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1. 发明授权

US07533971B2 Head of inkjet printer and method of manufacturing the same 有权
标题翻译：喷墨打印机头及其制造方法
公开(公告)号：US07533971B2
公开(公告)日：2009-05-19
申请号：US11237713
申请日：2005-09-29
申请人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
发明人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
IPC分类号： B41J2/05
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1642
摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.
摘要翻译：喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层，沉积，并且喷嘴板安装在加热器基板上。由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成SiO 2，因此喷嘴板和加热器基板以SiO 2的静电力结合。喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离层的界面。此外，在晶片单元中进行接合处理以提高批量生产率。

2. 发明申请

US20060023028A1 Head of inkjet printer and method of manufacturing the same 有权
标题翻译：喷墨打印机头及其制造方法
公开(公告)号：US20060023028A1
公开(公告)日：2006-02-02
申请号：US11237713
申请日：2005-09-29
申请人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
发明人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
IPC分类号： B41J2/04
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1642
摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.
摘要翻译：喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层，沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离层的界面。此外，在晶片单元中进行接合处理以提高批量生产率。

3. 发明授权

US06974208B2 Head of inkjet printer and method of manufacturing the same 失效
标题翻译：喷墨打印机头及其制造方法
公开(公告)号：US06974208B2
公开(公告)日：2005-12-13
申请号：US10321574
申请日：2002-12-18
申请人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
发明人： Sung-joon Park , Seo-hyun Cho , Sang-chul Koh , Jae-sik Min , Tae-kyun Kim , Myung-song Jung
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1623 , B41J2/1626 , B41J2/1642
摘要： A head of an inkjet printer is formed by bonding of a heater substrate and a nozzle plate. In order to bond the heater substrate where a heater thin film and a protecting film are vapor-deposited, and the nozzle plate where a nozzle is formed, an intermediate layer is formed by forming a thin film of glass on the heater substrate by vapor-depositing, and the nozzle plate is installed on the heater substrate. SiO2 is formed at an interface between the nozzle plate and the heater thin film due to heating and application of an electric field, and thus the nozzle plate and the heater substrate are bonded with an electrostatic force of SiO2. The nozzle plate and the heater substrate are bonded by using the intermediate layer made of the thin film of glass instead of a general polymer as the bonding layer, thereby preventing swelling of the polymer and isolation of layers of the head occurring due to ink penetration into interfaces of the layers. Moreover, a bonding process is performed in wafer units to improve mass productivity.
摘要翻译：喷墨打印机的头部通过加热衬底和喷嘴板的结合而形成。为了将加热器薄膜和保护膜气相沉积的加热器基板和形成喷嘴的喷嘴板接合，通过在加热器基板上形成玻璃薄膜而形成中间层，沉积，并且喷嘴板安装在加热器基板上。 SiO 2由于加热和施加电场而在喷嘴板和加热器薄膜之间的界面处形成，因此喷嘴板和加热器基板以静电力的SiO 2 。喷嘴板和加热器基板通过使用由玻璃薄膜代替一般聚合物作为粘结层而形成的中间层而粘合，从而防止聚合物溶胀并且由于墨渗入而发生头部的隔离层的界面。此外，在晶片单元中进行接合处理以提高批量生产率。

4. 发明授权

US06702428B2 Ink-jet printhead 失效
标题翻译：喷墨打印头
公开(公告)号：US06702428B2
公开(公告)日：2004-03-09
申请号：US10268083
申请日：2002-10-10
申请人： Sung-joon Park , Seo-hyun Cho , Sang-cheol Ko , Jae-sik Min , Kyong-il Kim , Byung-ha Park , Tae-kyun Kim , Myung-song Jung
发明人： Sung-joon Park , Seo-hyun Cho , Sang-cheol Ko , Jae-sik Min , Kyong-il Kim , Byung-ha Park , Tae-kyun Kim , Myung-song Jung
IPC分类号： B41J205
CPC分类号： B41J2/1603 , B41J2/14129 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645
摘要： A bubble-jet type ink-jet printhead has a structure in which a base plate, a barrier wall, and a nozzle plate are stacked. The base plate includes a substrate on which a recess is formed to a predetermined depth, an adiabatic layer formed on the substrate, a heater which is formed on the adiabatic layer and generates a thermal energy, and a passivation layer which is formed on the heater and passivates the heater. The barrier wall is stacked on the base plate, defines an ink chamber, which is disposed on the recess and has a recessed bottom surface, and defines an ink passage which communicates with the ink chamber. The nozzle plate is stacked on the barrier wall, has nozzles through which ink is ejected, and is formed at a location corresponding to a center of the ink chamber. Since a height of the barrier wall surrounding the ink chamber is reduced by the recess, delamination caused by ink soaked into the barrier wall can be prevented, and print performances such as a traveling property in a straight direction of ink droplets and ejection velocity of ink droplets, are improved.
摘要翻译：气泡喷墨式喷墨打印头具有堆叠基板，阻挡壁和喷嘴板的结构。基板包括基板，其上形成有预定深度的凹部，在基板上形成的绝热层，形成在绝热层上并产生热能的加热器，以及形成在加热器上的钝化层并加热加热器。阻挡壁堆叠在基板上，限定了一个墨水室，它设置在凹槽上并具有凹入的底面，并且限定了与墨水室连通的墨水通道。喷嘴板堆叠在阻挡壁上，具有喷嘴，墨通过喷嘴喷射，并且形成在与墨水室的中心对应的位置。由于凹部围绕墨水室的阻挡壁的高度被凹部减小，因此能够防止由墨水浸透到阻挡壁中的墨分层，并且墨滴直线方向的行进特性和墨滴的喷射速度等打印性能液滴，改进。

