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    • 7. 发明公开
    • METAL FLUORIDE SINGLE CRYSTAL PULLING APPARATUS AND PROCESS FOR PRODUCING METAL FLUORIDE SINGLE CRYSTAL WITH THE APPARATUS
    • 设备绘制金属氟化物单晶和工艺用于生产金属氟化物单晶与设备
    • EP1849893A1
    • 2007-10-31
    • EP05816637.2
    • 2005-12-16
    • TOKUYAMA CORPORATION
    • NAWATA, TeruhikoYASUMURA, KenYANAGI, HiroyukiNISHIJIMA, Eiichi
    • C30B15/12C30B29/12
    • C30B15/02C30B15/12C30B29/12
    • A metal fluoride single crystal pulling apparatus that upward pulling initiation through termination, in the state of shallow melt capable of highly effective inhibition of scatterer formation, can perform stable growth of single crystal and can suppress any mixing of air bubbles and occurrence of crystal break during crystal growth, etc; and a process for producing a metal fluoride single crystal therewith. As a crucible for accommodating a melt of raw metal fluoride, use is made of a double structured crucible composed of an outer crucible and an inner crucible. In the upward pulling of single crystal, the accommodation depth of inner crucible relative to the outer crucible is increased in accordance with any decrease of melt accommodated in the inner crucible according to the growth of single crystal, so that the melt accommodated in the outer crucible is fed into the inner crucible to thereby maintain the amount of melt accommodated in the inner crucible within a given range. Further, at the position of an opening that upward opens any gap space between an external surface of outer crucible and an internal surface of inner crucible, or an interstice, situated below the opening, between a side wall internal surface of outer crucible and a side wall external surface of inner crucible, there is disposed a cutoff member that cuts off at least part of the position.
    • 金属氟化物单晶提拉装置也向上通过终止拉起始,在能够高度有效的抑制的散射体形成的浅熔体的状态下,可以执行单晶的稳定生长和期间,能够抑制气泡和晶体的断线发生的任何混合 晶体生长,等; 和用于与制造金属氟化物单晶存在的方法。 作为用于容纳的原料金属氟化物的熔体的坩埚中,使用了在外坩埚和内坩埚构成的双重结构的坩埚。 在向上提拉单晶的,内坩埚相对于所述外坩埚的容纳深度增加在雅舞蹈与容纳在坩埚内雅丁单晶的生长熔体的任何降低,所以DASS模头熔融容纳在外坩埚 被馈送到内坩埚,从而保持熔融的容纳在所述内坩埚的给定范围内的量。 另外,在开口的位置的确向上打开以外坩埚的外表面之间的内坩埚的内表面的任何间隙的空间,或在空隙,位于开口部的下方,外坩埚的侧壁内表面和一个侧之间 内坩埚的壁的外表面,有一个截止设置构件确实切断位置的至少一部分。