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    • 4. 发明授权
    • Apparatus for producing water containing dissolved ozone
    • 用于生产含有溶解臭氧的水的装置
    • US06464867B1
    • 2002-10-15
    • US09958890
    • 2001-10-12
    • Hiroshi MoritaOsamu OtaTetsuo MizuniwaKazumi Tsukamoto
    • Hiroshi MoritaOsamu OtaTetsuo MizuniwaKazumi Tsukamoto
    • C02F178
    • C02F1/78B01F3/04099B01F3/04985B01F2003/04886C01B13/10C02F1/32C02F1/44C02F1/68C02F1/725C02F2103/04C02F2103/12C02F2201/782Y10S210/90
    • An apparatus for producing water containing dissolved ozone which comprises (A) a piping for supplying ultrapure water through which ultrapure water is supplied, (B) a catalytic reaction portion which is connected with the piping for supplying ultrapure water and in which the ultrapure water is brought into contact with an oxidation-reduction catalyst, (C) a filtration apparatus by which the ultrapure water treated in the catalytic reaction portion is filtered and (D) an apparatus for dissolving ozone in which ozone is dissolved into the ultrapure water discharged from the filtration apparatus; and an apparatus for producing water containing dissolved ozone which comprises an apparatus for producing ultrapure water which is equipped with an apparatus for irradiating with ultraviolet light, an apparatus for dissolving ozone in which ozone is dissolved into the ultrapure water produced in the apparatus for producing ultrapure water and a catalytic reaction portion which is packed with an oxidation-reduction catalyst and disposed between the apparatus for irradiating with ultraviolet light and the apparatus for dissolving ozone. Substances promoting decomposition of ozone which are contained in ultrapure water in very small amounts are removed and water containing dissolved ozone which shows little decrease in the concentration of ozone and has a great residual fraction of ozone dissolved in water after transportation for a long distance can be obtained.
    • 一种含有溶解臭氧的水的制造装置,其特征在于,包括:(A)供给超纯水的超纯水的配管,(B)与供给超纯水的管道连接的催化反应部,超纯水 与氧化还原催化剂接触,(C)将在催化反应部分处理的超纯水过滤的过滤装置和(D)将臭氧溶解在臭氧中的臭氧溶解装置(D) 过滤装置; 以及含有溶解臭氧的水的制造装置,其特征在于,包括:设置有紫外线照射装置的超纯水的制造装置,将臭氧溶解在超纯水装置中生成的超纯水中的臭氧溶解装置 水和催化反应部分,其被填充有氧化还原催化剂并且设置在用于照射紫外线的装置和用于溶解臭氧的装置之间。 可以除去非常少量促进超纯水中包含的臭氧分解的物质,并且在长距离运输后,溶解臭氧浓度几乎不降低,臭氧溶解在水中的溶解臭氧的含有溶解臭氧的水可以是 获得。
    • 5. 发明申请
    • METHOD FOR CLEANING ELECTRONIC MATERIAL AND DEVICE FOR CLEANING ELECTRONIC MATERIAL
    • 用于清洁电子材料的方法和用于清洁电子材料的装置
    • US20120012134A1
    • 2012-01-19
    • US13138697
    • 2010-03-04
    • Kazumi TsukamotoHiroshi Morita
    • Kazumi TsukamotoHiroshi Morita
    • B08B3/08B08B7/00
    • G03F7/423H01L21/02057H01L21/31133
    • A resist on an electronic material is surely separated and removed in a short time. The electronic material is cleaned with a sulfuric acid solution containing persulfuric acid to separate and clean the resist, and thereafter wet cleaning is performed with gas dissolved water. By using gas dissolved water for performing wet cleaning after the resist separation with the sulfuric acid solution containing persulfuric acid, the time required for cleaning can be sharply reduced as compared with that of a former method. The sulfuric acid solution containing persulfuric acid is preferably one produced by electrolyzing a sulfuric acid solution. A sulfuric acid solution which is discharged from a resist separation and cleaning device and in which the persulfuric acid concentration has decreased is supplied to an electrolytic reactor for regeneration, and then the sulfuric acid solution, in which the persulfuric acid concentration has been sufficiently increased, is circulated to the cleaning device, whereby the resist can be efficiently separated and removed with the high-concentration persulfuric acid and the repeated use of the sulfuric acid can be achieved.
    • 电子材料上的抗蚀剂在短时间内可靠地分离和去除。 电子材料用含有硫酸的硫酸溶液进行清洗以分离和清洁抗蚀剂,然后用气体溶解的水进行湿法清洗。 在使用含有过硫酸的硫酸溶液进行抗蚀剂分离后,通过使用气体溶解水进行湿式清洗,与前一方法相比,清洗所需的时间可以大大降低。 含有过硫酸的硫酸溶液优选通过电解硫酸溶液而制备的硫酸溶液。 将从抗蚀剂分离清洗装置排出的硫酸浓度降低的硫酸溶液供给到再生用电解反应器中,然后将过硫酸浓度充分提高的硫酸溶液, 循环到清洁装置,由此可以用高浓度过硫酸有效地分离和去除抗蚀剂,并且可以重复使用硫酸。