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1. 发明授权

US08859422B2 Method of forming copper wiring and method and system for forming copper film 有权
标题翻译：形成铜线的方法及铜膜形成方法及系统
公开(公告)号：US08859422B2
公开(公告)日：2014-10-14
申请号：US13359138
申请日：2012-01-26
申请人： Tadahiro Ishizaka , Atsushi Gomi , Takara Kato , Osamu Yokoyama , Takashi Sakuma , Chiaki Yasumuro , Hiroyuki Toshima , Tatsuo Hatano , Yasushi Mizusawa , Masamichi Hara , Kenzi Suzuki
发明人： Tadahiro Ishizaka , Atsushi Gomi , Takara Kato , Osamu Yokoyama , Takashi Sakuma , Chiaki Yasumuro , Hiroyuki Toshima , Tatsuo Hatano , Yasushi Mizusawa , Masamichi Hara , Kenzi Suzuki
IPC分类号： H01L21/44
CPC分类号： H01L21/02104 , C23C14/025 , C23C14/046 , C23C14/345 , C23C14/541 , C23C14/5806 , C23C16/16 , H01J37/32899 , H01J37/34
摘要： A method of forming a Cu wiring in a trench or hole formed in a substrate is provided. The method includes forming a barrier film on the surface of the trench or hole, forming a Ru film on the barrier film, and embedding Cu in the trench or hole by forming a Cu film on the Ru film using PVD while annealing the substrate such that migration of copper into the trench or hole occurs.
摘要翻译：提供了一种在衬底中形成的沟槽或孔中形成Cu布线的方法。该方法包括在沟槽或孔的表面上形成阻挡膜，在阻挡膜上形成Ru膜，并且通过在使衬底退火的同时在PVD膜上形成Cu膜而将Cu嵌入沟槽或孔中，使得发生铜进入沟槽或孔的迁移。

2. 发明申请

US20130203250A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD 有权
标题翻译：半导体器件制造方法
公开(公告)号：US20130203250A1
公开(公告)日：2013-08-08
申请号：US13566515
申请日：2012-08-03
申请人： Tadahiro Ishizaka , Atsushi Gomi , Kenzi Suzuki , Tatsuo Hatano , Yasushi Mizusawa
发明人： Tadahiro Ishizaka , Atsushi Gomi , Kenzi Suzuki , Tatsuo Hatano , Yasushi Mizusawa
IPC分类号： H01L21/768
CPC分类号： H01L21/76841 , C23C14/02 , C23C14/046 , C23C16/02 , C23C16/045 , H01L21/02063 , H01L21/02126 , H01L21/28556 , H01L21/3105 , H01L21/67207 , H01L21/76814 , H01L21/76826 , H01L21/76843
摘要： A semiconductor device manufacturing method includes: modifying a surface of a burying recess, of which surface is hydrophobic and which is formed in a dielectric film, to a hydrophilic state by supplying a plasma containing H ions and H radicals or a plasma containing NHx (x being 1, 2 or 3) ions and NHx radicals to the dielectric film formed on a substrate and containing silicon, carbon, hydrogen and oxygen, a bottom portion of the burying recess being exposed with a lower conductive layer; and directly forming an adhesion film formed of a Ru film on the hydrophilic surface of the recess. The method further includes burying copper forming a conductive path in the recess.
摘要翻译：半导体器件制造方法包括：通过供给含有H离子和H基团的等离子体或包含NH x（x）的等离子体，将其表面是疏水性的并且形成在电介质膜中的掩埋凹槽的表面改性为亲水状态是1,2或3）离子和NH x自由基，形成在衬底上并含有硅，碳，氢和氧的电介质膜，埋入凹部的底部用下导电层暴露; 并且在凹部的亲水性表面上直接形成由Ru膜形成的粘合膜。该方法还包括在凹槽中形成导电路径的铜。