5. 发明授权

US06762012B2 Method of manufacturing monolithic ink-jet printhead 失效
标题翻译：单片喷墨打印头的制造方法
公开(公告)号：US06762012B2
公开(公告)日：2004-07-13
申请号：US10287488
申请日：2002-11-05
申请人： Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
发明人： Tae-kyun Kim , Seo-hyun Cho , Myung-song Jung , Kyong-il Kim , Sung-joon Park
IPC分类号： B41J216
CPC分类号： B41J2/1603 , B41J2/1629 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , G03F7/038 , G03F7/2022
摘要： A method of manufacturing a monolithic ink-jet printhead includes a heating element which generates bubbles by heating ink is formed on a surface of the substrate, and a negative photoresist which is coated to a predetermined thickness on the substrate on which the heating element is formed. Next, a portion, which forms a sidewall of an ink passage forming wall surrounding an ink chamber and a restrictor, of the negative photoresist is flush exposed to light and cured using a first photomask in which patterns of the ink chamber and the restrictor of the ink passage are formed. Subsequently, a second portion which forms an upper wall of the ink passage forming wall of the negative photoresist is exposed to the light using a second photomask in which the pattern of a nozzle is formed, and the second portion is exposed to the light by only a predetermined thickness. Last, an uncured portion of the negative photoresist is dissolved and removed using solvent. An ink-jet printhead whose elements are monolithically formed by a simplified process using a single negative photoresist can be manufactured.
摘要翻译：制造单片式喷墨打印头的方法包括：在基板的表面上形成通过加热油墨产生气泡的加热元件，以及在其上形成有加热元件的基板上涂覆预定厚度的负性光致抗蚀剂。接下来，将形成负光致抗蚀剂的墨水通道形成壁的侧壁和限制器的部分齐平地暴露于光并且使用第一光掩模进行固化，其中，在第一光掩模中，墨水腔和图像的限制器形成油墨通道。随后，使用其中形成喷嘴图案的第二光掩模将形成负光致抗蚀剂的墨通道形成壁的上壁的第二部分暴露于光，并且仅将第二部分暴露于光预定厚度。最后，使用溶剂溶解并除去负光致抗蚀剂的未固化部分。可以制造通过使用单一负性光致抗蚀剂的简化工艺来单元地形成元件的喷墨打印头。

6. 发明授权

US06964743B2 Inkjet printhead and manufacturing method thereof 失效
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US06964743B2
公开(公告)日：2005-11-15
申请号：US10388622
申请日：2003-03-17
申请人： Jae-sik Min , Myung-song Jung , Sung-joon Park , Seo-hyun Cho
发明人： Jae-sik Min , Myung-song Jung , Sung-joon Park , Seo-hyun Cho
IPC分类号： B41J2/05 , B41J2/14 , B41J2/16
CPC分类号： B41J2/14137 , B41J2/14072 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2002/1437 , B41J2002/14467
摘要： An inkjet printhead and a manufacturing method thereof. The inkjet printhead includes a substrate, a substantially cylindrical ink chamber storing ink and formed in an upper portion of the substrate, and a manifold supplying ink to the ink chamber in a bottom portion of the substrate, a channel-forming layer disposed between the ink chamber and the manifold and having an ink channel communicating between the ink chamber and the manifold, a nozzle plate stacked on the substrate and having a nozzle at a location corresponding to the central part of the ink chamber, a heater formed to surround the nozzle of the nozzle plate, and electrodes electrically connected to the heater to supply current to the heater. Therefore, the quantity of ink stored in an ink chamber can be increased. Also, when bubbles grow, the cylindrical ink chamber confines an ink flow area to ink ejectors, thereby reducing a back flow of the ink. Further, the quantity of ink supplied to the ink chamber can be adjusted by varying the number of ink channels formed in the channel-forming layer, thereby improving frequency characteristics of the inkjet printhead.
摘要翻译：喷墨打印头及其制造方法。喷墨打印头包括基板，存储油墨并形成在基板的上部的基本圆柱形的油墨室，以及向基板底部的墨水室供墨的歧管，设置在墨水之间的通道形成层并且具有在墨水室和歧管之间连通的墨水通道，在基板上堆叠的喷嘴板，并且在对应于墨水腔的中心部分的位置处具有喷嘴，加热器形成为围绕喷嘴的喷嘴喷嘴板和电连接到加热器以向加热器提供电流的电极。因此，可以增加存储在墨室中的墨的量。此外，当气泡生长时，圆筒形墨水室将墨水流动区域限制到墨水喷射器，从而减少墨水的回流。此外，可以通过改变在通道形成层中形成的墨水通道的数量来调节供应到墨水室的墨水量，从而改善喷墨打印头的频率特性。

