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1. 发明授权

US08111377B2 Lithographic apparatus with an encoder arranged for defining a zero level 有权
标题翻译：具有用于定义零电平的编码器的平版印刷设备
公开(公告)号：US08111377B2
公开(公告)日：2012-02-07
申请号：US12351563
申请日：2009-01-09
申请人： Suzanne Johanna Antonetta Geertruda Cosijns , Andre Schreuder
发明人： Suzanne Johanna Antonetta Geertruda Cosijns , Andre Schreuder
IPC分类号： G03B27/42
CPC分类号： G03F7/70775
摘要： A lithographic apparatus includes a position measuring system configured to measure a position of a moveable object with respect to a reference frame of the lithographic apparatus, in at least one direction of an orthogonal x-y-z coordinate system of the moveable object. The position measuring system includes an optical x-z-encoder configured to measure a displacement of a radiation source, a first grating, and a detector with respect to a second grating of the encoder. The first grating includes an alignment marker. A controller is configured to define a zero level of the moveable object with respect to the reference frame in at least one of the x- and z-direction by performing the scanning along the first grating, the alignment marker during the scanning step causing changes in the phase of the response of both the first positive and negative orders.
摘要翻译：光刻设备包括位置测量系统，其配置成在可移动物体的正交x-y-z坐标系的至少一个方向上测量相对于光刻设备的参考系的可移动物体的位置。位置测量系统包括光学x-z编码器，其配置成相对于编码器的第二光栅测量辐射源的位移，第一光栅和检测器。第一光栅包括对准标记。控制器被配置为通过沿着第一光栅执行扫描来定义在x和z方向中的至少一个方面相对于参考帧的可移动物体的零电平，扫描步骤期间的对准标记引起变化第一个正负指令的反应阶段。

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