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1. 发明专利

JP2011203256A Amorphous thin film for sensing 审中-公开
标题翻译：用于感应的非晶薄膜
公开(公告)号：JP2011203256A
公开(公告)日：2011-10-13
申请号：JP2011067179
申请日：2011-03-25
申请人： Stichting Imec Nederland , スティヒティング・イメック・ネーデルラントStichting IMEC Nederland
发明人： BLAUW MICHIEL , DAM THI VAN ANH , KOCHUPARACKAL JINESH
IPC分类号： G01N27/02 , G01N27/00 , G01N27/22
CPC分类号： G01N27/4148 , G01N27/4146
摘要： PROBLEM TO BE SOLVED: To provide a sensitive and selective sensor that can operate at room temperature or ambient temperature for low-power applications.SOLUTION: The present invention relates to low-power sensing, for sensing of chemical or biochemical analytes in a gas phase or a liquid phase. More in particular, the present invention relates to the use of a thin continuous film without grain boundaries as a sensing layer 40 in devices for sensing a predetermined analyte. In use, the sensing layer has a surface exposed to the analyte. The electrical impedance of the sensing layer changes upon adsorption of the predetermined analyte on the exposed surface of the sensing layer. The sensing layer preferably has a thickness in the range between about 1 nm and 100 nm, such as between about 1 nm and 30 nm. Preferably the sensing layer is an amorphous layer.
摘要翻译：要解决的问题：提供可在室温或环境温度下对低功率应用进行操作的敏感和选择性传感器。解决方案：本发明涉及用于感测气相中的化学或生化分析物的低功率感测或液相。更具体地，本发明涉及在没有晶界的薄连续薄膜作为感测预定分析物的装置中的感测层40的用途。在使用中，感测层具有暴露于分析物的表面。感测层的电阻抗在预定分析物在感测层的暴露表面上吸附时改变。传感层的厚度优选在约1nm至100nm之间，例如约1nm至30nm之间。优选地，感测层是非晶层。

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