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1. 发明申请

US20120180983A1 CLUSTER TOOL ARCHITECTURE FOR PROCESSING A SUBSTRATE 审中-公开
标题翻译：用于处理基板的集群工具架构
公开(公告)号：US20120180983A1
公开(公告)日：2012-07-19
申请号：US13411120
申请日：2012-03-02
申请人： TETSUYA ISHIKAWA , RICK J. ROBERTS , HELEN R. ARMER , LEON VOLFOVSKI , JAY D. PINSON , MICHAEL RICE , DAVID H. QUACH , MOHSEN S. SALEK , ROBERT LOWRANCE , JOHN A. BACKER , WILLIAM TYLER WEAVER , CHARLES CARLSON , CHONGYANG WANG , JEFFREY HUDGENS , HARALD HERCHEN , BRIAN LUE
发明人： TETSUYA ISHIKAWA , RICK J. ROBERTS , HELEN R. ARMER , LEON VOLFOVSKI , JAY D. PINSON , MICHAEL RICE , DAVID H. QUACH , MOHSEN S. SALEK , ROBERT LOWRANCE , JOHN A. BACKER , WILLIAM TYLER WEAVER , CHARLES CARLSON , CHONGYANG WANG , JEFFREY HUDGENS , HARALD HERCHEN , BRIAN LUE
IPC分类号： H01L21/324 , H01L21/477 , F25B29/00 , B25J11/00 , H01L21/677
CPC分类号： H01L21/67225 , G03B27/32 , G03D13/006 , G03F7/40 , G05B19/41825 , G05B2219/40476 , G05B2219/45031 , G05B2219/49137 , H01L21/67109 , H01L21/6715 , H01L21/67161 , H01L21/67173 , H01L21/67178 , H01L21/67184 , H01L21/6719 , H01L21/67196 , H01L21/67742 , H01L21/67745 , H01L21/67748 , H01L21/67754 , H01L21/6831 , H01L21/6838 , H01L21/68707 , H01L22/26 , Y02P90/087 , Y10S414/135 , Y10S414/136 , Y10T29/53187 , Y10T29/5323
摘要： The present invention generally provides a cluster tool for processing a substrate. In one embodiment, the cluster tool comprises at least one processing rack, which comprises a first plurality of substrate processing chambers that are positioned adjacent to each other and aligned in a first direction, a second plurality of substrate processing chambers that are positioned adjacent to each other and adjacent to at least one of the first plurality of substrate processing chambers, the second plurality of substrate processing chambers being positioned in a second direction relative to the first direction, a first shuttle robot movable in the first direction for moving substrates between each of the first plurality of substrate processing chambers, and a second shuttle robot movable in the second direction for moving substrates between each of the second plurality of substrate processing chambers.
摘要翻译：本发明通常提供一种用于处理衬底的簇工具。在一个实施例中，集群工具包括至少一个处理架，其包括彼此相邻并且沿第一方向排列的第一多个基板处理室，与第二多个基板处理室相邻定位的第二多个基板处理室第二多个基板处理室相对于第一方向位于第二方向上，第一梭形机器人可在第一方向上移动，以在每个基板处理室中的每一个之间移动基板第一多个基板处理室，以及可沿第二方向移动的第二梭形机器人，用于在每个第二多个基板处理室之间移动基板。

2. 发明申请

US20080071417A1 METHODS AND APPARATUS FOR LOADING AND UNLOADING SUBSTRATE CARRIERS ON MOVING CONVEYORS USING FEEDBACK 有权
标题翻译：使用反馈装载和卸载移动式输送机的基板载体的方法和装置
公开(公告)号：US20080071417A1
公开(公告)日：2008-03-20
申请号：US11867584
申请日：2007-10-04
申请人： MICHAEL RICE , ERIC ENGLHARDT , JEFFREY HUDGENS , KIRK KATWYK
发明人： MICHAEL RICE , ERIC ENGLHARDT , JEFFREY HUDGENS , KIRK KATWYK
IPC分类号： G06F19/00
CPC分类号： H01L21/67775 , H01L21/67724 , H01L21/6773 , H01L21/67733 , H01L21/67736 , H01L21/67769
摘要： The present invention provides systems and methods for loading and unloading substrate carriers onto and off of a transport system. The invention includes a substrate carrier handler adapted to transfer a substrate carrier between a docking station and a transport system, the substrate carrier handler including an end effector adapted to support the substrate carrier; a controller coupled to the substrate carrier handler and operative to control the substrate carrier handler such that the end effector of the substrate carrier handler is operative to selectively engage and disengage the substrate carrier to and from the transport system while the substrate carrier is in motion; and a sensor coupled to the controller and operative to provide a signal to the controller indicative of information about the substrate carrier. The controller is operative to adjust operation of the substrate carrier handler based on the signal from the sensor if the adjustment may be performed within a load or unload stroke of the substrate carrier handler. Numerous other aspects are provided.
摘要翻译：本发明提供了用于将基板载体装载和卸载到运输系统上的系统和方法。本发明包括适于在对接站和传输系统之间传送衬底载体的衬底载体处理器，衬底载体处理器包括适于支撑衬底载体的端部执行器; 控制器，其耦合到所述衬底载体处理器并且可操作以控制所述衬底载体处理器，使得所述衬底载体处理器的末端执行器可操作以在所述衬底载体运动时选择性地将所述衬底载体接合和脱离所述传输系统; 以及耦合到所述控制器并且可操作地向控制器提供指示关于衬底载体的信息的信号的传感器。如果可以在衬底载体处理器的负载或卸载冲程中执行调整，则控制器可操作以基于来自传感器的信号来调整衬底载体处理器的操作。提供了许多其他方面。

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