7. 发明授权

US06595627B2 Inkjet printhead and manufacturing method thereof 失效
公开(公告)号：US06595627B2
公开(公告)日：2003-07-22
申请号：US10197819
申请日：2002-07-19
申请人： Jae-sik Min , Myung-song Jung , Sung-joon Park , Seo-hyun Cho
发明人： Jae-sik Min , Myung-song Jung , Sung-joon Park , Seo-hyun Cho
IPC分类号： B41J205
CPC分类号： B41J2/14137 , B41J2/14072 , B41J2/14145 , B41J2/1603 , B41J2/1628 , B41J2/1631 , B41J2/1642 , B41J2002/1437 , B41J2002/14467
摘要： An inkjet printhead and a manufacturing method thereof. The inkjet printhead includes a substrate, a substantially cylindrical ink chamber storing ink and formed in an upper portion of the substrate, and a manifold supplying ink to the ink chamber in a bottom portion of the substrate, a channel-forming layer disposed between the ink chamber and the manifold and having an ink channel communicating between the ink chamber and the manifold, a nozzle plate stacked on the substrate and having a nozzle at a location corresponding to the central part of the ink chamber, a heater formed to surround the nozzle of the nozzle plate, and electrodes electrically connected to the heater to supply current to the heater. Therefore, the quantity of ink stored in an ink chamber can be increased. Also, when bubbles grow, the cylindrical ink chamber confines an ink flow area to ink ejectors, thereby reducing a back flow of the ink. Further, the quantity of ink supplied to the ink chamber can be adjusted by varying the number of ink channels formed in the channel-forming layer, thereby improving frequency characteristics of the inkjet printhead.

8. 发明授权

US07758165B2 Ink-jet printhead and manufacturing method thereof 失效
标题翻译：喷墨打印头及其制造方法
公开(公告)号：US07758165B2
公开(公告)日：2010-07-20
申请号：US12000579
申请日：2007-12-13
申请人： Myung-song Jung , Sung-joon Park , Tae-kyun Kim , Jae-sik Min
发明人： Myung-song Jung , Sung-joon Park , Tae-kyun Kim , Jae-sik Min
IPC分类号： B41J2/04
CPC分类号： B41J2/1646 , B41J2/14 , B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2002/14346
摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.
摘要翻译：喷墨打印头及其制造方法包括：基板，其上形成有空间部分，安装在基板上的通道板，其中形成有用于存储墨水的墨水室;喷嘴板，安装在通道的顶表面其中形成有喷嘴以喷射墨水的板;以及设置在基板和通道板之间的振动板，以通过改变墨水室的体积产生用于喷射墨水的压力。所述振动板包括形成在所述基板的顶面的基底层，以覆盖所述空间部分的至少一部分;薄膜形状记忆合金层，其与容纳在所述墨水室中的墨水接触并根据温度变化设置在基底层和薄膜形状记忆合金之间以产生热量的加热元件，以及设置在加热元件和薄膜形状记忆合金层之间的绝缘层，并将由加热元件产生的热量传递到薄薄膜形状记忆合金层。由于加热元件的稳定的电阻温度系数（TCR），可以容易地控制供给到热元件的电压的高度和宽度，从而可以精确地控制振动板的功率，从而具有预定的图像质量，并且加热元件不直接接触墨水，从而实现喷墨打印头的稳定性。

