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    • 4. 发明授权
    • Method of manufacturing magnetic head for perpendicular magnetic recording
    • 用于垂直磁记录的磁头制造方法
    • US07219414B2
    • 2007-05-22
    • US11041266
    • 2005-01-25
    • Yuichi WatabeSusumu AokiYasuyuki NotsukeTetsuya Roppongi
    • Yuichi WatabeSusumu AokiYasuyuki NotsukeTetsuya Roppongi
    • G11B5/187C25D5/102
    • G11B5/147G11B5/1278G11B5/3116G11B5/3123G11B5/3163Y10T29/49041Y10T29/49043Y10T29/49044Y10T29/49048Y10T29/4906
    • A main pole layer of a magnetic head includes a first portion disposed at a distance from a medium facing surface, and a second portion that is smaller in thickness than the first portion and disposed between the first portion and the medium facing surface. The step of forming the main pole layer includes the steps of forming a plating layer such that one of ends of the plating layer closer to the medium facing surface is located at a position that coincides with the position of one of ends of the first portion closer to the medium facing surface; forming a first nonmagnetic layer to cover the plating layer; polishing the first nonmagnetic layer and the plating layer; forming a space by removing the plating layer; forming a magnetic layer, which will be the main pole layer, in the space and on the top surface of the first nonmagnetic layer; forming a second nonmagnetic layer to cover the magnetic layer; and polishing the second nonmagnetic layer and the magnetic layer.
    • 磁头的主极层包括设置在与介质相对表面一定距离处的第一部分,以及第二部分,该第二部分的厚度小于第一部分,并且设置在第一部分和介质面向表面之间。 形成主极层的步骤包括以下步骤:形成电镀层,使得电镀层的靠近介质相对表面的端部之一位于与第一部分的端部中的一个端部的位置相近的位置处 到面向中间的表面; 形成覆盖所述镀层的第一非磁性层; 抛光第一非磁性层和镀层; 通过去除镀层形成空间; 在第一非磁性层的空间和顶表面上形成作为主极层的磁性层; 形成第二非磁性层以覆盖所述磁性层; 并研磨第二非磁性层和磁性层。