3. 发明授权

US08999841B2 Semiconductor device manufacturing method 有权
标题翻译：半导体器件制造方法
公开(公告)号：US08999841B2
公开(公告)日：2015-04-07
申请号：US13566515
申请日：2012-08-03
申请人： Tadahiro Ishizaka , Atsushi Gomi , Kenzi Suzuki , Tatsuo Hatano , Yasushi Mizusawa
发明人： Tadahiro Ishizaka , Atsushi Gomi , Kenzi Suzuki , Tatsuo Hatano , Yasushi Mizusawa
IPC分类号： H01L21/44 , H01L21/768 , H01L21/02 , H01L21/3105 , H01L21/67 , C23C14/02 , C23C14/04 , C23C16/02 , C23C16/04 , H01L21/285
CPC分类号： H01L21/76841 , C23C14/02 , C23C14/046 , C23C16/02 , C23C16/045 , H01L21/02063 , H01L21/02126 , H01L21/28556 , H01L21/3105 , H01L21/67207 , H01L21/76814 , H01L21/76826 , H01L21/76843
摘要： A semiconductor device manufacturing method includes: modifying a surface of a burying recess, of which surface is hydrophobic and which is formed in a dielectric film, to a hydrophilic state by supplying a plasma containing H ions and H radicals or a plasma containing NHx (x being 1, 2 or 3) ions and NHx radicals to the dielectric film formed on a substrate and containing silicon, carbon, hydrogen and oxygen, a bottom portion of the burying recess being exposed with a lower conductive layer; and directly forming an adhesion film formed of a Ru film on the hydrophilic surface of the recess. The method further includes burying copper forming a conductive path in the recess.
摘要翻译：半导体器件制造方法包括：通过供给含有H离子和H基团的等离子体或包含NH x（x）的等离子体，将其表面是疏水性的并且形成在电介质膜中的掩埋凹槽的表面改性为亲水状态是1,2或3）离子和NH x自由基，形成在衬底上并含有硅，碳，氢和氧的电介质膜，埋入凹部的底部用下导电层暴露; 并且在凹部的亲水性表面上直接形成由Ru膜形成的粘合膜。该方法还包括在凹槽中形成导电路径的铜。

4. 发明授权

US5214012A Method for production of silicate interlayer cross-linked smectite 失效
标题翻译：硅酸盐夹层交联蒙脱石生产方法
公开(公告)号：US5214012A
公开(公告)日：1993-05-25
申请号：US828755
申请日：1992-01-31
申请人： Kenzi Suzuki , Masakazu Horio , Hiroyuki Masuda , Toshiaki Mori
发明人： Kenzi Suzuki , Masakazu Horio , Hiroyuki Masuda , Toshiaki Mori
IPC分类号： C01B33/26 , B01J20/12 , B01J21/16 , B01J29/04 , C01B33/38 , C01B33/40 , C01B37/00
CPC分类号： B01J29/049 , B01J20/12 , B01J21/16
摘要： An interlayer cross-linked smectite is produced by a method which includes the steps of preparing a smectite suspension containing a dissolved water-soluble macromolecular compound, adding a cationic hydroxide oligomer to the suspension thereby subjecting the exchangeable cation in the smectite to ion exchange, allowing the resultant smectite suspension to stand at a fixed temperature for a fixed time thereby allowing the cationic hydroxide oligomer of the smectite to age, separating a solid smectite from the resultant suspension, and heating the separated solid smectite. The interlayer interval of the produced smectite can be controlled by adjusting the amount of the cationic hydroxide oligomer.
摘要翻译：通过包括以下步骤制备层间交联蒙脱石的方法，所述方法包括制备含有溶解的水溶性高分子化合物的蒙皂石悬浮液，向悬浮液中加入阳离子氢氧化物低聚物，由此使蒙皂石中的可交换阳离子进行离子交换，从而允许所得蒙脱石悬浮液在固定温度下固定固定时间，从而使蒙脱石的阳离子氢氧化物低聚物老化，从所得悬浮液中分离固体蒙脱石，并加热分离的固体蒙脱石。可以通过调节阳离子氢氧化物低聚物的量来控制产生的蒙皂石的层间距。

