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1. 发明申请

WO2010030179A1 LASER INTERFEROMETER 审中-公开
标题翻译：激光干涉仪
公开(公告)号：WO2010030179A1
公开(公告)日：2010-03-18
申请号：PCT/NL2009/050541
申请日：2009-09-09
申请人： TECHNISCHE UNIVERSITEIT DELFT , JOO, Ki-Nam , ELLIS, Jonathan, David , SPRONCK, Josephus, Wilhelmus
发明人： JOO, Ki-Nam , ELLIS, Jonathan, David , SPRONCK, Josephus, Wilhelmus
IPC分类号： G01B9/02 , G01B11/02
CPC分类号： G01B9/02007 , G01B9/02003 , G01B9/02027 , G01B11/026 , G01B2290/15 , G01B2290/45 , G01B2290/70
摘要： Laser interferometer comprising a laser light source providing at least one light beam at two distinct frequencies, a beam splitter for splitting the at least one light beam into reference and measurement beams, a first reflector and a second reflector for reflection of the reference and measurement beams, and at least one detector for detection of the interference signal pertaining to the reflected reference and measurement beams. The laser light source provides first and second light beams that are spatially separated and the first light beam has a first of said two distinct frequencies and the second light beam has a second of said distinct frequencies. Further the beam splitter splits the first and second light beams into first and second spatially separated reference beams travelling to the first reflector, and into first and second spatially separated measurement beams travelling to the second reflector. One of the first and second reflectors is arranged to cause that the reflected first measurement beam shares at least part of a travelling path with the second reflected reference beam and that the reflected second measurement beam shares at least part of a travelling path with the first reflected reference beam.
摘要翻译：激光干涉仪，其包括以两个不同频率提供至少一个光束的激光源，用于将所述至少一个光束分成参考和测量光束的分束器，用于反射参考和测量光束的第一反射器和第二反射器以及至少一个检测器，用于检测与反射的参考和测量光束有关的干扰信号。所述激光源提供在空间上分离的第一和第二光束，并且所述第一光束具有所述两个不同频率中的第一光束，并且所述第二光束具有所述不同频率的第二光束。此外，分束器将第一和第二光束分裂成第一和第二空间上分离的参考光束传播到第一反射器，并且分离成第一和第二空间分离的测量光束传播到第二反射器。第一和第二反射器之一被布置成使得反射的第一测量光束与第二反射参考光束共享至少部分行进路径，并且反射的第二测量光束与至少部分行进路径共享，其中第一反射参考光束。

2. 发明申请

WO2010024664A8 ACTUATOR AND METHOD FOR POSITIONING AN OBJECT 审中-公开
公开(公告)号：WO2010024664A8
公开(公告)日：2010-03-04
申请号：PCT/NL2009/000165
申请日：2009-08-26
申请人： TECHNISCHE UNIVERSITEIT DELFT , TECHNOLOGIESTICHTING STW , VAN SCHIEVEEN, Jeroen, Paul , SPRONCK, Josephus, Wilhelmus
发明人： VAN SCHIEVEEN, Jeroen, Paul , SPRONCK, Josephus, Wilhelmus
IPC分类号： B23Q1/34 , B81B3/00 , F03G7/06 , G02B26/08
摘要： The invention relates to an actuator for positioning an object in a first direction of movement, comprising a base, at least three positioning members, wherein each of the at least three positioning members has a contact surface which is configured to bear against the object under prestress, and a control device to drive the at least three positioning members in friction drive mode. In addition, the actuator comprises at least one heating device which is connected to the control device, in which the at least one heating device is configured to heat the at least three positioning members, and prestressing means to provide the prestress with which the contact surfaces of the at least three positioning members bear against the object, in which the at least three positioning members are of elongate design and are connected by one end to the base, and in which the contact surface is situated near the other end of the at least three positioning members, and in which the at least three positioning members are made from a material which expands under the effect of heat.

3. 发明授权

EP1015788B1 MAGNETIC SUPPORT SYSTEM 有权
标题翻译：磁性支撑系统
公开(公告)号：EP1015788B1
公开(公告)日：2002-06-05
申请号：EP98944354.4
申请日：1998-09-25
申请人： TECHNISCHE UNIVERSITEIT DELFT
发明人： NIJSSE, Gerard, Johannes, Pieter , SPRONCK, Josephus, Wilhelmus
IPC分类号： F16F6/00 , F16F15/03 , F16C39/06 , G01D11/14
CPC分类号： A47C31/003 , F16C39/063 , F16F6/005 , F16F15/03 , G01D11/14

4. 发明公开

EP1015788A1 MAGNETIC SUPPORT SYSTEM 有权
标题翻译：磁性支撑系统
公开(公告)号：EP1015788A1
公开(公告)日：2000-07-05
申请号：EP98944354.4
申请日：1998-09-25
申请人： TECHNISCHE UNIVERSITEIT DELFT
发明人： NIJSSE, Gerard, Johannes, Pieter , SPRONCK, Josephus, Wilhelmus
IPC分类号： F16F6/00 , F16F15/03 , F16C39/06 , G01D11/14
CPC分类号： A47C31/003 , F16C39/063 , F16F6/005 , F16F15/03 , G01D11/14
摘要： There is described a support system enabling supporting an object such as a platform (1) free from vibration, in that bearing elements (50) have a stiffness (k) which at a working point (z0) equals zero. A bearing element (50) comprises two magnetic couplings (51, 52) provided by permanent magnets (61, 63). One coupling (51) has a positive stiffness (k51), and the other coupling has a negative stiffness (k52); in the working point, the absolute values of those stiffnesses are equally great. Alternatively, electrostatic couplings are used.

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