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1. 发明专利

JP2011134974A Substrate cover and charged particle beam drawing method using the same 有权
标题翻译：基板覆盖和使用其的带电粒子束图形方法
公开(公告)号：JP2011134974A
公开(公告)日：2011-07-07
申请号：JP2009294846
申请日：2009-12-25
申请人： Nuflare Technology Inc , Toshiba Corp , 株式会社ニューフレアテクノロジー , 株式会社東芝
发明人： KAWAGUCHI MICHIHIRO , YAMAGUCHI KEISUKE , KANAZAWA SHUN , MITSUI SOICHIRO , AKENO MASANOBU
IPC分类号： H01L21/027 , G03F7/20
CPC分类号： H01J37/3174 , B82Y10/00 , B82Y40/00 , H01J2237/0044
摘要： PROBLEM TO BE SOLVED: To provide a substrate cover having an antistatic function and achieving position detection of a substrate edge and alignment of the substrate in a mounted state on the substrate, and to provide a charged particle beam drawing method using the same.
SOLUTION: The substrate cover 40 includes a conductive part 41 of the shape corresponding to a peripheral edge region of the substrate. At least a part of the conductive part has a transmission part 47 constituted of a light-transmissive member and hence is configured such that desired light passes through at least a part of the conductive part. The position of the edge part of the substrate is detected by disposing the substrate with the substrate cover 40 mounted between a light irradiating means and a light-receiving part and transmitting irradiating light which is directed from the irradiating means above the substrate to the edge part of the substrate through at least a part of the substrate cover 40 to illuminate the edge part of the substrate.
COPYRIGHT: (C)2011,JPO&INPIT
摘要翻译：解决的问题：提供具有抗静电功能的基板盖，并且在基板上以安装状态实现基板边缘的位置检测和基板的对准，并且提供使用该基板的带电粒子束拉伸方法。解决方案：基板盖40包括与基板的周缘区域对应的形状的导电部分41。导电部件的至少一部分具有由透光部件构成的透射部47，因此构成为使得期望的光通过导电部的至少一部分。通过将基板安装在安装在光照射装置和受光部之间的基板盖40并且将从基板上方的照射装置引导的照射光透射到边缘部分来检测基板的边缘部分的位置的衬底通过至少一部分衬底盖40以照射衬底的边缘部分。版权所有（C）2011，JPO＆INPIT

2. 发明专利

JPH04176584A TABLE OF MULTIDEGREE FREEDOM 失效
公开(公告)号：JPH04176584A
公开(公告)日：1992-06-24
申请号：JP30273190
申请日：1990-11-09
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： B25J19/00
摘要： PURPOSE:To make it light-weighed and compact and to facilitate a position/ posture calculation, by providing a base which connects the respective one ends of plural cylindrical elastic bodies, and a table which connects the respective other ends of plural cylindrical elastic bodies. CONSTITUTION:The movements of curvature/telescopic motion, etc., are smoothly performed as the whole with the combination of the pressures of respective pressure rooms 14, 15, 16, due to the pressure rooms 14, 15, 16 being made telescopic by adjusting the pressures of the pressure rooms 14, 15, 16 of a cylindrical elastic body 3(= 3a, 3b) which are actuators. Therefore the motion which is smooth and with multidegree of freedom is possible by one actuator, so the total number of the actuator driving a table 1 can be reduced. A degree of freedom table 1 so compact and light-weighed enough for fitting to the wrist of a robot is realized.

3. 发明专利

JPH0426357A VARIABLE GAP TYPE MOTOR 失效
公开(公告)号：JPH0426357A
公开(公告)日：1992-01-29
申请号：JP12871190
申请日：1990-05-18
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H02K41/06
摘要： PURPOSE:To make it possible to generate large torque by making a magnetic circuit, which is connected in series to permanent magnets magnetized in oppo site directions alternately and which includes stators the magnetic flux passages of which have excitation windings wound thereround and are arranged approxi mately circularly. CONSTITUTION:Thin-band-shaped permanent magnets 33a-33h magnetized along their thicknesses are attached to the tips of projections 29a-29h, or faces opposite to a rotor 27. The permanent magnets 33a-33h are magnetized in opposite directions alternately. The permanent magnets 33a and 33b attached to the projections 29a and 29b act in series to generate strong bias magnetic flux 35a. The permanent magnets 33b and 33c attached to the projections 29b and 29c also act in series to generate bias magnetic flux 35b in the same direction as the bias magnetic flux 35a. The windings 31b and 31c of the projections 29b and 29c are excited to pass magnetic flux in the same direction as the bias magnetic flux 35a and 35b and generate magnetic flux 37a generating great attraction.