5. 发明申请

US20050002858A1 Catalysts for oxidative steam reforming of methanol as a new and efficient method for the selective production of hydrogen for fuel cells and their synthesis method 失效
标题翻译：用于甲醇氧化蒸汽重整的催化剂作为燃料电池选择性生产氢气的新型和有效方法及其合成方法
公开(公告)号：US20050002858A1
公开(公告)日：2005-01-06
申请号：US10898318
申请日：2004-07-26
申请人： Kenzi Suzuki , Velu Subramani , Toshihiko Osaki
发明人： Kenzi Suzuki , Velu Subramani , Toshihiko Osaki
IPC分类号： B01J23/80 , B01J23/83 , B01J37/03 , B01J37/08 , C01B3/32 , B01J23/06
CPC分类号： B01J37/03 , B01J23/80 , B01J23/83 , C01B3/326 , C01B2203/1052 , C01B2203/1076 , Y02P20/52
摘要： The present invention provides a method of producing a CuZnAlZr oxide catalyst consisting of reacting an aqueous NaOH solution and aqueous NACO3 solution with a mixture of aqueous solutions of each nitrate of Cu, Zn, Al, and Zr, producing a precipitate by coprecipitation, aging, filtering, washing and drying this precipitate to prepare a catalyst precursor consisting of a CuZnAlZr layered double hydroxide, and then obtaining a CuZnAlZr oxide by calcining this precursor in an air ambient atmosphere, a CuZnAlZr oxide catalyst, a CuZnZrCe oxide catalyst, a CoCuZnAl oxide catalyst for producing hydrogen by oxidative steam reforming of methanol, and methods of producing hydrogen gas consisting of converting methanol to hydrogen gas by oxidative steam reforming in the presence of air and steam using these oxide catalysts.
摘要翻译：本发明提供一种CuZnAlZr氧化物催化剂的制造方法，该催化剂由NaOH水溶液和NACO3水溶液与Cu，Zn，Al和Zr的每种硝酸盐的水溶液的混合物反应，通过共沉淀，老化，过滤，洗涤和干燥该沉淀物以制备由CuZnAlZr层状双氢氧化物组成的催化剂前体，然后通过在空气环境气氛中煅烧该前体获得CuZnAlZr氧化物，CuZnAlZr氧化物催化剂，CuZnZrCe氧化物催化剂，CoCuZnAl氧化物催化剂用于通过甲醇的氧化蒸汽重整产生氢气，以及通过使用这些氧化物催化剂在空气和蒸汽的存在下通过氧化蒸汽重整将甲醇转化为氢气而制备氢气的方法。

6. 发明授权

US5366229A Shooting game machine 失效
标题翻译：射击游戏机
公开(公告)号：US5366229A
公开(公告)日：1994-11-22
申请号：US61589
申请日：1993-05-17
申请人： Kenzi Suzuki
发明人： Kenzi Suzuki
IPC分类号： A63F9/02 , F41G3/26 , G06F3/00 , G06F3/033 , G06F3/042 , H04N7/18 , A63F9/22
CPC分类号： A63F13/837 , A63F13/04 , A63F13/219 , A63F13/426 , F41G3/2633 , G06F3/0386 , A63F2300/8076
摘要： In a shooting game machine, a projector projects a shooting video image, in which a target appears, on a screen. A player may fire a laser gun to emit a light beam to the target on the screen. A video camera photographs the screen, irrespective of any display scanning of the projector, and outputs its picture signal to coordinate computing means. The coordinate computing means counts clock pulses, which are output from a pulse generator, during a period from when a vertical synchronous signal of the picture signal is output until a beam point signal is output, and divides the count value by a predetermined reference pulse number to compute and output the X coordinate and the Y coordinate of the beam point on the screen.
摘要翻译：在射击游戏机中，投影机在屏幕上投影出现目标的拍摄视频图像。玩家可以点燃激光枪向屏幕上的目标发射光束。摄像机拍摄屏幕，无论投影机的任何显示扫描如何，并将其图像信号输出到坐标计算装置。在输出图像信号的垂直同步信号直到输出波束点信号的期间，坐标运算装置对从脉冲发生器输出的时钟脉冲进行计数，并将计数值除以规定的基准脉冲数以计算和输出屏幕上的波束点的X坐标和Y坐标。

