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    • 7. 发明授权
    • Thermopile-based gas sensor
    • 基于热电堆的气体传感器
    • US07338640B2
    • 2008-03-04
    • US11095243
    • 2005-03-31
    • Sunil Srinivasa MurthyAnis ZribiShankar Chandrasekaran
    • Sunil Srinivasa MurthyAnis ZribiShankar Chandrasekaran
    • B32B5/02B32B27/04B32B27/12G01N7/00G01N21/00
    • G01N25/4893Y10T436/11
    • A method of manufacturing a sensor is provided. The method includes disposing a sacrificial layer on a substrate, disposing a low-thermal-conductivity layer on the sacrificial layer, and disposing a first set of conductive arms and a second set of conductive arms on the low-thermal-conductivity layer to form a plurality of thermal junctions. The plurality of thermal junctions is adapted to form a plurality of hot junctions and a plurality of cold junctions when subjected to a difference in temperature. The method also includes removing the sacrificial layer and a portion of the low-thermal-conductivity layer to form a cavity therein. The cavity is configured to provide insulation for the plurality of hot junctions. A thermopile sensor is also provided, and a calorimetric gas sensor implementing the thermopile sensor is provided.
    • 提供一种制造传感器的方法。 该方法包括在衬底上设置牺牲层,在牺牲层上设置低热导率层,以及将第一组导电臂和第二组导电臂设置在低热导率层上以形成 多个热路口。 多个热接头适于在经受温差时形成多个热接点和多个冷接点。 该方法还包括去除牺牲层和低热导率层的一部分以在其中形成空腔。 空腔构造成为多个热接点提供绝缘。 还提供热电堆传感器,并提供实现热电堆传感器的量热气体传感器。
    • 8. 发明申请
    • FLOW SENSOR ASSEMBLIES
    • 流量传感器总成
    • US20110166800A1
    • 2011-07-07
    • US12683474
    • 2010-01-07
    • Ertugrul BerkcanShankar ChandrasekaranBo LiStanton Earl Weaver, JR.
    • Ertugrul BerkcanShankar ChandrasekaranBo LiStanton Earl Weaver, JR.
    • G01F1/00
    • G01F1/66G01F1/712
    • A flow sensor assembly is provided and includes a flow conduit configured to impart a disturbance to a flow, multiple sensors disposed at respective sensing locations along the flow conduit. Each sensor is responsive to the disturbance of the flow and generates a corresponding response signal. The flow sensor assembly further includes a processor operably connected to each sensor, the processor being configured to compute a cross-correlation function between the response signals generated by said sensors, and determine a flow rate and a direction for the flow through the conduit based on the computed cross-correlation function. Additional flow sensor assembly arrangements are also disclosed.
    • 提供了一种流量传感器组件,并且包括配置成对流动造成干扰的流动管道,设置在沿着流动管道的各个感测位置处的多个传感器。 每个传感器响应于流动的干扰并产生相应的响应信号。 所述流量传感器组件还包括可操作地连接到每个传感器的处理器,所述处理器被配置为计算由所述传感器产生的所述响应信号之间的互相关函数,并且基于所述传感器确定流速和通过所述导管的流动的方向 计算的互相关函数。 还公开了附加的流量传感器组件装置。