4. 发明专利

JPH02164265A VARIABLE VOID TYPE MOTOR 失效
公开(公告)号：JPH02164265A
公开(公告)日：1990-06-25
申请号：JP9750589
申请日：1989-04-19
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H02K41/06
摘要： PURPOSE:To increase torque by being equipped with a rotor consisting of plural magnetic substances corresponding to plural stators axially arranged on the inside circumference of a cylinder housing composed of a magnetic substance and by making the void variable between the stators and the rotor. CONSTITUTION:In a housing 3 two ring compounds 1a and 1b on the stator side and a connecting yoke 2 between them are installed. The ring compounds 1a and 1b constitute a stator by winding exciting coils over the plural salient poles on the inside circumference. The rotor 6 is composed of ring compounds 6a and 6b on the rotor side in a magnetic substance and of a permanent magnet 4 between them, where a gear 11a of a rotating shaft 10 is engaged with a gear 7a on the left end, while a gear 8a of a stator 1 is engaged with a gear 7b. The rotating shaft 10 has a spacer 15 whose center of the internal circle deviates from the center of the external circle through bearings 14a and 14b, by which the attractive force is prevented from concentrating on gears 7a, 7b, 8a and 11a. The bias flux by the permanent magnet 4 interacts the main flux of a coil 5 to generate a strong attractive force.

5. 发明专利

JPH01315251A VARIABLE AIR GAP TYPE MOTOR 失效
公开(公告)号：JPH01315251A
公开(公告)日：1989-12-20
申请号：JP985589
申请日：1989-01-20
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： H02K41/06
摘要： PURPOSE:To enhance the positioning of a rotor and the durability of transmitting means by placing a spacer supporting a rotor in the radial direction of the rotor and rotating together with the rotor in a variable space generated by the revolution motion of the rotor. CONSTITUTION:When an exciting winding 4 is energized to generate revolving magnetic field, a rotor 5 rolls along the inner peripheral circle of a stator 2. The own rotating motion of the rotor 5 is transmitted to an output shaft 6. A substantially cylindrical spacer 7 is associated in a variable space interposed between the shaft 6 and the rotor 5 through two bearings 8a, 8b. An attracting force operating at the rotor 5 by the revolving magnetic field is dispersed to the shaft 5 by the spacer 7.

6. 发明专利

JP2004304032A Charged particle beam lithography method 有权
标题翻译：充电粒子束光刻方法
公开(公告)号：JP2004304032A
公开(公告)日：2004-10-28
申请号：JP2003096690
申请日：2003-03-31
申请人： Toshiba Corp , 株式会社東芝
发明人： MITSUI SOICHIRO , AKENO MASANOBU
IPC分类号： G03F7/20 , H01J37/20 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To provide a charged particle beam lithography method by which both a high throughput and high plotting accuracy can be realized by compensating and, in addition, highly accurately stabilizing the temperature change of a substrate caused by vacuum pumping in a short time during the course of transporting the substrate.
SOLUTION: In a temperature-controlled vacuum chamber 11, a temperature adjusting plate 13 has a coefficient of thermal conductivity of ≥100 W/mK and radiation efficiency of ≥0.4, is fitted with a temperature sensor 15 on its surface, and can adjust temperature. The plate is set up to face a substrate 17 to be plotted. The temperature of the substrate 17 is stabilized by leaving the substrate 17 in the vacuum chamber 11 as it is until the temperature change which occurs in the temperature adjusting plate 13 when the substrate 17 is carried in the chamber 11 and mounted on a supporting mechanism 12 falls within a prescribed range by detecting the temperature change by monitoring the detection output of the temperature sensor 15.
COPYRIGHT: (C)2005,JPO&NCIPI
摘要翻译：要解决的问题：提供一种带电粒子束光刻方法，其通过补偿而实现高通量和高绘图精度，并且另外高精度地稳定由真空泵送引起的基板的温度变化在输送基板的过程中短时间内。解决方案：在温度控制真空室11中，温度调节板13的导热系数≥100W/ mK，辐射效率≥0.4，在其表面上装有温度传感器15，并且可以调节温度。板被设置成面对待绘制的基板17。通过将基板17原样放置在真空室11中直到温度调节板13中发生的温度变化（基板17被携带在室11中并安装在支撑机构12上）而使基板17的温度稳定通过监测温度传感器15的检测输出来检测温度变化，落在规定范围内。（C）2005年，JPO＆NCIPI