9. 发明授权

US07341332B2 Ink-jet printhead and manufacturing method thereof 失效
公开(公告)号：US07341332B2
公开(公告)日：2008-03-11
申请号：US10268726
申请日：2002-10-11
申请人： Myung-song Jung , Sung-joon Park , Tae-kyun Kim , Jae-sik Min
发明人： Myung-song Jung , Sung-joon Park , Tae-kyun Kim , Jae-sik Min
IPC分类号： B41J2/04
CPC分类号： B41J2/1646 , B41J2/14 , B41J2/16 , B41J2/1623 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2/1645 , B41J2002/14346
摘要： An ink-jet printhead and a manufacturing method thereof include a substrate on which a space portion is formed, a passage plate installed on the substrate in which an ink chamber is formed to store ink, a nozzle plate installed at a top surface of the passage plate in which a nozzle is formed to eject the ink, and a vibration plate disposed between the substrate and the passage plate to generate a pressure for ejecting the ink by changing a volume of the ink chamber. The vibration plate includes a base layer formed at a top surface of the substrate so as to cover at least a part of the space portion, a thin film shape memory alloy layer which contacts the ink contained in the ink chamber and varies according to a temperature variation, a heating element disposed between the base layer and the thin film shape memory alloy to generate heat, and an insulating layer disposed between the heating element and the thin film shape memory alloy layer and transfers the heat generated by the heating element to the thin film shape memory alloy layer. Due to a stable temperature coefficient of resistance (TCR) of the heating element, a height and a width of a voltage supplied to the heat element can be easily controlled, and thus power of the vibration plate can be precisely controlled, thereby having a predetermined image quality, and the heating element does not contact directly the ink, thereby realizing stability of the ink-jet printhead.

10. 发明申请

US20070256301A1 METHOD OF MANUFACTURING INKJET PRINTHEAD USING CROSSLINKED POLYMER 审中-公开
标题翻译：使用交联聚合物制造喷嘴的方法
公开(公告)号：US20070256301A1
公开(公告)日：2007-11-08
申请号：US11772541
申请日：2007-07-02
申请人： Byung-ha PARK , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
发明人： Byung-ha PARK , Young-ung Ha , Sung-joon Park , Jae-sik Min , Kyong-il Kim
IPC分类号： B21D53/78
CPC分类号： B41J2/1603 , B41J2/1631 , B41J2/1639 , B41J2/1642 , B41J2/1645 , B41J2/1646 , Y10T29/49401
摘要： Provided is a method of manufacturing an inkjet printhead. The method includes: preparing a substrate having thereon a heater for heating ink and an electrode for supplying current to the heater; applying a negative photoresist composition to the substrate having thereon the heater and the electrode and patterning the same to form a passage forming layer that surrounds an ink passage; patterning the substrate having thereon the passage forming layer by photolithography at least twice to form a sacrificial layer having a planarized upper surface in a space surrounded by the passage forming layer; applying the negative photoresist composition to the passage forming layer and the sacrificial layer and patterning the same to form a nozzle layer having a nozzle; etching the substrate from the rear surface thereof to be perforated to form an ink supply hole; and removing the sacrificial layer, wherein the negative photoresist composition includes a prepolymer that has a glycidyl ether functional group or a ring-opened glycidyl ether functional group on monomer repeating units thereof and a phenolic novolak resin-based backbone, a bisphenol A-based backbone, or an alicyclic-based backbone. The sacrificial layer may be planarized using a chemical mechanical polishing process. Therefore, an upper surface of the sacrificial layer can be planarized, and thus, it is possible to easily control a shape and dimension of an ink passage, thereby improving uniformity of the ink passage.
摘要翻译：提供一种制造喷墨打印头的方法。该方法包括：制备其上具有用于加热油墨的加热器和用于向加热器供应电流的电极的基板; 在其上具有加热器和电极的基板上施加负性光致抗蚀剂组合物并将其图案化，以形成围绕墨水通道的通道形成层; 通过光刻将其上具有通道形成层的基板图案化至少两次，以在由通道形成层包围的空间中形成具有平坦化的上表面的牺牲层; 将所述负性光致抗蚀剂组合物施加到所述通道形成层和所述牺牲层并且将其图案化以形成具有喷嘴的喷嘴层; 从其背面蚀刻基板以进行穿孔以形成供墨孔; 并且除去牺牲层，其中负性光致抗蚀剂组合物包含在其单体重复单元上具有缩水甘油醚官能团或开环缩水甘油醚官能团的预聚物和酚醛清漆树脂基骨架，双酚A基骨架，或脂环族骨架。牺牲层可以使用化学机械抛光工艺进行平面化。因此，可以使牺牲层的上表面平坦化，从而可以容易地控制墨通道的形状和尺寸，从而提高墨通道的均匀性。

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