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    • 3. 发明申请
    • FABRICATION METHOD OF SIZE-CONTROLLED, SPATIALLY DISTRIBUTED NANOSTRUCTURES BY ATOMIC LAYER DEPOSITION
    • 原子层沉积制备尺寸可控,空间分布的纳米结构的方法
    • WO2008136882A2
    • 2008-11-13
    • PCT/US2008/002105
    • 2008-02-14
    • THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITYHONDA MOTOR CO., LTDBENT, Stacey, F.CHEN, RongJIANG, XirongSAITO, Yuji
    • BENT, Stacey, F.CHEN, RongJIANG, XirongSAITO, Yuji
    • H01L29/02H01L29/06
    • C23C16/04C23C16/45525
    • A method of growing spatially-separated and size-controlled particles on substrate surfaces is provided. The method utilizes chemical modification of the substrate surface, an atomic layer deposition (ALD) system, providing a modified layer to the substrate surface and providing an ALD material for nanoparticle deposition. The method induces a Volmer-Weber growth method, where islands of the nanoparticles are formed on the surface. The modified layer controls a number of nucleation sites on the surface, where controlling the number of ALD cycles limits an amount of deposited the material for discrete the nanoparticles. The modified layer can include self-assembled monolayers, modified hydrophobicity of the surface, H-terminated surfaces, and varying functional groups within the modified layer, where thermally attached alkenes, photochemically attached alkenes, thermally attached alkynes or photochemically attached alkynes are attached to the H-terminated surfaces, and the density of the nucleation sites of the nanoparticles are thereby managed.
    • 提供了在衬底表面上生长空间分离和尺寸控制的颗粒的方法。 该方法利用衬底表面的化学改性,原子层沉积(ALD)系统,向衬底表面提供改性层并提供用于纳米颗粒沉积的ALD材料。 该方法诱导Volmer-Weber生长方法,其中纳米颗粒的岛在表面上形成。 改性层控制表面上的许多成核位点,其中控制ALD循环次数限制了用于离散纳米颗粒的材料的沉积量。 改性层可以包括自组装单层,表面的改性疏水性,H-封端表面和改性层内的不同官能团,其中热连接的烯烃,光化学连接的烯烃,热连接的炔烃或光化学连接的炔烃连接到 H-终止的表面,以及纳米颗粒的成核位点的密度由此被管理。