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1. 发明申请

WO2013186523A1 PLASMA SOURCE APPARATUS AND METHODS FOR GENERATING CHARGED PARTICLE BEAMS 审中-公开
标题翻译：等离子体源装置和产生充电颗粒的方法
公开(公告)号：WO2013186523A1
公开(公告)日：2013-12-19
申请号：PCT/GB2013/051296
申请日：2013-05-20
申请人： THE WELDING INSTITUTE
发明人： RIBTON, Colin , SANDERSON, Allan
IPC分类号： H01J27/16 , H01J37/077
CPC分类号： H01J37/077 , H01J27/18 , H01J37/3002 , H01J2237/061 , H01J2237/063 , H01J2237/0817 , H01J2237/083 , H01J2237/31 , H01J2237/3104
摘要： A plasma source apparatus for generating a beam of charged particles is disclosed. The apparatus comprises: a plasma chamber provided with an inlet for the ingress of gas and an aperture for the extraction of charged particles from the plasma chamber;a radio frequency (RF) plasma generation unit for generating a plasma inside the plasma chamber, the radio frequency plasma generation unit comprising first and second resonant circuits each tuned to resonate at substantially the same resonant frequency, the first resonant circuit comprising a first antenna and a first, RF power source adapted to drive the first resonant circuit at substantially its resonant frequency, and the second resonant circuit comprising a second antenna, whereby in use an RF signal is induced in the second antenna by the first resonant circuit due to resonant coupling, the second resonant circuit being configured to apply the induced RF signal to the plasma chamber to generate a plasma therein; and a particle accelerating unit for extracting charged particles from the plasma and accelerating the charged particles to form a beam, the particle accelerating unit comprising a second power source configured to apply potential between the plasma chamber and an accelerating electrode, the region between the plasma chamber and the accelerating electrode constituting an acceleration column. The second power source is adapted to output a high voltage relative to that output by the first, RF power source.
摘要翻译：公开了一种用于产生带电粒子束的等离子体源装置。该装置包括：等离子体室，其设置有用于进入气体的入口和用于从等离子体室抽出带电粒子的孔;用于在等离子体室内产生等离子体的射频（RF）等离子体产生单元，所述第一谐振电路包括第一和第二谐振电路，所述第一和第二谐振电路被调谐以基本相同的谐振频率谐振，所述第一谐振电路包括第一天线和第一RF功率源，所述第一和第二谐振电路适于基本上以其谐振频率驱动所述第一谐振电路，所述第二谐振电路包括第二天线，由此在使用中由于谐振耦合由所述第一谐振电路在所述第二天线中感应RF信号，所述第二谐振电路被配置为将所述感应RF信号施加到所述等离子体室，以产生等离子体; 以及粒子加速单元，用于从所述等离子体中提取带电粒子并加速所述带电粒子以形成束，所述粒子加速单元包括构造成在所述等离子体室与加速电极之间施加电位的第二电源，所述等离子体室加速电极构成加速度列。第二电源适于通过第一RF电源输出相对于该输出的高电压。

2. 发明授权

EP2862196B1 PLASMA SOURCE APPARATUS AND METHODS FOR GENERATING CHARGED PARTICLE BEAMS 有权
标题翻译：等离子体源装置及其制造方法带电粒子束
公开(公告)号：EP2862196B1
公开(公告)日：2016-08-10
申请号：EP13723940.6
申请日：2013-05-20
申请人： The Welding Institute
发明人： RIBTON, Colin , SANDERSON, Allan
IPC分类号： H01J27/18 , H01J37/077 , H01J37/30
CPC分类号： H01J37/077 , H01J27/18 , H01J37/3002 , H01J2237/061 , H01J2237/063 , H01J2237/0817 , H01J2237/083 , H01J2237/31 , H01J2237/3104

3. 发明公开

EP2862196A1 PLASMA SOURCE APPARATUS AND METHODS FOR GENERATING CHARGED PARTICLE BEAMS 有权
标题翻译：等离子体源装置及其制造方法带电粒子束
公开(公告)号：EP2862196A1
公开(公告)日：2015-04-22
申请号：EP13723940.6
申请日：2013-05-20
申请人： The Welding Institute
发明人： RIBTON, Colin , SANDERSON, Allan
IPC分类号： H01J27/16 , H01J37/077
CPC分类号： H01J37/077 , H01J27/18 , H01J37/3002 , H01J2237/061 , H01J2237/063 , H01J2237/0817 , H01J2237/083 , H01J2237/31 , H01J2237/3104
摘要： A plasma source apparatus for generating a beam of charged particles is disclosed. The apparatus comprises: a plasma chamber provided with an inlet for the ingress of gas and an aperture for the extraction of charged particles from the plasma chamber;a radio frequency (RF) plasma generation unit for generating a plasma inside the plasma chamber, the radio frequency plasma generation unit comprising first and second resonant circuits each tuned to resonate at substantially the same resonant frequency, the first resonant circuit comprising a first antenna and a first, RF power source adapted to drive the first resonant circuit at substantially its resonant frequency, and the second resonant circuit comprising a second antenna, whereby in use an RF signal is induced in the second antenna by the first resonant circuit due to resonant coupling, the second resonant circuit being configured to apply the induced RF signal to the plasma chamber to generate a plasma therein; and a particle accelerating unit for extracting charged particles from the plasma and accelerating the charged particles to form a beam, the particle accelerating unit comprising a second power source configured to apply potential between the plasma chamber and an accelerating electrode, the region between the plasma chamber and the accelerating electrode constituting an acceleration column. The second power source is adapted to output a high voltage relative to that output by the first, RF power source.

