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    • 7. 发明专利
    • Semiconductor device and manufacture thereof
    • 半导体器件及其制造
    • JP2000077786A
    • 2000-03-14
    • JP24290998
    • 1998-08-28
    • Toshiba Corp株式会社東芝
    • JOHN LENEY
    • H01L21/28H01S5/00H01S5/30H01S5/323H01S5/343
    • PROBLEM TO BE SOLVED: To form a metal electrode which displays ohmic characteristics by a method wherein the metal electrode is equipped with a first layer that contains at least Ga and N as component elements, a metal film, and an interposition layer that contains at least one of elements such as S, Se, Te, As, P, and Hf and is interposed between the first layer and the metal film.
      SOLUTION: The surface of a GaN layer is etched by the use of an HF solution to remove an oxide film from it, residual F is removed, an interposition layer 12 is formed, and then a metal electrode is evaporated for the formation of a metal electrode 3 that displays complete ohmic characteristics. F atoms as etching contaminants are removed, whereby only a surface level caused by a surface condition that is naturally present on the surface of a GaN crystal is left on the surface of a contact layer 2, so that a pinning effect is slightly relaxed, but as a crystal has its own intrinsic surface state, the pinning effect cannot be completely removed only by cleaning. Therefore, when Se, Te, As, P, or Hf is used as a terminal atom besides O, a metal electrode that displays perfect ohmic characteristics can be formed.
      COPYRIGHT: (C)2000,JPO
    • 要解决的问题:通过以下方法形成显示欧姆特性的金属电极,其中金属电极配备有至少包含Ga和N作为组分元素的第一层,金属膜和至少含有 诸如S,Se,Te,As,P和Hf的元素之一,并且介于第一层和金属膜之间。 解决方案:通过使用HF溶液来蚀刻GaN层的表面以从其中除去氧化膜,除去残余F,形成插入层12,然后蒸发金属电极以形成金属 显示完整的欧姆特性的电极3。 F原子作为蚀刻污染物被去除,由此只有由天然存在于GaN晶体表面上的表面状态引起的表面水平留在接触层2的表面上,使得钉扎效应稍微放松,但是 因为晶体具有其自身的固有表面状态,所以仅通过清洁不能完全去除钉扎效果。 因此,除了O以外,当使用Se,Te,As,P或Hf作为末端原子时,可以形成显示完美欧姆特性的金属电极。
    • 8. 发明专利
    • P-side electrode of iii-v group compound semiconductor light emitting element and iii-v group compound semiconductor light emitting element
    • III-V族化合物半导体发光元件和III-V族化合物半导体发光元件的P侧电极
    • JPH11274554A
    • 1999-10-08
    • JP7892998
    • 1998-03-26
    • Toshiba Corp株式会社東芝
    • NOZAKI CHIHARUJOHN LENEY
    • H01L33/12H01L33/32H01L33/40H01L33/00
    • PROBLEM TO BE SOLVED: To realize a superior reliability without causing the deterioration at a low threshold current and low operating voltage by forming at least one metal layer selected among Mg
      x Au
      y (x>y) layer, Pt layer, Mo layer and W layer and Au layer on a III-V group compound semiconductor layer.
      SOLUTION: On a sapphire substrate 1, layers are grown from a GaN buffer layer 2 to a p-type GaN contact layer 9. A part of the p-type contact layer 9 is covered with a mask, the semiconductor layers 9-3 are partly removed to expose the n-type GaN contact layer 3, the mask is removed, an Mg layer, Au layer, Pt layer and Au layer 12 are sputter-deposited on the p-type contact layer 9 to form a p-side electrode 100, it is heat treated to react Au of the Au layer all with Mg of the Mg layer to form an MgAu layer 10, remaining Mg of the Mg layer diffuses on the p-type contact layer 9 surface and an n-side Au/Ti electrode 13 is formed on the n-type contact layer 3.
      COPYRIGHT: (C)1999,JPO
    • 要解决的问题:通过形成从Mg x Au y(x> y)层,Pt层,Mo层和W层中选择的至少一种金属层,实现优异的可靠性而不会导致低阈值电流和低工作电压的劣化,以及 Au层在III-V族化合物半导体层上。 解决方案:在蓝宝石衬底1上,从GaN缓冲层2生长到p型GaN接触层9。p型接触层9的一部分用掩模覆盖,半导体层9-3 部分去除以露出n型GaN接触层3,除去掩模,在p型接触层9上溅射淀积Mg层,Au层,Pt层和Au层12,形成p侧电极 100处理后,将Au层的Au全部与Mg层的Mg反应,形成MgAu层10,Mg层的剩余Mg扩散到p型接触层9表面,n侧Au / Ti电极13形成在n型接触层3上。
    • 10. 发明专利
    • SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
    • JPH1154798A
    • 1999-02-26
    • JP20440597
    • 1997-07-30
    • TOSHIBA CORP
    • JOHN LENEY
    • H01L29/45H01L33/06H01L33/14H01L33/32H01L33/40H01L33/00
    • PROBLEM TO BE SOLVED: To reduce the resistances of metal electrodes through the reduction of surface barriers by reducing the surface levels of GaN contact layers by interposing thickness-controlled high-purity surface oxide films between the GaN contact layers and metal electrodes. SOLUTION: A GaN semiconductor layer provided with an ohmic electrode is constituted of an InGaN multi-quantum well active layer 6, light guide layers 5 and 7 which are respectively formed below and on the active layer 6, clad layers 4 and 8 which are respectively formed below and on the light guide layers 5 and 7, and contact layers 2 and 9 which are respectively formed below and on the clad layers 4 and 8. The semiconductor layers composed of a multilayered structure of GaN crystals is formed on a sapphire substrate 1, but current electrodes 3 and 11 are led out from one side of the laser, because the substrate 1 is made of an insulator. Current electrode structures containing interpose oxide films are respectively applied to the layers between the upper p-type GaN contact layer 9 and a Pt/Au electrode 11 and between the lower n-type GaN contact layer 2 and an Al/Pt/Au electrode 3. Therefore, a highly efficient GaN semiconductor laser having a long service life can be realized, because the operating voltage of the laser can be lowered.