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1. 发明授权

US08508039B1 Wafer scale chip scale packaging of vertically integrated MEMS sensors with electronics 有权
标题翻译：垂直集成MEMS传感器与电子元件的晶圆级芯片级封装
公开(公告)号：US08508039B1
公开(公告)日：2013-08-13
申请号：US12117264
申请日：2008-05-08
申请人： Steven S. Nasiri , Goksen G. Yaralioglu
发明人： Steven S. Nasiri , Goksen G. Yaralioglu
IPC分类号： H01L23/12
CPC分类号： B81C1/0023 , B81C1/00238 , B81C2203/0792 , H01L2224/11
摘要： In a method and system in accordance with the present invention, solder balls are added on top of vertically integrated MEMS with CMOS by using wafer scale fabrication compatible with existing chip scale packaging capabilities. In the present invention, both the MEMS and the CMOS dies are fabricated in equal dimensions. On the MEMS level, silicon islands are defined by DRIE etching to be bonded on top of CMOS pads. These conducting silicon islands later provide electrical connections between the CMOS pads and the conducting traces that lead to solder balls on top.
摘要翻译：在根据本发明的方法和系统中，通过使用与现有芯片级封装能力兼容的晶片级制造，将焊球添加到具有CMOS的垂直集成MEMS的顶部上。在本发明中，MEMS和CMOS晶体管的尺寸相同。在MEMS级别上，硅岛由DRIE蚀刻限定，以连接在CMOS焊盘之上。这些导电硅岛稍后提供CMOS焊盘和导致焊球顶部的导电迹线之间的电连接。

2. 发明授权

US08960002B2 Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权
公开(公告)号：US08960002B2
公开(公告)日：2015-02-24
申请号：US13096732
申请日：2011-04-28
申请人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
发明人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
IPC分类号： G01P15/08 , G01P15/125 , G01P15/18 , B60R21/0132
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.

3. 发明授权

US07934423B2 Vertically integrated 3-axis MEMS angular accelerometer with integrated electronics 有权
标题翻译：垂直集成的3轴MEMS角加速度计与集成电子
公开(公告)号：US07934423B2
公开(公告)日：2011-05-03
申请号：US11953762
申请日：2007-12-10
申请人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
发明人： Steven S. Nasiri , Goksen G. Yaralioglu , Joseph Seeger , Babak Taheri
IPC分类号： G01P15/08 , G01P15/125
CPC分类号： G01P15/0888 , B60R2021/01327 , G01P15/0802 , G01P15/125 , G01P15/18
摘要： Sensors for measuring angular acceleration about three mutually orthogonal axes, X, Y, Z or about the combination of these axes are disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to rotate substantially about the X, and/or Y, and/or Z, by at least one linkage and is responsive to angular accelerations about the X, and/or Y, and/or Z directions. Finally, the sensor includes at least one electrode at the base plate or perpendicular to the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the angular acceleration. Multi-axis detection is enabled by adjusting a configuration of flexures and electrodes.
摘要翻译：公开了用于测量围绕三个相互正交的轴X，Y，Z或围绕这些轴的组合的角加速度的传感器。传感器包括传感器子组件。传感器子组件还包括基本上平行于X-Y感测平面的基座; 设置在XY感测平面中并被约束以基于X和/或Y和/或Z 1至少一个连杆旋转的检测质量体，并响应于围绕X和/或Y的角加速度和/ 或Z方向。最后，传感器在基板处包括至少一个电极或垂直于基板，以及至少一个传感器，用于响应于角加速度的传感器子组件的每个感测方向。通过调整弯曲和电极的配置可实现多轴检测。

4. 发明授权

US08633049B2 Method of fabrication of Al/GE bonding in a wafer packaging environment and a product produced therefrom 有权
标题翻译：在晶片封装环境中制造Al / GE键合的方法和由其制造的产品
公开(公告)号：US08633049B2
公开(公告)日：2014-01-21
申请号：US13333580
申请日：2011-12-21
申请人： Steven S. Nasiri , Anthony F. Flannery, Jr.
发明人： Steven S. Nasiri , Anthony F. Flannery, Jr.
IPC分类号： H01L21/30 , H01L21/46 , H01L21/00 , H01L29/40
CPC分类号： B81C1/00238 , B23K20/023 , B81B3/0018 , B81B7/007 , B81B2203/0315 , B81B2207/012 , B81B2207/094 , B81C1/00269 , B81C3/001 , B81C2203/0118 , B81C2203/035 , B81C2203/038 , B81C2203/0792 , H01L21/187
摘要： A method of bonding of germanium to aluminum between two substrates to create a robust electrical and mechanical contact is disclosed. An aluminum-germanium bond has the following unique combination of attributes: (1) it can form a hermetic seal; (2) it can be used to create an electrically conductive path between two substrates; (3) it can be patterned so that this conduction path is localized; (4) the bond can be made with the aluminum that is available as standard foundry CMOS process. This has the significant advantage of allowing for wafer-level bonding or packaging without the addition of any additional process layers to the CMOS wafer.
摘要翻译：公开了一种在两个基板之间将锗键合到铝以产生牢固的电气和机械接触的方法。铝 - 锗键具有以下独特的属性组合：（1）可形成气密封; （2）可用于在两个基板之间形成导电路径; （3）可以对其进行图案化，使得该导电路径被定位; （4）可以用作为标准铸造CMOS工艺的铝制成。这具有允许晶片级接合或封装而不向CMOS晶片添加任何附加工艺层的显着优点。

