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    • 9. 发明申请
    • Smart Table Service
    • 智能表服务
    • US20160071224A1
    • 2016-03-10
    • US14480530
    • 2014-09-08
    • Xin Huang
    • Xin Huang
    • G06Q50/12G06Q20/10G06Q20/32
    • G06Q50/12G06Q20/102G06Q20/204G06Q20/322G06Q20/3276
    • The instant application discloses, among other things, a Smart Table Service. In one embodiment, it may include ways for any entity, such as a restaurant, for example, to provide services to patrons, who may use their own devices. For instance, a restaurant may provide a linear barcode or quick response (QR) barcode, or other machine-readable symbol associated with a table, bar seat, or other location where a patron may wish to order, pay, call wait staff, or request other services. A patron at a location may scan a provided code using any device such as a smartphone, smartwatch, or intelligent eyewear, for example, and a server may receive a message indicating the location. In response to the location, the server may provide a web site or communicate with an app on the patron's device, allowing the patron to perform an action, such as ordering or paying.
    • 本应用程序尤其公开了智能表服务。 在一个实施例中,它可以包括诸如餐馆的任何实体(例如,向可以使用其自己的设备的顾客提供服务)的方式。 例如,餐厅可以提供线性条形码或快速响应(QR)条形码或与桌子,酒吧座位或顾客可能希望订购,支付,呼叫等待人员或其他地点的其他位置相关联的其他机器可读符号 请求其他服务。 例如,位置的顾客可以使用例如智能电话,智能手表或智能眼镜等任何设备来扫描提供的代码,并且服务器可以接收指示位置的消息。 响应于该位置,服务器可以提供网站或与顾客设备上的应用通信,允许顾客执行诸如订购或支付的动作。
    • 10. 发明授权
    • Method for fabricating silicon nanowire field effect transistor based on wet etching
    • 基于湿蚀刻制造硅纳米线场效应晶体管的方法
    • US09034702B2
    • 2015-05-19
    • US13511123
    • 2011-11-18
    • Ru HuangJiewen FanYujie AiShuai SunRunsheng WangJibin ZouXin Huang
    • Ru HuangJiewen FanYujie AiShuai SunRunsheng WangJibin ZouXin Huang
    • H01L21/336H01L21/8234H01L29/66H01L29/423H01L29/786
    • H01L29/66772H01L29/42392H01L29/78696
    • Disclosed herein is a method for fabricating a silicon nanowire field effect transistor based on a wet etching. The method includes defining an active region; depositing a silicon oxide film as a hard mask, forming a pattern of a source and a drain and a fine bar connecting the source and the drain; transferring the pattern on the hard mask to a silicon substrate by performing etching process for the silicon substrate; performing ion implanting; etching the silicon substrate by wet etching, so that the silicon fine bar connecting the source and the drain is suspended; reducing the silicon fine bar to a nano size to form a silicon nanowire; depositing a polysilicon film; forming a polysilicon gate line acrossing the silicon nanowire by electron beam lithography and forming a structure of nanowire-all-around; forming a silicon oxide sidewall at both sides of the polysilicon gate line, by depositing a silicon oxide film and subsequently etching the silicon oxide film; forming the source and the drain by using ion implantation and high temperature annealing, so that the silicon nanowire field effect transistor is finally fabricated. The method is compatible with a conventional integrated circuit fabrication technology. The fabrication process is simple and convenient, and has a short cycle.
    • 本文公开了一种基于湿蚀刻制造硅纳米线场效应晶体管的方法。 该方法包括定义活动区域; 沉积氧化硅膜作为硬掩模,形成源极和漏极的图案以及连接源极和漏极的细棒; 通过对硅衬底进行蚀刻处理,将硬掩模上的图案转移到硅衬底; 进行离子注入; 通过湿蚀刻蚀刻硅衬底,使得连接源极和漏极的硅细棒悬空; 将硅细棒还原成纳米尺寸以形成硅纳米线; 沉积多晶硅膜; 通过电子束光刻形成跨越硅纳米线的多晶硅栅极线,并形成全纳米线的结构; 在多晶硅栅极线的两侧形成硅氧化物侧壁,通过沉积氧化硅膜并随后蚀刻氧化硅膜; 通过离子注入和高温退火形成源极和漏极,从而最终制造出硅纳米线场效应晶体管。 该方法与传统的集成电路制造技术相兼容。 制造工艺简单方便,循环周期短。