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    • 7. 发明专利
    • SUBSTRATE COATING ON ONE OR MORE SIDES
    • CA2801793A1
    • 2011-12-15
    • CA2801793
    • 2011-05-23
    • THYSSENKRUPP UHDE GMBH
    • DULLE KARL-HEINZFUNCK FRANKHOORMANN DIRKOELMANN STEFANWOLTERING PETERSCHMITT CARSTENHOFMANN PHILIPPBAUMER ULF-STEFFEN
    • C23C14/00B01J37/02C23C14/02C23C14/08C23C14/16C23C14/32C25B11/04
    • Substrate coating on one or more sides comprising catalytically active material producible by a method comprising material deposition under vacuum in a vacuum chamber, wherein the following steps are run through: (a) loading the vacuum chamber with at least one substrate, (b) closing and evacuating the vacuum chamber, (c) substrate cleaning by introducing a gaseous reducing agent into the vacuum chamber, (d) removing the gaseous reducing agent, (e) applying an intermediate layer by means of vacuum arc evaporation, wherein a substrate comprising the same or similar material is introduced into the vacuum chamber, (f) setting the vacuum chamber to a temperature of 150°C to 400°C, (g) applying a coating by means of vacuum arc evaporation, wherein at least one metal taken from the group ruthenium, iridium, titanium and mixtures thereof is introduced into the vacuum chamber, and oxygen is supplied over the entire coating time, (h) in a last step the vacuum chamber is flooded again and the coated substrate is removed from the chamber, wherein the abovementioned steps and transitions from one step to the respective next step are carried out in the vacuum at different pressures, if appropriate, which are set by means of a protective gas, characterized in that at least 99% of the substrate coating on one or more sides is kept free of constituents originally contained in the substrate itself, wherein at least 99% of the coating applied on the intermediate layer is kept free of non-oxidized metals.