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    • 5. 发明专利
    • TABLE POSITION MEASURING APPARATUS
    • JPH08152304A
    • 1996-06-11
    • JP29531194
    • 1994-11-29
    • TAKENAKA KOMUTEN CO
    • YAMAZAKI KEITAUNNO KENICHISUGANO SHUNSUKEKURATA ISAO
    • G01B11/00G01B21/00
    • PURPOSE: To measure the position of a table correctly by securing a supporting member to a table movable along a guide member, securing a scale provided with graduations along the moving direction of the table to the guide member, and reading out the graduation through an optical fiber secured to the supporting member. CONSTITUTION: A table 21 is mounted on a guide member 27 so that it can be moved freely by means of a cylinder 31. A supporting member 33 is secured to an end of the table 21 and a fixing plate 37, being fixed with a scale 41, is secured to the flange part 27a of the member 27. The member 33 is provided, at the opposing positions of the scale 41, with optical fibers 45, 47 for reading out the graduation. A fixing member 49 mounting a case 55 for light projecting/ receiving optical fibers 57, 59 is secured to an end part of at the flange part 27b of the member 27. A graduation signal is delivered on the optical fibers 45, 47 to an information processing means 61 where the signal is converted into an electric signal for determining the moving direction and position of the table 21. The fibers 57, 59 detect positioning of the table 21 at the end part and stops the movement.
    • 6. 发明专利
    • TABLE DRIVING DEVICE
    • JPH08152005A
    • 1996-06-11
    • JP29531094
    • 1994-11-29
    • TAKENAKA KOMUTEN CO
    • YAMAZAKI KEITAUNNO KENICHIABE TAKAYUKIKURATA ISAO
    • F15B15/14F15B11/06
    • PURPOSE: To reduce the occurrence of knocking by a method wherein during operation of a rodless cylinder, a pressure fed to the two ends of a cylinder is set to a positive pressure and a given pressure difference is exerted. CONSTITUTION: When a table 21 is moved in the direction of an arrow mark B, a direction switching valve 33 is switched. Working gas the pressure of which is reduced to, for example, 0.55kgf/cm by means of a first pressure adjusting valve 45 is fed to the connection part 55b on the other side of a rodless cylinder 27 through a direction switching valve 33 and a second flow rate regulating valve 37. Further, working gas the pressure of which is reduced to, for example, 5kgf/cm by means of a second pressure regulating valve 47 is fed to a connection part 55a on one side of the rodless cylinder 27 through the direction switching valve 33 and a first flow rate adjusting valve 35. This constitution moves pistons 57a and 57b on one side and on the other side in the direction of an arrow mark B in such a state that a given back pressure is exerted on the piston 57b on the other side and moves a yoke 63 along with the movement of the pistons 57a and 57b, and moves the table 21.