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    • 1. 发明申请
    • Mask read only memory (ROM) and method of fabricating the same
    • 掩模只读存储器(ROM)及其制造方法
    • US20070032022A1
    • 2007-02-08
    • US11499375
    • 2006-08-04
    • Hong-Kook MinChang-Mo ParkSung-Kyoo Park
    • Hong-Kook MinChang-Mo ParkSung-Kyoo Park
    • H01L21/8234
    • H01L27/112H01L27/11253
    • The Mask ROM includes a plurality of doped lines arranged on a substrate of a first conductivity. The doped lines have a second conductivity. In addition, the Mask ROM further includes an insulation film covering the substrate, a plurality of interconnections intersecting the doped lines in parallel and arranged on the insulation film, an isolative doped region of the first conductivity arranged at the doped line of at least one intersecting place selected from intersecting places between the interconnections and the doped lines, a first contact plug penetrating the insulation film at the selected intersecting place and connecting the isolative doped region to the interconnection, and a second contact plug penetrating the insulation film at a deselected intersecting place and connecting the doped line to the interconnection.
    • 掩模ROM包括布置在第一导电性的衬底上的多个掺杂线。 掺杂线具有第二导电性。 此外,掩模ROM还包括覆盖基板的绝缘膜,与掺杂线并联并布置在绝缘膜上的多个互连,第一导电的隔离掺杂区域布置在至少一个相交的掺杂线 在互连和掺杂线之间的相交位置选择的位置,穿过所选交叉位置处的绝缘膜并将隔离掺杂区域连接到互连的第一接触插塞,以及在取消选择的相交位置处穿过绝缘膜的第二接触插塞 并将掺杂线连接到互连。
    • 2. 发明申请
    • Split-gate-type nonvolatile memory device and method of fabricating the same
    • 分闸式非易失性存储器件及其制造方法
    • US20070161190A1
    • 2007-07-12
    • US11648959
    • 2007-01-03
    • Sung-Kyoo ParkHong-Kook MinChang-Mo Park
    • Sung-Kyoo ParkHong-Kook MinChang-Mo Park
    • H01L21/336
    • H01L27/115H01L27/11519H01L27/11521
    • Provided are a split-gate-type nonvolatile memory device and method of fabricating the same. The method includes forming isolation patterns defining active regions in a predetermined region of a semiconductor substrate. A first conductive layer is formed on the resultant structure having the isolation patterns. The first conductive layer has openings exposing both ends of the isolation patterns. Mask patterns are formed between the openings on the first conductive layer, thereby exposing a top surface of the first conductive layer as a rectangular type. The exposed top surface of the first conductive layer is thermally oxidized to form silicon oxide patterns with rectangular shapes. The first conductive layer is anisotropically etched using the silicon oxide patterns as etch masks to form floating conductive patterns. Thereafter, control gate electrodes are formed across the isolation patterns on the silicon oxide patterns.
    • 提供一种分闸式非易失性存储装置及其制造方法。 该方法包括在半导体衬底的预定区域中形成限定有源区的隔离图案。 在具有隔离图案的所得结构上形成第一导电层。 第一导电层具有露出隔离图案的两端的开口。 掩模图案形成在第一导电层上的开口之间,从而将第一导电层的顶表面暴露为矩形。 第一导电层的暴露的顶表面被热氧化以形成具有矩形形状的氧化硅图案。 使用氧化硅图案作为蚀刻掩模对第一导电层进行各向异性蚀刻,以形成浮动导电图案。 此后,在氧化硅图案上的隔离图案之间形成控制栅电极。
    • 5. 发明授权
    • Thin film deposition apparatus and method of manufacturing organic light-emitting display device by using the same
    • 薄膜沉积装置及使用该有机发光显示装置的方法
    • US08920563B2
    • 2014-12-30
    • US13225992
    • 2011-09-06
    • Mu-Gyeom KimChang-Mo Park
    • Mu-Gyeom KimChang-Mo Park
    • C23C16/00C23C16/50C23F1/00H01L21/306C23C14/04C23C14/56H01L51/00
    • C23C14/562C23C14/042H01L51/0011H01L2251/105
    • A thin film deposition apparatus that may be easily manufactured, that may be easily applied to manufacture large-sized display devices on a mass scale, and that improves manufacturing yield and deposition efficiency, and a method of manufacturing an organic light-emitting display device by using the thin film deposition apparatus are disclosed. The thin film deposition apparatus for forming a thin film on a substrate, the thin film deposition apparatus including: a magnet disposed on a first surface of the substrate; a patterning wheel disposed on a second surface opposite to the first surface of the substrate, rotatable around a rotation axis, and including a plurality of grooves along a peripheral surface; and a patterning wire including a plurality of blockers having shapes corresponding to the plurality of grooves of the patterning wheel, and windable to the patterning wheel.
