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    • 9. 发明授权
    • Effusion cell assembly for epitaxial apparatus
    • 用于外延设备的流出池组件
    • US6063201A
    • 2000-05-16
    • US141557
    • 1998-08-28
    • Hae Gwon LeeGyu Hwan SimSung Woo ChoiMun Cheol BaekKee Soo Nam
    • Hae Gwon LeeGyu Hwan SimSung Woo ChoiMun Cheol BaekKee Soo Nam
    • H01L21/20C30B23/06C23C16/00
    • C30B23/066
    • An effusion cell assembly for epitaxial apparatus is disclosed. The assembly includes an effusion cell incluing a growing material, a heater for supplying heats with the effusion cell to effuse the growing material, a supporting plate for supporting the heater, a bolt having one end connected to the supporting plate, a cell flange coupled to a lower flange of an adaptor for supporting the cell assembly, bellows fixed between the supporting plate and the cell flange including the bolt, and a control nut for expanding and contracting the bellows so as to separate only the cell assembly from a vacuum chamber with entire vacuum maintained in the vacuum chamber and local vacuum released in the cell assembly. The epitaxial apparatus further includes a control valve located between an entrance flange of the vacuum chamber and an upper adaptor flange of the adaptor for introducing and maintaining vacuum in the vacuum chamber.
    • 公开了一种用于外延设备的渗流池组件。 组件包括包含生长材料的积液池,用于向渗出池供应热量以加热生长材料的加热器,用于支撑加热器的支撑板,具有连接到支撑板的一端的螺栓,耦合到 用于支撑电池组件的适配器的下凸缘,固定在支撑板和包括螺栓的电池凸缘之间的波纹管,以及用于膨胀和收缩波纹管的控制螺母,以便仅将电池组件与真空室整体分离 在真空室中保持真空并在电池组件中释放局部真空。 外延装置还包括位于真空室的入口凸缘和适配器的上适配器凸缘之间的控制阀,用于在真空室中引入和保持真空。