7. 发明授权

US5008224A Adsorbent for phosphorus and method for production of adsorbent for phosphorus 失效
标题翻译：磷吸附剂和磷吸附剂生产方法
公开(公告)号：US5008224A
公开(公告)日：1991-04-16
申请号：US373587
申请日：1989-06-30
申请人： Eiji Watanabe , Nasakazu Horio , Kenzi Suzuki
发明人： Eiji Watanabe , Nasakazu Horio , Kenzi Suzuki
IPC分类号： C02F1/28 , B01J20/00 , B01J20/12 , B01J20/16 , B01J20/30
CPC分类号： B01J20/00 , B01J20/12 , Y10S210/906
摘要： An amorphous substance obtained by mixing volcanic ash with or without added clay and water and, if necessary, a surfactant, kneading the mixture, and shaping and firing. Additives such as camphor or naphthalene may be included prior to firing for plasticity and to form pores. The resultant mixture possesses an ability to adsorb phosphorus selectively. When this substance is placed in contact with a phosphorus-containing liquid, it removes phosphorus from the liquid.
摘要翻译：通过混合含有或不加入粘土和水的火山灰以及必要时的表面活性剂，捏合该混合物以及成形和烧制而得到的无定形物质。添加剂如樟脑或萘可以在烧制之前被包含在可塑性之外并形成孔。所得混合物具有选择性吸附磷的能力。当该物质与含磷液体接触时，它从液体中除去磷。

8. 发明授权

US4753908A Method for production of microporous separating material from smectite type mineral 失效
标题翻译：蒙脱石型矿物生产微孔分离材料的方法
公开(公告)号：US4753908A
公开(公告)日：1988-06-28
申请号：US940087
申请日：1986-12-10
申请人： Kaoru Kawase , Hiroshi Sakami , Kenzi Suzuki , Shozo Iida
发明人： Kaoru Kawase , Hiroshi Sakami , Kenzi Suzuki , Shozo Iida
IPC分类号： B01J20/16 , B01J20/28 , B01J31/06 , B01J21/16 , B01J20/12
CPC分类号： B01J20/28083 , B01J20/16
摘要： A microporous separating material is produced by a method which comprises preparing a mixture of (1) macromolecular quaternary ammonium salt having a quaternary amine linked to a water-soluble macromolecular compound and possessing basicity, (2) a polymer of a polyoxyethylene alkylvinyl monomer and a vinyl monomer possessing basicity, or (3) a polymer of a halogenide of a quaternary amine, i.e. a basic macromolecular compound, and at least one water-soluble macromolecular substance selected from the group consisting of cellulose, polyvinyl alcohol, polyethylene oxide, and polyacrylamide with a smectite type mineral, mixing the aforementioned mixture with an inorganic substance in a water-soluble state, drying the resulting mixture, and firing the dried mixture.
摘要翻译：微孔分离材料通过以下方法制备：（1）具有与水溶性高分子化合物连接的具有碱性的季胺的（1）高分子季铵盐的混合物，（2）聚氧乙烯烷基乙烯基单体的聚合物和具有碱性的乙烯基单体，或（3）季胺的卤化物的聚合物，即碱性高分子化合物，和至少一种选自纤维素，聚乙烯醇，聚环氧乙烷和聚丙烯酰胺的水溶性大分子物质用蒙脱石型矿物，将上述混合物与水溶性状态的无机物质混合，干燥所得混合物，并焙烧干燥的混合物。