7. 发明专利

JP2001284219A CHARGED PARTICLE BEAM DEVICE AND SAMPLE CHAMBER THEREFOR 失效
公开(公告)号：JP2001284219A
公开(公告)日：2001-10-12
申请号：JP2000094573
申请日：2000-03-30
申请人： TOSHIBA CORP
发明人： TAKAMATSU JUN , OGASAWARA MUNEHIRO , HATTORI SEIJI , AKENO MASANOBU , SUNAOSHI HITOSHI , SHIMOMURA NAOHARU
IPC分类号： G21K5/00 , G03F7/20 , G21K5/04 , G21K5/10 , H01J37/304 , H01J37/305 , H01L21/027
摘要： PROBLEM TO BE SOLVED: To reduce displacement of a fixed mirror for a laser interferometer fixed to the internal wall of the sample chamber of a charged particle beam device due to the thermal expansion of the chamber caused by temperature fluctuation. SOLUTION: The charged particle beam device is provided with a sample chamber (14) in which the fixed mirror (18) for the interferometer is fixed to an internal wall and has an opening in its top face, an electron gun (12) which emits a charged particle beam upon the sample set up in the chamber (18) through the opening, and an optical lens barrel (11) provided with the gun (12). The portion of the chamber (14) from the opening to the position of the mirror (18) is made of an inver alloy.

8. 发明专利

JPH07181275A LINEAR MOVING DEVICE 失效
公开(公告)号：JPH07181275A
公开(公告)日：1995-07-21
申请号：JP32488093
申请日：1993-12-22
申请人： TOSHIBA CORP
发明人： AKENO MASANOBU
IPC分类号： G12B5/00 , B23Q5/38 , F16H19/02 , G01R31/26 , H01L21/027 , H01L21/66 , H01L21/68
摘要： PURPOSE:To provide a linear moving device with easy production and assembling which is capable of improving durability without enlarging the device size and of moving accurately. CONSTITUTION:A linear moving device is constituted of a housing 1, a first roller 2 supported rotation-free with the housing 1, a second roller 3 supported rotation-free with the housing 1, a motor 6 to rotate the second roller 3 and a moving body 9 movable in a specific direction by the rotation of the second roller 3 which is pinched with the rotating surface of the first roller and the rotating surface of the second roller. And the first roller 2 is supported with supporting means 10, 11 allowing the movement to the direction of the rotation shaft of the roller 2. Or longitudinal modulus of the maternal of the moving body 9 of the linear moving device is made smaller than longitudinal modulus of the first roller 2 and the second roller 3.

9. 发明专利

JPH07122615A SUBSTRATE TRANSFER SYSTEM 失效
公开(公告)号：JPH07122615A
公开(公告)日：1995-05-12
申请号：JP26729893
申请日：1993-10-26
申请人： TOSHIBA CORP , TOPCON CORP
发明人： SANADA YASUSHI , AKENO MASANOBU , TOJO TORU , ABE KAZUO
IPC分类号： G01R31/26 , B65G49/07 , H01L21/50 , H01L21/66 , H01L21/677 , H01L21/68
摘要： PURPOSE:To achieve downsizing of a substrate transfer system by disposing a robot for supporting and controlling a multi-joint arm such that the multi-joint arm is aligned with a plurality of magazines containing substrates thereby reducing the area being occupied by the robot and the magazine. CONSTITUTION:A robot 11 for supporting and controlling a rotatable and telescopic multi-joint arm 13 having a suction plate 18 at the end thereof is disposed between magazines 20b, 20c such that the fixing center of the arm 13 is aligned with the centers of a plurality of magazines 20a-20d containing a plurality of substrates 21. Since the robot 11 and the plurality of magazines 20a-20d can occupy rectangular areas, the size of substrate transfer system can be reduced as compared with a conventional system. Consequently, the moving range of the multi-joint arm 13 can be limited when a substrate 21 is taken out of the magazines 20a-20d by means of the suction plate 18 fixed to the end of the multi-joint arm 13 of the robot 11.

10. 发明专利

JPH0392276A LINEAR DRIVE DEVICE 失效
公开(公告)号：JPH0392276A
公开(公告)日：1991-04-17
申请号：JP22961189
申请日：1989-09-05
申请人： TOSHIBA CORP
发明人： ITAGAKI AKIYOSHI , HASHIMOTO MASANORI , AKENO MASANOBU
IPC分类号： B25J9/02 , B23Q1/58 , B23Q5/38
摘要： PURPOSE:To operate the subject linear drive device at a high speed without making high noise and improve the positioning accuracy by forming a flat belt, for converting the rotation of a drive pulley into the linear motion of a slider made of elastic material of large elastic coefficient. CONSTITUTION:When a motor P is started, the rotation is reduced by a speed reducer 10 is transmitted to a drive pulley 6, and a slider 12 is linearly moved by the motion of a flat belt along with the rotation of the drive pulley 6. The speed and stop position of the slider 12 are controlled by regulating the rotation speed and rotation angle of the motor 9 based on the singles from a detector 11 by means of a controller. At this time, even if the slider 12 is accelerated at high speed to be moved at high speed and reduced at high reducing speed to be stopped, the flat belt 13 is not stretched and moreover not agingly lengthened by making the flat belt 13 of steel whose elastic coefficient is large, and therefore, which is not largely lengthened even if large tension is applied thereto. This leads to high speed operation without high noise and improves the positioning accuracy.

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