会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 8. 发明公开
    • Production method of electronic parts and water treatment apparatus
    • 一种用于生产电子组件的装置和用于处理水的过程
    • EP0959491A2
    • 1999-11-24
    • EP99303881.9
    • 1999-05-19
    • TDK Corporation
    • Gotoh, MasashiKanazawa, JitsuoYamamoto, Syuichiro
    • H01L21/00
    • C01B5/00C02F1/20C02F2103/12Y10S134/902
    • A production method of an electronic part comprising a step of working a substrate having formed thereon a metal thin-film conductor using water, wherein said water satisfies the relations 3.5 ≤ pH ≤ 6.5 and DO ≤ 0.5pH 2 - 6.5pH + 22 [wherein DO represents a dissolved oxygen amount (unit ppm)].
      By using the water in the case of working substrates in the production steps of electronic parts, the generations of the static electricity and the oxidation caused by water used for working are restrained. The present invention is particularly effective in working of an electronic part wherein a metal thin-film conductor containing at least two kinds of metals including Al on a substrate having a pyroelectric property.
    • 一种电子部件,包括一工作衬底的步骤的制造方法,具有在其上使用水的​​金属薄膜导体制成,worin所述水SATIS外资企业关系3.5≤pH值≤6.5和DO≤0.5pH <2> - 6.5pH + 22 a其中DO darstellt溶解氧量(单位:ppm)Ü。 通过在电子部件的制造工序的工作基材的情况下,使用水,用于工作被约束到的静电通过水引发的世代和氧化。 本发明是在电子部件worin含有至少两种金属包含Al上具有热电特性的基片的金属薄膜导体的工作特别有效。