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    • 1. 发明申请
    • POSITIONER DEVICE
    • 定位装置
    • WO2005081330A2
    • 2005-09-01
    • PCT/GB2005/000320
    • 2005-01-31
    • THORLABS, INC.DIXON, Michael, JohnHERBERT, Terence, James
    • DIXON, Michael, JohnHERBERT, Terence, James
    • H01L41/09
    • H02N2/028B41J25/001G12B5/00H02N2/043Y10T74/18992Y10T74/20348Y10T74/20582
    • A positioner (2) for moving a sample platform (6) relative to a base (4) is described. The positioner is driven by a piezoelectric arranged to expand and contract along a drive axis, the piezoelectric element has an input end coupled to the base and an output end coupled to first (14) and second (16) output levers extending away from the drive axis of the piezoelectric element in opposing directions. The output levers each have an inner arm arranged to be acted on by the piezoelectric element as it expands and an outer arm to which the sample platform is mounted via platform supports (26, 28). The output levers are mounted such that the piezoelectric element acts on the inner arms of the output levers to cause the outer arms to move in a plane containing the drive axis. This motion of the output levers is communicated via the platform supports to the sample platform, so moving it relative to the base along a direction parallel to the drive axis.
    • 描述了用于相对于基座(4)移动样品平台(6)的定位器(2)。 定位器由布置成沿着驱动轴线膨胀和收缩的压电体驱动,压电元件具有联接到基座的输入端和耦合到远离驱动器的第一(14)和第二(16)输出杆的输出端 压电元件的轴向相反。 输出杆各自具有布置成在压电元件膨胀时被作用在其上的内臂和通过平台支撑件(26,28)安装样品平台的外臂。 输出杆被安装成使得压电元件作用在输出杆的内臂上,以使外臂在包含驱动轴的平面内移动。 输出杆的这种运动通过平台支撑件传送到样品平台,从而沿平行于驱动轴的方向相对于底座移动。
    • 2. 发明申请
    • PIEZOELECTRIC POSITIONER
    • 压电式定位器
    • WO2005067072A1
    • 2005-07-21
    • PCT/GB2005/000037
    • 2005-01-07
    • THORLABS, INC.DIXON, Michael, JohnDHESE, Keith, Allen
    • DIXON, Michael, JohnDHESE, Keith, Allen
    • H01L41/09
    • H02N2/028H02N2/023
    • A multi-axis piezoelectric positioner (16, 36, 56, 116) is described. The positioner comprises a fixed part (20, 60, 120) which may be moved relative to a moveable part (22, 62, 122) in a plane. The moveable part comprises a piezoelectric device (24, 64A-D; 66A-D, 124), which is arranged so that it may expand and contract within the plane. The moveable part may be selectively clamped in position relative to the fixed part at first, second and third locations by corresponding first, second and third releasable clamp mechanisms (28A-C, 34A-C, 63A-D, 128A-C). The moveable part may thus be moved in the plane relative by the fixed part by selected activation of ones of the releasable clamp mechanisms while the piezoelectric device is expanded or contracted. This provides for a parallel-mechanism multi-axis piezoelectric positioner. A carrier can be provided which may be positioned along a direction perpendicular to the plane to provide for a three-axis positioner.
    • 描述了多轴压电定位器(16,36,56,116)。 定位器包括固定部分(20,60,120),该固定部分可相对于平面中的可移动部分(22,62,122)移动。 可移动部件包括压电装置(24,64A-D; 66A-D,124),其布置成使得其可在平面内膨胀和收缩。 通过对应的第一,第二和第三可释放的夹紧机构(28A-C,34A-C,63A-D,128A-C),可移动部件可以在第一,第二和第三位置处相对于固定部分选择性地夹紧就位。 因此,当压电装置膨胀或收缩时,可移动部件可以通过选择的可释放的夹紧机构中的一个而被固定部件在平面内移动。 这提供了一种并联机构的多轴压电定位器。 可以提供可沿垂直于该平面的方向定位的载体,以提供三轴定位器。