4. 发明授权

EP1018137B1 CHARGED PARTICLE BEAM EMITTING ASSEMBLY 有权
标题翻译： DEVICE FOR放出带电POND RAY
公开(公告)号：EP1018137B1
公开(公告)日：2005-06-22
申请号：EP98944099.5
申请日：1998-09-24
申请人： THE WELDING INSTITUTE
发明人： SANDERSON, Allan
IPC分类号： H01J37/063 , H01J37/065 , H01J37/075 , H01J37/301
CPC分类号： H01J37/075 , H01J37/063 , H01J37/065 , H01J37/301 , H01J2237/3104
摘要： A charged particle emitting assembly comprises an emitter member (5) for emitting charged particles of one polarity. A tubular shield electrode (6) circumferentially surrounds the emitter member and is held in use at the same polarity as the charged particles. A tubular accelerating electrode (7) is positioned substantially coaxially with the shield electrode (6) and is held in use at the opposite polarity to the shield electrode. The arrangement is such that charged particles from the emitter member (5) initially spread laterally outwardly and then are focused into a beam which passes through the tubular accelerating electrode (7).

5. 发明公开

EP1018137A2 CHARGED PARTICLE BEAM EMITTING ASSEMBLY 有权
标题翻译：带电粒子发射组件
公开(公告)号：EP1018137A2
公开(公告)日：2000-07-12
申请号：EP98944099.5
申请日：1998-09-24
申请人： THE WELDING INSTITUTE
发明人： SANDERSON, Allan
IPC分类号： H01J37/063 , H01J37/065 , H01J37/075 , H01J37/301
CPC分类号： H01J37/075 , H01J37/063 , H01J37/065 , H01J37/301 , H01J2237/3104
摘要： A charged particle emitting assembly comprises an emitter member (5) for emitting charged particles of one polarity. A tubular shield electrode (6) circumferentially surrounds the emitter member and is held in use at the same polarity as the charged particles. A tubular accelerating electrode (7) is positioned substantially coaxially with the shield electrode (6) and is held in use at the opposite polarity to the shield electrode. The arrangement is such that charged particles from the emitter member (5) initially spread laterally outwardly and then are focused into a beam which passes through the tubular accelerating electrode (7).
摘要翻译：带电粒子发射组件包括用于发射一种极性的带电粒子的发射器部件（5）。管状屏蔽电极（6）周向地围绕发射体构件并且以与带电粒子相同的极性被保持在使用中。管状加速电极（7）基本上与屏蔽电极（6）同轴地定位，并以与屏蔽电极相反的极性保持使用。该布置使得来自发射器部件（5）的带电粒子首先横向向外扩散，然后聚焦成穿过管状加速电极（7）的光束。

6. 发明授权

EP0627121B1 CHARGED PARTICLE GENERATION 有权
标题翻译：生产带电粒子
公开(公告)号：EP0627121B1
公开(公告)日：1998-04-22
申请号：EP94900227.3
申请日：1993-11-19
申请人： THE WELDING INSTITUTE
发明人： SANDERSON, Allan
IPC分类号： H01J37/24 , H02H9/02
CPC分类号： H01J37/243 , H01J2237/2485 , H01J2237/3104 , H02H9/028
摘要： Apparatus for generating a stream of charged particles, for example for use in an electron beam welding device. The apparatus includes a charged particle source (5) such as a filament and a target (6). The charged particle source (5) is connected in series with a resonant electrical circuit and the target is connected in parallel with the circuit. The source and target (5, 6) are relatively juxtaposed such that under working conditions, when the circuit is in resonance, electric current passing through the source (5) causes emission of first charged particles and the potential difference between the source (5) and the target (6) accelerates the first charged particles towards the target.

7. 发明公开

EP0627121A1 CHARGED PARTICLE GENERATION 有权
标题翻译：生产带电粒子研究。
公开(公告)号：EP0627121A1
公开(公告)日：1994-12-07
申请号：EP94900227.0
申请日：1993-11-19
申请人： THE WELDING INSTITUTE
发明人： SANDERSON, Allan
IPC分类号： G21K5 , H01J37 , H02H9 , H05H5
CPC分类号： H01J37/243 , H01J2237/2485 , H01J2237/3104 , H02H9/028
摘要： L'invention concerne un appareil destiné à générer un flux de particules chargées, par exemple destinées à un dispositif de soudage par faisceau d'électrons. L'appareil comprend une source (5) de particules chargées, par exemple un filament, et une cible (6). La source (5) de particules chargées est connectée en série à un circuit électrique résonnant et la cible est connectée, en parallèle, au circuit. La source et la cible (5, 6) sont juxtaposées de manière qu'en cours de fonctionnement, lorsque le circuit est en état de résonnance, un courant électrique traversant la source (5) provoque l'émission des particules préalablement chargées et la différence de potentiel entre la source (5) et la cible (6) accélère les particules préalablement chargées vers la cible.

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