9. 发明授权

US4629713A Finely porous clay formed preponderantly of spectite type mineral and method for manufacture of said clay 失效
标题翻译：细孔多孔粘土主要形成了高岭土矿物和制造所述粘土的方法
公开(公告)号：US4629713A
公开(公告)日：1986-12-16
申请号：US691765
申请日：1985-01-16
申请人： Kenzi Suzuki , Shozo Iida , Hiroshi Sakami , Kaoru Kawase
发明人： Kenzi Suzuki , Shozo Iida , Hiroshi Sakami , Kaoru Kawase
IPC分类号： B01J29/04 , B01J21/16 , B01J20/12
CPC分类号： B01J29/049 , B01J2229/42
摘要： Finely porous clay having crystal layers separated by intervals of at least 20 .ANG. and having a smectite type mineral as a main component thereof. This finely porous clay is manufactured by mixing the smectite type mineral with water, a water-soluble polymer, and an inorganic substance and drying or heating the resultant mixture.
摘要翻译：具有通过间隔至少为20安培角分隔并具有蒙皂石型矿物作为其主要成分的晶体层的细多孔粘土。通过将蒙皂石型矿物与水，水溶性聚合物和无机物质混合并干燥或加热得到的混合物来制造这种细多孔粘土。

10. 发明授权

US07025947B2 Catalysts for oxidative steam reforming of methanol as a new and efficient method for the selective production of hydrogen for fuel cells and their synthesis method 失效
标题翻译：用于甲醇氧化蒸汽重整的催化剂作为燃料电池选择性生产氢气的新型和有效方法及其合成方法
公开(公告)号：US07025947B2
公开(公告)日：2006-04-11
申请号：US10898318
申请日：2004-07-26
申请人： Kenzi Suzuki , Velu Subramani , Toshihiko Osaki
发明人： Kenzi Suzuki , Velu Subramani , Toshihiko Osaki
IPC分类号： C01B3/26 , B01J23/70 , B01J23/72
CPC分类号： B01J37/03 , B01J23/80 , B01J23/83 , C01B3/326 , C01B2203/1052 , C01B2203/1076 , Y02P20/52
摘要： The present invention provides a method of producing a CuZnAlZr oxide catalyst consisting of reacting an aqueous NaOH solution and aqueous Na2CO3 solution with a mixture of aqueous solutions of each nitrate of Cu, Zn, Al, and Zr, producing a precipitate by coprecipitation, aging, filtering, washing and drying this precipitate to prepare a catalyst precursor consisting of a CuZnAlZr layered double hydroxide, and then obtaining a CuZnAlZr oxide by calcining this precursor in an air ambient atmosphere, a CuZnAlZr oxide catalyst, a CuZnZrCe oxide catalyst, a CoCuZnAl oxide catalyst for producing hydrogen by oxidative steam reforming a methanol, and methods of producing hydrogen gas consisting of converting methanol to hydrogen gas by oxidative steam reforming in the presence of air and steam using these oxide catalysts.
摘要翻译：本发明提供了一种生产CuZnAlZr氧化物催化剂的方法，该催化剂由NaOH水溶液和Na 2 CO 3水溶液与硝酸铵的水溶液 Cu，Zn，Al和Zr，通过共沉淀，老化，过滤，洗涤和干燥沉淀产生沉淀，制备由CuZnAlZr层状双氢氧化物组成的催化剂前体，然后通过在空气中煅烧该前体获得CuZnAlZr氧化物环境气氛，CuZnAlZr氧化物催化剂，CuZnZrCe氧化物催化剂，通过氧化蒸汽重整甲醇生产氢的CoCuZnAl氧化物催化剂，以及在空气存在下通过氧化蒸汽重整将甲醇转化为氢气的氢气生产方法，以及使用这些氧化物催化剂的蒸汽。

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