    • 可容易制造的薄膜沉积装置,其可以容易地用于大规模生产大尺寸显示装置,并且提高制造成品率和沉积效率,以及通过以下方式制造有机发光显示装置的方法: 公开了使用薄膜沉积设备。 一种用于在基板上形成薄膜的薄膜沉积装置,所述薄膜沉积装置包括:设置在所述基板的第一表面上的磁体; 图案化轮,设置在与所述基板的与所述基板的所述第一表面相反的第二表面上,可绕旋转轴线旋转,并且沿周向表面包括多个凹槽; 以及图案线,其包括具有与图案轮的多个槽对应的形状的多个阻挡件,并且可卷绕到图案轮。
    • 6. 发明授权
    • Organic light emitting display apparatus
    • 有机发光显示装置
    • US08546799B2
    • 2013-10-01
    • US13137531
    • 2011-08-24
    • Mu-Gyeom KimChang-Mo Park
    • Mu-Gyeom KimChang-Mo Park
    • H01L29/10
    • H01L27/3227
    • An OLED apparatus including a substrate with a lower active layer thereon and including an oxide semiconductor for generating current in response to light; an etching prevention layer on an upper portion of the lower active layer and including a contact hole; a source/drain electrode on the etching prevention layer and electrically connected to the lower active layer through the contact hole; an upper charging electrode on the etching prevention layer and overlapping the lower active layer; a light emitting layer contacting the upper charging electrode for generating light; and a cathode electrode facing the upper charging electrode, wherein the light emitting layer is configured to be driven and emit light in response to a driving voltage applied to the upper charging electrode, and the lower active layer is configured to store current in the oxide semiconductor in response to the driving voltage applied to the upper charging electrode.
    • 一种OLED装置,包括其上具有较低有源层的衬底并且包括用于响应于光而产生电流的氧化物半导体; 所述下部有源层的上部具有蚀刻防止层,并且包括接触孔; 在该防蚀层上形成源极/漏电极,并通过接触孔与下部有源层电连接; 在所述防蚀层上的上充电电极,并与所述下有源层重叠; 接触用于产生光的上充电电极的发光层; 以及面对所述上部充电电极的阴极电极,其中,所述发光层被配置为响应于施加到所述上部充电电极的驱动电压而被驱动并发光,并且所述下部有源层被配置为将电流存储在所述氧化物半导体 响应于施加到上充电电极的驱动电压。
    • 10. 发明授权
    • Touch sensor
    • 触摸传感器
    • US09086752B2
    • 2015-07-21
    • US12912638
    • 2010-10-26
    • Mu-Gyeom KimChang-Mo ParkIl-Soo ParkYong-Soo Lee
    • Mu-Gyeom KimChang-Mo ParkIl-Soo ParkYong-Soo Lee
    • H01L35/24H01L51/00G06F3/041
    • G06F3/047G06F3/0412G09G3/3208G09G5/02G09G2300/0426
    • A touch sensor and an organic light-emitting display including the sensor are disclosed. In one embodiment, the touch sensor includes i) a substrate, ii) a sensing unit formed on or over the substrate and containing hydrogen ions, iii) a touch sensor active layer formed on or above the sensing unit and iv) a touch sensor source electrode and a touch sensor drain electrode that are electrically connected to the touch sensor active layer. The touch sensor further includes a protective layer covering the touch sensor source electrode and the touch sensor drain electrode, and an opposite electrode formed on the protective layer, wherein at least part of the opposite electrode is formed substantially directly above the touch sensor active layer.
    • 公开了一种触摸传感器和包括传感器的有机发光显示器。 在一个实施例中,触摸传感器包括i)衬底,ii)形成在衬底上或衬底上并包含氢离子的感测单元,iii)形成在感测单元上或上方的触摸传感器有源层,以及iv)触摸传感器源 电极和触摸传感器漏电极,其电连接到触摸传感器有源层。 所述触摸传感器还包括覆盖所述触摸传感器源电极和所述触摸传感器漏电极的保护层,以及形成在所述保护层上的相对电极,其中所述相对电极的至少一部分基本上直接形成在所述触摸传感器有源层的正上方。