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    • 4. 发明申请
    • SCANNING MICROMIRROR
    • 扫描微型计算机
    • US20120250124A1
    • 2012-10-04
    • US13383375
    • 2010-08-26
    • Dong June ChoiByung Goo LeeTae Sik KimTae Sun Lim
    • Dong June ChoiByung Goo LeeTae Sik KimTae Sun Lim
    • G02B26/10
    • G02B26/0841G02B26/105
    • The present invention may relate to a scanning micromirror. The scanning micromirror can include a substrate having an open region; a micro plate provided in the open region; a first gimbal provided between the substrate and the mirror plate, and including a first curvature curved toward the mirror plate along an X-axis of the open region; a second gimbal including a second curvature formed along the first curvature of the first gimbal; a first elastic body configured to connect the substrate with the first curvature of the first gimbal; a second elastic body configured to connect the first gimbal with the second gimbal along a Y-axis of the open region; and a third elastic body configured to connect the second gimbal with the mirror plate along the Y-axis of the open region.
    • 本发明可以涉及扫描微镜。 扫描微镜可以包括具有开放区域的基板; 设置在开放区域中的微板; 设置在所述基板和所述镜板之间的第一万向节,并且包括沿着所述开放区域的X轴朝向所述镜板弯曲的第一曲率; 包括沿着第一万向架的第一曲率形成的第二曲率的第二万向节; 第一弹性体,其构造成将所述基板与所述第一万向架的所述第一曲率连接; 第二弹性体,其构造成沿着所述开放区域的Y轴将所述第一万向架与所述第二万向节连接; 以及第三弹性体,其构造成沿着所述开放区域的Y轴将所述第二万向架与所述镜板连接。
    • 5. 发明授权
    • Scanning micromirror
    • 扫描微镜
    • US08675270B2
    • 2014-03-18
    • US13383375
    • 2010-08-26
    • Dong June ChoiByung Goo LeeTae Sik KimTae Sun Lim
    • Dong June ChoiByung Goo LeeTae Sik KimTae Sun Lim
    • G02B26/08
    • G02B26/0841G02B26/105
    • The present invention may relate to a scanning micromirror. The scanning micromirror can include a substrate having an open region; a micro plate provided in the open region; a first gimbal provided between the substrate and the mirror plate, and including a first curvature curved toward the mirror plate along an X-axis of the open region; a second gimbal including a second curvature formed along the first curvature of the first gimbal; a first elastic body configured to connect the substrate with the first curvature of the first gimbal; a second elastic body configured to connect the first gimbal with the second gimbal along a Y-axis of the open region; and a third elastic body configured to connect the second gimbal with the mirror plate along the Y-axis of the open region.
    • 本发明可以涉及扫描微镜。 扫描微镜可以包括具有开放区域的基板; 设置在开放区域中的微板; 设置在所述基板和所述镜板之间的第一万向节,并且包括沿着所述开放区域的X轴朝向所述镜板弯曲的第一曲率; 包括沿着第一万向架的第一曲率形成的第二曲率的第二万向节; 第一弹性体,其构造成将所述基板与所述第一万向架的所述第一曲率连接; 第二弹性体,其构造成沿着所述开放区域的Y轴将所述第一万向架与所述第二万向节连接; 以及第三弹性体,其构造成沿着所述开放区域的Y轴将所述第二万向架与所述镜板连接。