5. 发明授权

US07621183B2 X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging 有权
标题翻译： X-Y轴双质量音叉陀螺仪，具有垂直集成电子和晶片级密封包装
公开(公告)号：US07621183B2
公开(公告)日：2009-11-24
申请号：US12026533
申请日：2008-02-05
申请人： Joseph Seeger , Steven S. Nasiri , Alexander Castro
发明人： Joseph Seeger , Steven S. Nasiri , Alexander Castro
IPC分类号： G01C19/00 , G01P9/04
CPC分类号： G01C19/56 , G01C19/5712 , G01C19/5719 , G01C19/574
摘要： An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
摘要翻译：角速度传感器具有横向设置在X-Y平面中并间接连接到框架的两个质量块。两个质量通过联动使得它们必须沿着相反方向移动。传感器绕Y轴的角速度可以通过将两个质量驱动为Z向反相振荡并测量角振荡幅度来感测传给框架。在优选实施例中，角速度传感器由体MEMS陀螺仪晶片，盖晶片和参考晶片制成。在另一优选实施例中，晶片组件提供了质量和周围环境之间的密封屏障。

6. 发明授权

US07258011B2 Multiple axis accelerometer 有权
公开(公告)号：US07258011B2
公开(公告)日：2007-08-21
申请号：US11285493
申请日：2005-11-21
申请人： Steven S. Nasiri , Joseph Seeger
发明人： Steven S. Nasiri , Joseph Seeger
IPC分类号： G01P15/125
CPC分类号： G01P15/18 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P2015/082
摘要： A sensor for measuring acceleration in three mutually orthogonal axes, X, Y and Z is disclosed. The sensor comprises a sensor subassembly. The sensor subassembly further comprises a base which is substantially parallel to the X-Y sensing plane; a proof mass disposed in the X-Y sensing plane and constrained to move substantially in the X, Y, and Z, about by at least one linkage and is responsive to accelerations in the X, Y and Z directions. The sensor includes at least one paddle disposed in the sensing plane; and at least one pivot on the linkage. Finally, the sensor includes at least one electrode at the base plate and at least one transducer for each sensing direction of the sensor subassembly responsive to the acceleration.

7. 发明授权

US06843574B2 Gimbaled micromechanical rotation system 失效
标题翻译：平衡式微机械旋转系统
公开(公告)号：US06843574B2
公开(公告)日：2005-01-18
申请号：US10225081
申请日：2002-08-20
申请人： James Starr , Mitchell J. Novack , Haesung Kwon , James H. Smith , Steven S. Nasiri
发明人： James Starr , Mitchell J. Novack , Haesung Kwon , James H. Smith , Steven S. Nasiri
IPC分类号： B81B3/00 , G02B6/35 , G02B26/08 , G02B7/182
CPC分类号： G02B6/3564 , B81B3/0062 , B81B2201/042 , G02B6/3512 , G02B6/3584 , G02B26/0833
摘要： The present invention is directed towards apparatuses for rotating a gimbaled platform with rotatable actuators. Gimbal springs comprised of component springs with compliant axes that intersect at a nonzero angle are coupled to the gimbaled platform. Preferably, the compliant axes of the component springs are oriented at an approximately 45 degree angle relative to the actuator rotation axes. Wraparound lever arms coupling the rotatable actuators with the gimbal springs serve to increase the leverage ratio, thereby permitting greater platform rotation for a given actuator rotation.
摘要翻译：本发明涉及用可旋转致动器旋转万向平台的装置。由具有与非零角度相交的柔性轴的分量弹簧组成的万向弹簧耦合到万向平台。优选地，组件弹簧的柔顺轴线相对于致动器旋转轴线定向成大致45度的角度。将可旋转致动器与万向弹簧联接的环绕杆臂用于增加杠杆比，从而允许给定致动器旋转更大的平台旋转。

