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    • 3. 发明公开
    • Recovery of noble gases
    • 惰性气体的回收
    • EP0826629A2
    • 1998-03-04
    • EP97305948.8
    • 1997-08-05
    • THE BOC GROUP, INC.
    • Jain, RaviWhitlock, Walter H.
    • C01B23/00B01D53/00B01D53/02B01D53/22
    • C01B23/0094B01D53/00B01D2257/11C01B2210/0001C01B2210/001C01B2210/0015C01B2210/0029C01B2210/0032
    • A noble gas selected from xenon, neon, krypton or mixtures of these is recovered from a process chamber (A) by purging the chamber with one of several gases and then separating the noble gas from the purge gas by one of several techniques. The separated noble gas is further purified to remove trace impurities and is then recycled for reuse in the process chamber (A). The purge gas may be recycled or disposed of, depending upon the particular purge gas used and its purity. In a specific embodiment, hydrogen is used as the purge gas and it is separated from the noble gas by high temperature membrane separation using a palladium membrane (26). The hydrogen, obtained in high purity, and the noble gas are each recycled for reuse in the process chamber (A).
    • 选自氙,氖,氪或它们的混合物的惰性气体是通过用几种气体之一吹扫室从处理室(A)中回收的,然后通过几种技术之一从吹扫气体中分离惰性气体。 分离的惰性气体被进一步净化以除去微量杂质,然后再循环用于处理室(A)中。 取决于所使用的特定吹扫气体及其纯度,吹扫气体可被再循环或处置。 在具体的实施方案中,使用氢气作为吹扫气体,并通过使用钯膜(26)的高温膜分离将其与惰性气体分离。 以高纯度获得的氢气和稀有气体各自循环再用于处理室(A)中。