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1. 发明专利

JPH04252878A ELECTRONIC PARTS MANUFACTURING SYSTEM 失效
公开(公告)号：JPH04252878A
公开(公告)日：1992-09-08
申请号：JP842691
申请日：1991-01-28
申请人： TOSHIBA CORP , EBARA CORP
发明人： OKUMURA KATSUYA , TAKEUCHI TAKAO
IPC分类号： F04B37/14 , F04B37/16 , H01L21/02
摘要： PURPOSE:To provide such an electronic parts manufacturing system that receives no restriction of the pipe diameter, layout, etc., of a discharge piping system in a vacuum pump and requires no separate compressor even at a time when exhausted gas is further pressurized. CONSTITUTION:An inlet port 8a of a vacuum pump P is connected to a reaction chamber or electronic parts manufacturing chamber 21, and the vacuum pump is turned to a positive displacement pump with a single or multistage internal compressor. With this constitution, discharge pressure of the vacuum pump can be set to such that is more than the atmospheric pressure.

2. 发明专利

AU2003224456A1 POWER GENERATING APPARATUS 未知
公开(公告)号：AU2003224456A1
公开(公告)日：2003-12-02
申请号：AU2003224456
申请日：2003-04-30
申请人： EBARA CORP
发明人： UCHIMURA TOMOYUKI , KATO HIROYUKI , TAKEUCHI TAKAO , MIYAKE YOSHIO
IPC分类号： F01K13/00 , F01D15/00 , H02P9/04 , F01D1/00 , F01D15/08

3. 发明专利

DE69517071T2 未知
公开(公告)号：DE69517071T2
公开(公告)日：2001-02-01
申请号：DE69517071
申请日：1995-02-21
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KATSUTA SEIGO
IPC分类号： F01K25/10 , F04D1/06 , F04D13/04
摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump (1) connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger (42) for heating and converting the liquid fluid pressurized by the pump (1) into a high-pressure gas, and an expander turbine (3) connected to an opposite end of the shaft (2) and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger (42) is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump (1) having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

4. 发明专利

DE69517071D1 未知
公开(公告)号：DE69517071D1
公开(公告)日：2000-06-29
申请号：DE69517071
申请日：1995-02-21
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KATSUTA SEIGO
IPC分类号： F01K25/10 , F04D1/06 , F04D13/04
摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump (1) connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger (42) for heating and converting the liquid fluid pressurized by the pump (1) into a high-pressure gas, and an expander turbine (3) connected to an opposite end of the shaft (2) and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger (42) is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump (1) having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

5. 发明专利

CA2143033C TURBOEXPANDER PUMP UNIT 未知
公开(公告)号：CA2143033C
公开(公告)日：2006-04-11
申请号：CA2143033
申请日：1995-02-21
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KATSUTA SEIGO
IPC分类号： F04D7/00 , F01K25/10 , F04D1/06 , F04D13/04
摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger for heating and converting the liquid fluid pressurized by the pump into a high-pressure gas, and an expander turbine connected to an opposite end of the shaft and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

6. 发明专利

DE69622625D1 未知
公开(公告)号：DE69622625D1
公开(公告)日：2002-09-05
申请号：DE69622625
申请日：1996-04-26
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KISHIKAWA TADAHIKO
IPC分类号： F17C9/02
摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the back-pressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

7. 发明专利

CA2143033A1 TURBOEXPANDER PUMP UNIT 未知
公开(公告)号：CA2143033A1
公开(公告)日：1995-08-24
申请号：CA2143033
申请日：1995-02-21
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KATSUTA SEIGO
IPC分类号： F01K25/10 , F04D1/06 , F04D13/04 , F04D7/00
摘要： A turboexpander pump unit has a vertical or horizontal shaft, a pump connected to an end of the shaft for pressurizing a liquid fluid to a pressure higher than a predetermined delivery pressure, a heat exchanger for heating and converting the liquid fluid pressurized by the pump into a high-pressure gas, and an expander turbine connected to an opposite end of the shaft and actuatable by a thermal energy reduction produced when the high-pressure gas from the heat exchanger is lowered to the predetermined delivery pressure, for delivering the liquid fluid continuously under a predetermined pressure to an external installation. The pump having at least two outlet ports for discharging the liquid fluid at respective different pressures. One of the two outlet ports is connected to the heat exchanger, and the other to a liquid delivery line.

8. 发明专利

CA2175034C LIQUEFIED GAS SUPPLY SYSTEM 未知
公开(公告)号：CA2175034C
公开(公告)日：2005-11-22
申请号：CA2175034
申请日：1996-04-25
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KISHIKAWA TADAHIKO
IPC分类号： F17C9/02 , F17C7/04
摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the back-pressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

9. 发明专利

DE69622625T2 未知
公开(公告)号：DE69622625T2
公开(公告)日：2003-04-10
申请号：DE69622625
申请日：1996-04-26
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KISHIKAWA TADAHIKO
IPC分类号： F17C9/02
摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the back-pressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

10. 发明专利

CA2175034A1 LIQUEFIED GAS SUPPLY SYSTEM 未知
公开(公告)号：CA2175034A1
公开(公告)日：1996-10-27
申请号：CA2175034
申请日：1996-04-25
申请人： EBARA CORP
发明人： MATSUMURA MASAO , TAKEUCHI TAKAO , KISHIKAWA TADAHIKO
IPC分类号： F17C9/02 , F17C7/04
摘要： A self-contained liquefied gas supply system has a tank for storing a liquefied gas, a primary pump for delivering the liquefied gas from the tank, a secondary pump for pressurizing the liquefied gas delivered from the primary pump, a vaporizer for vaporizing the liquefied gas discharged from the secondary pump into a vaporized gas, an expander for actuating the secondary pump with the vaporized gas produced by the vaporizer, and a back-pressure line connected to an outlet of the expander. A bypass pipe is connected between the primary pump and the vaporizer in bypassing relation to the secondary pump for supplying the liquefied gas from the primary pump to the vaporizer. A joint line is connected between the back-pressure line and a substantially atmospheric pressure line, the joint line having a first flow regulating valve for regulating a rate of flow of a gas from the back-pressure line to the substantially atmospheric pressure line. A bypass line is connected between the vaporizer and the back-pressure line in bypassing relation to the expander, the bypass line having a second flow regulating mechanism for regulating a rate of flow of the vaporized gas from the vaporizer to the backpressure line. For starting the secondary pump, the liquefied gas is delivered from the primary pump through the bypass pipe to the vaporizer, which produces a vaporized gas supplied to the expander.

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