8. 发明授权

US06823127B2 Apparatus for holding a fiber array 有权
标题翻译：用于保持光纤阵列的装置
公开(公告)号：US06823127B2
公开(公告)日：2004-11-23
申请号：US10236471
申请日：2002-09-05
申请人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
发明人： Steven S. Nasiri , Janusz Liberkowski , Zhenfang Chen , Jeff Jarfa
IPC分类号： G02B600
CPC分类号： G02B6/3644 , G02B6/32 , G02B6/3672 , G02B6/3692 , G02B6/3833 , G02B6/3834 , G02B6/4248
摘要： Optical fibers are inserted and bonded in a two dimensional array of feedthroughs provided by an insert having a top plate, a bottom plate and a sandwiched spacer plate. Top and bottom plate feature funnel shaped hole sections that capture the approaching fiber end during its insertion. The funnel sections terminate in narrow hole sections that tightly hold the inserted fiber ends. Having top and bottom plate spaced apart provides for high angular precision of the bonded fiber ends with minimal fabrication effort of the insert. Optical fibers may be combined in linear arrays and simultaneously inserted significantly reducing assembly efforts. The insert is attached to a fiber housing and hermetically sealed within an external housing, which features a glass plate to provide beam propagation to and from the fiber ends. An optical gel fills the gap between the insert's output face and the glass plate.
摘要翻译：将光纤插入并结合在由具有顶板，底板和夹持间隔板的插入件提供的馈通的二维阵列中。顶板和底板都具有漏斗形孔部分，在其插入期间捕获接近光纤端。漏斗部分终止于紧密地保持插入的光纤端部的窄孔部分。具有间隔开的顶板和底板，以最小的插入件制造工作提供了粘合的纤维端部的高角度精度。光纤可以以线性阵列组合，并同时显着地减少组装工作。插入件附接到纤维壳体并气密地密封在外部壳体内，其具有玻璃板以提供光纤传播到光纤端和从纤维端传播。光学凝胶填充插入件的输出面和玻璃板之间的间隙。

9. 发明授权

US08952832B2 Interfacing application programs and motion sensors of a device 有权
标题翻译：接口应用程序和设备的运动传感器
公开(公告)号：US08952832B2
公开(公告)日：2015-02-10
申请号：US12106921
申请日：2008-04-21
申请人： Steven S. Nasiri , Joseph Jiang , David Sachs
发明人： Steven S. Nasiri , Joseph Jiang , David Sachs
IPC分类号： H03M11/00 , G06F3/038 , G06F3/0346 , G06F3/01
CPC分类号： G06F3/0346 , A63F13/211 , A63F2300/105 , A63F2300/209 , B81B7/02 , G01C19/42 , G01P15/02 , G06F3/017 , G06F3/038
摘要： Interfacing application programs and motion sensors of a device. In one aspect, a high-level command is received from an application program running on a motion sensing device, where the application program implements one of multiple different types of applications available for use on the device. The high-level command requests high-level information derived from the output of motion sensors of the device that include rotational motion sensors and linear motion sensors. The command is translated to cause low-level processing of motion sensor data output by the motion sensors, the low-level processing following requirements of the type of application and determining the high-level information in response to the command. The application program is ignorant of the low-level processing, and the high-level information is provided to the application program.
摘要翻译：接口应用程序和设备的运动传感器。在一个方面，从运动感测装置上运行的应用程序接收高级命令，其中应用程序实现可用于设备上的多种不同类型的应用中的一种。高级命令请求从包括旋转运动传感器和线性运动传感器的装置的运动传感器的输出得到的高级信息。该命令被转换为对运动传感器输出的运动传感器数据进行低级处理，按照应用类型的要求进行低级处理，并根据命令确定高级信息。应用程序对低级处理无知，向应用程序提供高级信息。

10. 发明授权

US08250921B2 Integrated motion processing unit (MPU) with MEMS inertial sensing and embedded digital electronics 有权
标题翻译：具有MEMS惯性感应和嵌入式数字电子技术的集成运动处理单元（MPU）
公开(公告)号：US08250921B2
公开(公告)日：2012-08-28
申请号：US11774488
申请日：2007-07-06
申请人： Steven S. Nasiri , David Sachs , Babak Taheri
发明人： Steven S. Nasiri , David Sachs , Babak Taheri
IPC分类号： G01P15/00 , G01P1/02
CPC分类号： G01C19/5776 , G01C19/5769 , G01P1/023 , G01P15/0802 , G01P15/125 , G01P15/18 , G01P2015/0845 , G01P2015/0865 , G01P2015/088
摘要： A module operable to be mounted onto a surface of a board. The module includes a linear accelerometer to provide a first measurement output corresponding to a measurement of linear acceleration in at least one axis, and a first rotation sensor operable to provide a second measurement output corresponding to a measurement of rotation about at least one axis. The accelerometer and the first rotation sensor are formed on a first substrate. The module further includes an application specific integrated circuit (ASIC) to receive both the first measurement output from the linear accelerometer and the second measurement output from the first rotation sensor. The ASIC includes an analog-to-digital converter and is implemented on a second substrate. The first substrate is vertically bonded to the second substrate.
摘要翻译：一种可操作以安装在电路板表面上的模块。该模块包括线性加速度计，以提供对应于至少一个轴线性加速度测量的第一测量输出，以及第一旋转传感器，其可操作以提供对应于围绕至少一个轴线的旋转测量的第二测量输出。加速度计和第一旋转传感器形成在第一基板上。该模块还包括专用集成电路（ASIC），用于接收来自线性加速度计的第一测量输出和来自第一旋转传感器的第二测量输出。 ASIC包括模数转换器并且被实现在第二基板上。第一衬底垂直地结合到第二衬底。

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