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1. 发明申请

WO2006055003A1 SYSTEMS AND METHODS FOR CREATING CRYSTALLOGRAPHIC-ORIENTATION CONTROLLED POLY-SILICON FILMS 审中-公开
标题翻译：用于创建晶体取向控制的聚硅膜的系统和方法
公开(公告)号：WO2006055003A1
公开(公告)日：2006-05-26
申请号：PCT/US2004/039055
申请日：2004-11-18
申请人： THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OFNEW YORK , IM, James, S. , VAN DER WILT, Paul, Christian
发明人： IM, James, S. , VAN DER WILT, Paul, Christian
IPC分类号： H01L21/20 , B23K26/00
CPC分类号： H01L21/02609 , B23K26/0622 , B23K26/066 , C30B13/24 , H01L21/02595 , H01L21/02678 , H01L21/02686 , H01L21/2026
摘要： In accordance with one aspect, the present invention provides a method for providing polycrystalline films having a controlled microstructure as well as a crystallographic texture. The methods provide elongated grains or single-crystal islands of a specified crystallographic orientation. In particular, a method of processing a film on a substrate includes generating a textured film having crystal grains oriented predominantly in one preferred crystallographic orientation; and then generating a microstructure using sequential lateral solidification crystallization that provides a location-controlled growth of the grains orientated in the preferred crystallographic orientation.
摘要翻译：根据一个方面，本发明提供了一种用于提供具有受控微结构以及结晶织构的多晶膜的方法。该方法提供具有特定结晶取向的细长晶粒或单晶岛。特别地，在衬底上处理膜的方法包括产生具有主要以一个优选结晶方向取向的晶粒的织构化膜; 然后使用顺序横向固化结晶产生微结构，其提供以优选结晶取向定向的晶粒的位置控制生长。

2. 发明申请

WO2005034193A2 SINGLE SCAN IRRADIATION FOR CRYSTALLIZATION OF THIN FILMS 审中-公开
标题翻译：单片扫描用于薄膜的结晶化
公开(公告)号：WO2005034193A2
公开(公告)日：2005-04-14
申请号：PCT/US2004/030801
申请日：2004-09-17
申请人： THE TRUSTEES OF COLUMBIA UNIVERSITY IN THE CITY OFNEW YORK , IM, James, S. , VAN DER WILT, Paul, Christian
发明人： IM, James, S. , VAN DER WILT, Paul, Christian
IPC分类号： H01L
CPC分类号： C30B35/00 , B23K26/066 , C30B13/24 , C30B28/08 , G03F7/70041 , G03F7/70725 , Y10S117/90 , Y10T117/10 , Y10T117/1008
摘要： A method of processing a polycrystalline film on a substrate includes generating a plurality of laser beam pulses, positioning the film on a support capable of movement in at least one direction, directing the plurality of laser beam pulses through a mask to generate patterned laser beams; each of said beams having a length l’ , a width w’ and a spacing between adjacent beams d’ , irradiating a region of the film with the patterned beams, said beams having an intensity that is sufficient to melt an irradiated portion of the film to induce crystallization of the irradiated portion of the film, wherein the film region is irradiated n times; and after irradiation of each film portion, translating either the film or the mask, or both, a distance in the x- and y-directions, where the distance of translation in the y-direction is in the range of about l’/n-δ , where δ is a value selected to form overlapping the beamlets from the one irradiation step to the next, and where the distance of translation in the x-direction is selected such that the film is moved a distance of about λ’ after n irradiations, where λ’ = w’ + d’ .
摘要翻译：在衬底上处理多晶膜的方法包括产生多个激光束脉冲，将膜定位在能够在至少一个方向上移动的支撑件上，将多个激光束脉冲引导通过掩模以产生图案化的激光束; 每个所述光束具有长度l'，宽度w'和相邻光束d'之间的间隔，用图案化的光束照射膜的区域，所述光束具有足以熔化膜的照射部分的强度以引起膜的照射部分的结晶，其中膜区域被照射n次; 并且在每个胶片部分照射之后，将胶片或掩模或两者均匀地移动在x方向和y方向上的距离，其中在y方向上的平移距离在约1'/ n -delta，其中delta是被选择以形成从一个照射步骤到下一个照射步骤的子束重叠的值，并且其中在x方向上的平移距离被选择为使得膜在n之后移动大约λ'的距离辐射，其中λ'= w'+ d'。

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