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    • 4. 发明授权
    • Method of depositing directly activated species onto a remotely located
substrate
    • 将直接活化的物质沉积到远位的基底上的方法
    • US5093149A
    • 1992-03-03
    • US520988
    • 1990-05-07
    • Joachim DoehlerStephen J. HudgensStanford R. OvshinskyLester R. PeedinJeffrey M. Krisko
    • Joachim DoehlerStephen J. HudgensStanford R. OvshinskyLester R. PeedinJeffrey M. Krisko
    • C23C16/44C23C16/452C23C16/455
    • C23C16/4551C23C16/452C23C16/455C23C16/45514
    • A method of depositing high quality thin film at a high rate of deposition through the formation of a high flux of activated precursor species of a precursor deposition gas by employing a substantial pressure differential between the pressure adjacent the aperture in a conduit from which said precursor deposition gas is introduced into the interior of a vacuumized enclosure and the background pressure which exits in said enclosure. As the precursor deposition gas is introduced into said enclosure, a high density plume of said activated precursor species are formed therefrom due to an electromagnetic field established in an activation region adjacent said aperture. The pressure differential is sufficient to cause those activated precursor species to be deposited upon a remotely positioned substrate. In order to obtain a sufficient pressure differential, it is preferred that the flow of the precursor deposition gas reaches transonic velocity. And in order to obtain a high quality thin film, it is preferred that the plume of activated precursor species is spaced from the substrate; without structural or electrical confinement, a distance from the activation region greater than the mean free path of undesired activated precursor species and within the mean free path of desired species.
    • 一种沉积高质量薄膜的方法,该方法是通过在邻近导管孔之间的压力之间产生相当大的压力差,形成高通量的活化前体物质的前体沉积气体, 气体被引入真空封壳的内部,并且在所述外壳中离开的背景压力。 当前体沉积气体被引入所述外壳中时,由于在邻近所述孔的激活区域中建立的电磁场,所以形成所述活化的前体物质的高密度羽流。 压力差足以使这些活化的前体物质沉积在远距离定位的基底上。 为了获得足够的压差,优选前体沉积气体的流量达到跨音速。 并且为了获得高质量的薄膜,优选活化的前体物质的羽流与基底间隔开; 没有结构或电气限制,距离激活区域的距离大于不期望的活化的前体物质的平均自由程和在所需物种的平均自由程中。