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    • 3. 发明授权
    • Inertial rate sensor tuning fork
    • 惯性传感器音叉
    • US06507141B2
    • 2003-01-14
    • US09827886
    • 2001-04-06
    • Stuart J. Knowles
    • Stuart J. Knowles
    • H01L4108
    • G01C19/5607H03H9/215
    • Vibratory tuning fork having a body of piezoelectric material with a base and a pair of tapered tines which extend from the base and decrease in lateral dimension from the base toward the tips of the tines. A crotch section at the base of the tines has an inner pair of faces which lie in crystallographic planes of the piezoelectric material and an outer pair of faces which lie in additional crystallographic planes of the material and extend between the inner pair of faces and the tines. An isolation slot is formed in the base adjacent to the crotch, with enlarged cut-outs at the ends of the slot to prevent the formation of facets and membranes across the slot.
    • 振动音叉具有具有基部的压电材料体和从基部延伸的一对锥形齿,并且从基部朝向尖端的侧向尺寸减小。 在尖端的基部处的裆部具有位于压电材料的结晶平面中的内对对面和位于材料的附加结晶平面中并在内对面和尖齿之间延伸的外对面 。 隔离槽形成在邻近裆部的基部中,在槽的端部具有扩大的切口,以防止在该槽上形成小平面和薄膜。