会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 9. 发明申请
    • Gap-Fill Keyhole Repair Using Printable Dielectric Material
    • 使用可印刷介质材料进行缺陷孔眼修复
    • US20130062709A1
    • 2013-03-14
    • US13232293
    • 2011-09-14
    • Paul ChangJosephine B. ChangMichael A. GuillornJeffrey W. Sleight
    • Paul ChangJosephine B. ChangMichael A. GuillornJeffrey W. Sleight
    • H01L29/51H01L21/28
    • H01L29/51H01L21/311H01L21/76825H01L21/76837H01L29/66545
    • Disposable gate structures are formed on a semiconductor substrate. A planarization dielectric layer is deposited over the disposable gate structures and planarized to provide a top surface that is coplanar with top surface of the disposable gate structures. The planarization dielectric layer at this point includes gap-fill keyholes between narrowly spaced disposable gate structures. A printable dielectric layer is deposited over the planarization dielectric layer to fill the gap-fill keyholes. Areas of the printable dielectric layer over the gap-fill keyholes are illuminated with radiation that cross-links cross-linkable bonds in the material of the printable dielectric layer. Non-crosslinked portions of the printable dielectric layer are subsequently removed selective to crosslinked portions of the printable dielectric layer, which fills at least the upper portion of each gate-fill keyhole. The disposable gate structures are removed to form gate cavities. The gate cavities are filled with a gate dielectric and a gate electrode.
    • 在半导体衬底上形成一次性栅极结构。 平坦化电介质层沉积在一次性栅极结构上并且被平坦化以提供与一次性栅极结构的顶表面共面的顶表面。 此时的平坦化电介质层包括狭缝间隔一次性栅极结构之间的间隙填充键孔。 在平坦化介电层上沉积可印刷介电层以填充间隙填充键孔。 在间隙填充键孔上的可印刷电介质层的区域被可印刷介电层的材料中交叉连接的辐射辐射照射。 可打印介电层的非交联部分随后被选择性地移除到可印刷介电层的交联部分,该可印刷电介质层至少填充每个栅极填充孔眼的上部。 去除一次性门结构以形成门腔。 栅极腔填充有栅极电介质和栅电极。