thin film material on the self-assembled monolayer pattern 52 to form a thin film pattern 55.
COPYRIGHT: (C)2006,JPO&NCIPI
摘要翻译：解决的问题：提供一种形成薄膜图形的方法，用于在高分辨率的短时间内容易地形成精细薄膜图案，并提供一种具有通过成型获得的薄膜图案的器件方法。解决方案：用于形成薄膜图案的方法包括以下步骤：在衬底50上形成自组装单层; 将自组装单层暴露于通过将从激光源发射的光通过母体产生预定干涉图案的激光，以形成自组装单层图案52; 并且将薄膜材料选择性地分布在自组装单层图案52上以形成薄膜图案55.版权所有：（C）2006，JPO＆NCIPI

8. 发明专利

JP2004228374A Device and its manufacturing method, electro-optical device, and electronic apparatus 有权
公开(公告)号：JP2004228374A
公开(公告)日：2004-08-12
申请号：JP2003015098
申请日：2003-01-23
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI , UTSUNOMIYA SUMIO , KAMAKURA TOMOYUKI , KASUGA MASASHI , INOUE SATOSHI , SAEKI TAKAYUKI , KIMURA MUTSUMI , HASHIMOTO TAKASHI , DOBASHI FUKUMI
IPC分类号： G02F1/1368 , H01L21/02 , H01L21/30 , H01L21/336 , H01L21/77 , H01L27/12 , H01L29/786
CPC分类号： H01L27/1266 , H01L27/1214
摘要： PROBLEM TO BE SOLVED: To provide a method of manufacturing a device wherein elements such as a TFT are dispersively arranged on a final substrate, thus the device is efficiently manufactured at a low cost, and also to provide the device by the method, an electro-optical device, and an electronic apparatus. SOLUTION: In the method, a part or all of the elements on a first substrate 10 are transferred to a second substrate 14, and the device is manufactured using the part or all of the transferred elements. The method comprises a first process wherein an exfoliation layer is formed on the first substrate 10, a second process wherein a plurality of elements are formed on the exfoliation layer, a third process wherein the elements to be transferred on the first substrate 10 are bonded to the second substrate 14 via an adhesive layer, a fourth process wherein exfoliation is generated in the inside and/or at the interface of the exfoliation layer by acting a force which separates between the first substrate 10 and the second substrate 14 from one end side of these substrates to the exfoliation layer between the first substrate 10 and the second substrate 14, and a fifth process wherein the first substrate 10 finishing transfer of the elements is separated from the second substrate 14. COPYRIGHT: (C)2004,JPO&NCIPI

9. 发明专利

JP2004001550A Ink jet recording head 审中-公开
公开(公告)号：JP2004001550A
公开(公告)日：2004-01-08
申请号：JP2003207739
申请日：2003-08-18
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： NISHIKAWA HISAO , TAKAKUWA ATSUSHI
IPC分类号： B41J2/16 , B41J2/045 , B41J2/055
摘要： PROBLEM TO BE SOLVED: To provide an ink jet recording head capable of dealing with trend of high resolution.
SOLUTION: A process for manufacturing the ink jet recording head comprises (A) a step for forming a layer (11) being stripped through irradiation of a translucent base (10) with light, (B) a step for forming a common electrode film (3) on the stripping layer (11), (C) a step for forming a plurality of piezoelectric elements (4) on the common electrode film (3), (D) a step for forming a reservoir member (5) having a cover-like structure for containing one or more piezoelectric elements (4) and internally forming an ink reservoir (51), (E) a step for stripping the base (10) by irradiating the stripping layer (11) with specified light from the base (10) side, and (F) a step for pasting a pressure chamber substrate (2) provided with a plurality of pressure chambers (21) to the common electrode film (3) from which the base is stripped such that each pressure chamber (21) is enclosed. Since thin pressure chamber substrates can be produced in a process independent from a process for forming a piezoelectric element and can be pasted together finally, a head dealing with the trend of high resolution can be manufactured.
COPYRIGHT: (C)2004,JPO

10. 发明专利

JP2003075606A Optical substrate, method for manufacturing the same and optical device 审中-公开
标题翻译：光学基板，其制造方法和光学装置
公开(公告)号：JP2003075606A
公开(公告)日：2003-03-12
申请号：JP2001266096
申请日：2001-09-03
申请人： Seiko Epson Corp , セイコーエプソン株式会社
发明人： TAKAKUWA ATSUSHI , NISHIKAWA HISAO
IPC分类号： G02B5/00 , C03C17/36 , G02B3/00 , G02F1/1335
CPC分类号： B82Y30/00
摘要： PROBLEM TO BE SOLVED: To provide an optical substrate, a method for manufacturing the substrate and an optical device so as to easily obtain a film pattern.
SOLUTION: In the method for manufacturing the optical substrate, a light transmitting substrate 10 is processed in such a manner that a material to form a film 24 is preferentially deposited in a first region 16 while a material to form a film 24 is hardly deposited in a second region 18 compared to the first region 16. Then the material to form the film 24 is selectively deposited in the first region 16.
COPYRIGHT: (C)2003,JPO
摘要翻译：要解决的问题：提供一种光学基板，用于制造基板的方法和光学装置，以便容易地获得薄膜图案。解决方案：在制造光学基片的方法中，以这样的方式处理透光基片10，使得形成薄膜24的材料优先沉积在第一区域16中，而形成薄膜24的材料几乎不沉积在第二区域18与第一区域16相比较。然后，在第一区域16中选择性地沉积形成膜24的材料。

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